FR3033932B1 - Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement. - Google Patents
Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement. Download PDFInfo
- Publication number
- FR3033932B1 FR3033932B1 FR1552150A FR1552150A FR3033932B1 FR 3033932 B1 FR3033932 B1 FR 3033932B1 FR 1552150 A FR1552150 A FR 1552150A FR 1552150 A FR1552150 A FR 1552150A FR 3033932 B1 FR3033932 B1 FR 3033932B1
- Authority
- FR
- France
- Prior art keywords
- plates
- relative movement
- positioning device
- displacement
- displacement system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/58—Baseboards, masking frames, or other holders for the sensitive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1552150A FR3033932B1 (fr) | 2015-03-16 | 2015-03-16 | Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement. |
IL244591A IL244591B (en) | 2015-03-16 | 2016-03-14 | A system for relative movement between two plates and a positioning device including such a system |
DE102016104737.6A DE102016104737A1 (de) | 2015-03-16 | 2016-03-15 | System zur Relativbewegung zwischen zwei Platten und Positionierungsvorrichtung mit einem solchen Bewegungssystem |
US15/071,582 US20160271790A1 (en) | 2015-03-16 | 2016-03-16 | System for relative movement between two plates and positioning device comprising such a movement system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1552150 | 2015-03-16 | ||
FR1552150A FR3033932B1 (fr) | 2015-03-16 | 2015-03-16 | Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3033932A1 FR3033932A1 (fr) | 2016-09-23 |
FR3033932B1 true FR3033932B1 (fr) | 2018-03-16 |
Family
ID=52991851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1552150A Active FR3033932B1 (fr) | 2015-03-16 | 2015-03-16 | Systeme de deplacement relatif entre deux plaques et dispositif de positionnement comprenant un tel systeme de deplacement. |
Country Status (4)
Country | Link |
---|---|
US (1) | US20160271790A1 (fr) |
DE (1) | DE102016104737A1 (fr) |
FR (1) | FR3033932B1 (fr) |
IL (1) | IL244591B (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107696024B (zh) * | 2017-11-17 | 2020-05-12 | 嘉兴学院 | 一种基于气动肌肉的交叉耦合仿生关节 |
CN110311224A (zh) * | 2019-07-23 | 2019-10-08 | 深圳锐越微技术有限公司 | 小间距微带天线阵列 |
CN117008270B (zh) * | 2023-09-26 | 2023-12-08 | 上海隐冠半导体技术有限公司 | 一种调平调焦机构 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9216461D0 (en) * | 1992-08-03 | 1992-09-16 | Smith James A | Eucentric goniometer or motion system |
US6121743A (en) * | 1996-03-22 | 2000-09-19 | Genmark Automation, Inc. | Dual robotic arm end effectors having independent yaw motion |
CA2492147A1 (fr) * | 2002-07-09 | 2004-01-15 | Amir Khajepour | Manipulateurs paralleles legers utilisant des cables actifs/passifs |
ATE441876T1 (de) * | 2003-07-17 | 2009-09-15 | Newport Corp | Hochauflísender dynamischer positionierungsmechanismus |
JP2005327993A (ja) * | 2004-05-17 | 2005-11-24 | Canon Inc | 位置決め装置、露光装置及びデバイス製造方法 |
WO2010023935A1 (fr) * | 2008-08-29 | 2010-03-04 | 株式会社ニコン | Dispositif et procédé d'alignement de substrats, et procédé de fabrication de semi-conducteur multicouche |
US8601897B2 (en) * | 2009-11-30 | 2013-12-10 | GM Global Technology Operations LLC | Force limiting device and method |
WO2011154429A1 (fr) * | 2010-06-08 | 2011-12-15 | Beckhoff Automation Gmbh | Module de robot et robot |
DE102011006679B4 (de) * | 2011-03-16 | 2018-07-12 | Ferrobotics Compliant Robot Technology Gmbh | Aktive Handhabungsvorrichtung und Verfahren für Kontaktaufgaben |
CN102632508B (zh) * | 2012-04-17 | 2015-04-29 | 浙江大学 | 一种适用于机器人关节的平面扭簧 |
KR101419897B1 (ko) * | 2012-04-26 | 2014-07-15 | 고려대학교 산학협력단 | 병렬형 5자유도 마이크로 로봇 |
US9811067B2 (en) * | 2015-02-12 | 2017-11-07 | Nhk Spring Co., Ltd. | Coil spring modeling apparatus and method of the same |
-
2015
- 2015-03-16 FR FR1552150A patent/FR3033932B1/fr active Active
-
2016
- 2016-03-14 IL IL244591A patent/IL244591B/en active IP Right Grant
- 2016-03-15 DE DE102016104737.6A patent/DE102016104737A1/de not_active Ceased
- 2016-03-16 US US15/071,582 patent/US20160271790A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
IL244591A0 (en) | 2016-07-31 |
IL244591B (en) | 2021-02-28 |
FR3033932A1 (fr) | 2016-09-23 |
DE102016104737A1 (de) | 2017-03-09 |
US20160271790A1 (en) | 2016-09-22 |
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