FR3000050B1 - Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes - Google Patents
Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentesInfo
- Publication number
- FR3000050B1 FR3000050B1 FR1262511A FR1262511A FR3000050B1 FR 3000050 B1 FR3000050 B1 FR 3000050B1 FR 1262511 A FR1262511 A FR 1262511A FR 1262511 A FR1262511 A FR 1262511A FR 3000050 B1 FR3000050 B1 FR 3000050B1
- Authority
- FR
- France
- Prior art keywords
- different dimensions
- deformable elements
- microelectromechanical device
- microelectromechanical
- deformable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0163—Spring holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0307—Anchors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1262511A FR3000050B1 (fr) | 2012-12-20 | 2012-12-20 | Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes |
PCT/FR2013/053094 WO2014096655A1 (fr) | 2012-12-20 | 2013-12-16 | Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1262511A FR3000050B1 (fr) | 2012-12-20 | 2012-12-20 | Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3000050A1 FR3000050A1 (fr) | 2014-06-27 |
FR3000050B1 true FR3000050B1 (fr) | 2016-03-04 |
Family
ID=48289239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1262511A Expired - Fee Related FR3000050B1 (fr) | 2012-12-20 | 2012-12-20 | Dispositif micro-electromecanique possedant au moins deux elements deformables de dimensions differentes |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR3000050B1 (fr) |
WO (1) | WO2014096655A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6044607B2 (ja) | 2014-08-28 | 2016-12-14 | 横河電機株式会社 | 振動式センサ装置 |
FR3058409A1 (fr) * | 2016-11-10 | 2018-05-11 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif microelectromecanique et/ou nanoelectromecanique articule a deplacement hors-plan |
FR3086801B1 (fr) | 2018-10-02 | 2021-01-01 | Commissariat Energie Atomique | Capteur microelectronique a detection hors-plan offrant une sensibilite transverse maitrisee |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2700065B1 (fr) | 1992-12-28 | 1995-02-10 | Commissariat Energie Atomique | Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant. |
US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
FR2941533B1 (fr) | 2009-01-23 | 2011-03-11 | Commissariat Energie Atomique | Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte. |
FR2951826B1 (fr) | 2009-10-23 | 2012-06-15 | Commissariat Energie Atomique | Capteur a detection piezoresistive dans le plan |
FR2954505B1 (fr) | 2009-12-22 | 2012-08-03 | Commissariat Energie Atomique | Structure micromecanique comportant une partie mobile presentant des butees pour des deplacements hors plan de la structure et son procede de realisation |
FR2972263B1 (fr) | 2011-03-03 | 2013-09-27 | Tronics Microsystems | Capteur inertiel et procede de fabrication correspondant |
-
2012
- 2012-12-20 FR FR1262511A patent/FR3000050B1/fr not_active Expired - Fee Related
-
2013
- 2013-12-16 WO PCT/FR2013/053094 patent/WO2014096655A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2014096655A1 (fr) | 2014-06-26 |
FR3000050A1 (fr) | 2014-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
ST | Notification of lapse |
Effective date: 20200905 |