FR2993972B1 - DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION - Google Patents

DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION

Info

Publication number
FR2993972B1
FR2993972B1 FR1257234A FR1257234A FR2993972B1 FR 2993972 B1 FR2993972 B1 FR 2993972B1 FR 1257234 A FR1257234 A FR 1257234A FR 1257234 A FR1257234 A FR 1257234A FR 2993972 B1 FR2993972 B1 FR 2993972B1
Authority
FR
France
Prior art keywords
substrate
determining
thickness
data set
thin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1257234A
Other languages
French (fr)
Other versions
FR2993972A1 (en
Inventor
Jean-Claude Poncot
Sylvain Ballandras
Eric Lebrasseur
Thomas Baron
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JEAN-CLAUDE PONCOT, FR
Original Assignee
INST PIERRE VERNIER
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST PIERRE VERNIER, Centre National de la Recherche Scientifique CNRS filed Critical INST PIERRE VERNIER
Priority to FR1257234A priority Critical patent/FR2993972B1/en
Priority to PCT/EP2013/065827 priority patent/WO2014016416A1/en
Priority to EP13753590.2A priority patent/EP2877812A1/en
Publication of FR2993972A1 publication Critical patent/FR2993972A1/en
Application granted granted Critical
Publication of FR2993972B1 publication Critical patent/FR2993972B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR1257234A 2012-07-26 2012-07-26 DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION Active FR2993972B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1257234A FR2993972B1 (en) 2012-07-26 2012-07-26 DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION
PCT/EP2013/065827 WO2014016416A1 (en) 2012-07-26 2013-07-26 Device for determining a set of spatial thickness data for a thin film on the surface of a substrate, by measurement of infrared emission
EP13753590.2A EP2877812A1 (en) 2012-07-26 2013-07-26 Device for determining a set of spatial thickness data for a thin film on the surface of a substrate, by measurement of infrared emission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1257234A FR2993972B1 (en) 2012-07-26 2012-07-26 DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION

Publications (2)

Publication Number Publication Date
FR2993972A1 FR2993972A1 (en) 2014-01-31
FR2993972B1 true FR2993972B1 (en) 2014-07-18

Family

ID=46826845

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1257234A Active FR2993972B1 (en) 2012-07-26 2012-07-26 DEVICE FOR DETERMINING A SPATIAL DATA SET OF THICKNESS OF A THIN LAYER ON THE SURFACE OF A SUBSTRATE BY MEASURING INFRA RED EMISSION

Country Status (3)

Country Link
EP (1) EP2877812A1 (en)
FR (1) FR2993972B1 (en)
WO (1) WO2014016416A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3022621B1 (en) * 2014-06-19 2022-04-29 Poncot Jean Claude DEVICE FOR MEASURING A SET OF SPATIAL THICKNESS DATA D(X,Y) OF A THIN LAYER AND MEASURING METHOD USING SUCH DEVICE

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8813423D0 (en) * 1988-06-07 1988-07-13 Atomic Energy Authority Uk Coating inspection
US6252237B1 (en) * 1998-07-15 2001-06-26 3M Innovation Properties Company Low cost thickness measurement method and apparatus for thin coatings
DE10013172C2 (en) * 2000-03-17 2002-05-16 Wagner Internat Ag Altstaetten Method and device for the photothermal analysis of a material layer, in particular for measuring the layer thickness
JP2006173496A (en) * 2004-12-17 2006-06-29 Ibiden Co Ltd Method of heating and cooling semiconductor wafer, and device for heating semiconductor
US7407324B2 (en) * 2005-08-10 2008-08-05 Tokyo Electron, Ltd. Method and apparatus for monitoring the thickness of a conductive coating
DE102006009912A1 (en) * 2006-03-03 2007-09-13 Daimlerchrysler Ag Thin layer e.g. paint layer, thickness and/or quality e.g. defect, determining method for e.g. coated part of motor vehicle, involves comparing measured values with reference measured values at comparable temperature and layer composition

Also Published As

Publication number Publication date
WO2014016416A1 (en) 2014-01-30
EP2877812A1 (en) 2015-06-03
FR2993972A1 (en) 2014-01-31

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