FR2978601B1 - METHOD FOR MANUFACTURING GAN SUBSTRATE OR GAN-BASED DEVICE ON NATIVE GAN-TYPE SUBSTRATE USING SACRIFICIAL STAMP LAYER - Google Patents
METHOD FOR MANUFACTURING GAN SUBSTRATE OR GAN-BASED DEVICE ON NATIVE GAN-TYPE SUBSTRATE USING SACRIFICIAL STAMP LAYERInfo
- Publication number
- FR2978601B1 FR2978601B1 FR1156994A FR1156994A FR2978601B1 FR 2978601 B1 FR2978601 B1 FR 2978601B1 FR 1156994 A FR1156994 A FR 1156994A FR 1156994 A FR1156994 A FR 1156994A FR 2978601 B1 FR2978601 B1 FR 2978601B1
- Authority
- FR
- France
- Prior art keywords
- gan
- substrate
- sacrificial
- native
- based device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02389—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02469—Group 12/16 materials
- H01L21/02472—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1156994A FR2978601B1 (en) | 2011-07-29 | 2011-07-29 | METHOD FOR MANUFACTURING GAN SUBSTRATE OR GAN-BASED DEVICE ON NATIVE GAN-TYPE SUBSTRATE USING SACRIFICIAL STAMP LAYER |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1156994A FR2978601B1 (en) | 2011-07-29 | 2011-07-29 | METHOD FOR MANUFACTURING GAN SUBSTRATE OR GAN-BASED DEVICE ON NATIVE GAN-TYPE SUBSTRATE USING SACRIFICIAL STAMP LAYER |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2978601A1 FR2978601A1 (en) | 2013-02-01 |
FR2978601B1 true FR2978601B1 (en) | 2016-05-13 |
Family
ID=44741605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1156994A Active FR2978601B1 (en) | 2011-07-29 | 2011-07-29 | METHOD FOR MANUFACTURING GAN SUBSTRATE OR GAN-BASED DEVICE ON NATIVE GAN-TYPE SUBSTRATE USING SACRIFICIAL STAMP LAYER |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2978601B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9231053B2 (en) | 2013-06-25 | 2016-01-05 | Honeywell International Inc. | Light emitting diodes having zinc oxide fibers over silicon substrates |
US9419081B2 (en) | 2014-08-21 | 2016-08-16 | Honeywell International Inc. | Reusable substrate bases, semiconductor devices using such reusable substrate bases, and methods for making the reusable substrate bases |
GB201814192D0 (en) | 2018-08-31 | 2018-10-17 | Univ Bristol | A semiconductor on diamond substrate, percursor for use in preparing a semiconductor on diamond substrate, and methods of making the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005001928A (en) * | 2003-06-11 | 2005-01-06 | Fujikura Ltd | Self-supporting substrate and method for producing the same |
KR100638869B1 (en) * | 2005-06-21 | 2006-10-27 | 삼성전기주식회사 | Method of fabricating nitride type compound layer, gan substrate and vertical structure nitride type semiconductor light emitting device |
WO2007023911A1 (en) * | 2005-08-25 | 2007-03-01 | Tohoku Techno Arch Co., Ltd. | Process for producing semiconductor substrate |
TW200912053A (en) * | 2007-09-14 | 2009-03-16 | Sino American Silicon Prod Inc | Method of fabricating semiconductor substrate by use of heterogeneous substrate and recycling heterogeneous substrate during fabrication thereof |
-
2011
- 2011-07-29 FR FR1156994A patent/FR2978601B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR2978601A1 (en) | 2013-02-01 |
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