FR2980278B1 - Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires - Google Patents

Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires

Info

Publication number
FR2980278B1
FR2980278B1 FR1102805A FR1102805A FR2980278B1 FR 2980278 B1 FR2980278 B1 FR 2980278B1 FR 1102805 A FR1102805 A FR 1102805A FR 1102805 A FR1102805 A FR 1102805A FR 2980278 B1 FR2980278 B1 FR 2980278B1
Authority
FR
France
Prior art keywords
mirror
mechanical means
generating primary
geometric aberrations
primary geometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1102805A
Other languages
English (en)
Other versions
FR2980278A1 (fr
Inventor
Emmanuel Hugot
Marie Laslandes
Marc Ferrari
Arnaud Liotard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aix Marseille Universite
Centre National dEtudes Spatiales CNES
Centre National de la Recherche Scientifique CNRS
Thales SA
Original Assignee
Aix Marseille Universite
Centre National dEtudes Spatiales CNES
Centre National de la Recherche Scientifique CNRS
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aix Marseille Universite, Centre National dEtudes Spatiales CNES, Centre National de la Recherche Scientifique CNRS, Thales SA filed Critical Aix Marseille Universite
Priority to FR1102805A priority Critical patent/FR2980278B1/fr
Priority to EP20120183932 priority patent/EP2570842B1/fr
Priority to US13/619,373 priority patent/US8876306B2/en
Publication of FR2980278A1 publication Critical patent/FR2980278A1/fr
Application granted granted Critical
Publication of FR2980278B1 publication Critical patent/FR2980278B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FR1102805A 2011-09-16 2011-09-16 Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires Expired - Fee Related FR2980278B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1102805A FR2980278B1 (fr) 2011-09-16 2011-09-16 Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires
EP20120183932 EP2570842B1 (fr) 2011-09-16 2012-09-11 Miroir comprenant des moyens mécaniques de génération d'aberrations géométriques primaires
US13/619,373 US8876306B2 (en) 2011-09-16 2012-09-14 Mirror comprising mechanical means for generating primary geometrical aberrations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1102805A FR2980278B1 (fr) 2011-09-16 2011-09-16 Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires

Publications (2)

Publication Number Publication Date
FR2980278A1 FR2980278A1 (fr) 2013-03-22
FR2980278B1 true FR2980278B1 (fr) 2014-05-02

Family

ID=46796482

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1102805A Expired - Fee Related FR2980278B1 (fr) 2011-09-16 2011-09-16 Miroir comprenant des moyens mecaniques de generation d'aberrations geometriques primaires

Country Status (3)

Country Link
US (1) US8876306B2 (fr)
EP (1) EP2570842B1 (fr)
FR (1) FR2980278B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror
JP6676189B2 (ja) * 2016-12-16 2020-04-08 三菱電機株式会社 形状可変鏡及びレーザ加工装置
DE102017117468B3 (de) * 2017-08-02 2018-09-20 Jenoptik Optical Systems Gmbh Vorrichtung zur variierbaren Beeinflussung der Wellenfront eines Strahlenbündels mit einer über ihre Umfangsfläche deformierbaren Planoptik
FR3100344B1 (fr) * 2019-08-30 2021-09-24 Alpao Dispositif d’optique adaptative de construction simplifiee et procede de fabrication associe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043644A (en) * 1976-07-15 1977-08-23 Humphrey Instruments, Inc. Elastically compensated off-axis mirror
US6467915B2 (en) * 2000-01-19 2002-10-22 Diehl Munitionssysteme Gmbh & Co. Kg Deformable mirror, in particular for a laser beam material machining apparatus
US6425671B1 (en) * 2000-04-13 2002-07-30 Alan Adler Optical mirror flexing structure and assembly
US6411426B1 (en) * 2000-04-25 2002-06-25 Asml, Us, Inc. Apparatus, system, and method for active compensation of aberrations in an optical system
DE10151919B4 (de) * 2001-10-20 2007-02-01 Carl Zeiss Smt Ag Belichtungsobjektiv in der Halbleiterlithographie
WO2004057407A1 (fr) * 2002-12-23 2004-07-08 Bae Systems Plc Miroir deformable
US7229178B1 (en) * 2004-12-20 2007-06-12 Sandia Corporation Variable focal length deformable mirror
DE102007038872A1 (de) * 2007-08-16 2009-02-26 Seereal Technologies S.A. Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht

Also Published As

Publication number Publication date
EP2570842B1 (fr) 2014-11-12
FR2980278A1 (fr) 2013-03-22
EP2570842A1 (fr) 2013-03-20
US20130070355A1 (en) 2013-03-21
US8876306B2 (en) 2014-11-04

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Year of fee payment: 5

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Effective date: 20170531