FR2954582B1 - Dispositif electromecanique a base d'electret, et son procede de fabrication - Google Patents
Dispositif electromecanique a base d'electret, et son procede de fabricationInfo
- Publication number
- FR2954582B1 FR2954582B1 FR0959514A FR0959514A FR2954582B1 FR 2954582 B1 FR2954582 B1 FR 2954582B1 FR 0959514 A FR0959514 A FR 0959514A FR 0959514 A FR0959514 A FR 0959514A FR 2954582 B1 FR2954582 B1 FR 2954582B1
- Authority
- FR
- France
- Prior art keywords
- electret
- manufacturing
- same
- device based
- electromechanical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0959514A FR2954582B1 (fr) | 2009-12-23 | 2009-12-23 | Dispositif electromecanique a base d'electret, et son procede de fabrication |
PCT/EP2010/070411 WO2011076806A1 (fr) | 2009-12-23 | 2010-12-21 | Dispositif electromecanique a base d'electret mineral, et son procede de fabrication |
US13/518,056 US20120273904A1 (en) | 2009-12-23 | 2010-12-21 | Mineral electret-based electromechanical device and method for manufacturing same |
EP10799024A EP2517354A1 (fr) | 2009-12-23 | 2010-12-21 | Dispositif electromecanique a base d'electret mineral, et son procede de fabrication |
JP2012545301A JP2013516099A (ja) | 2009-12-23 | 2010-12-21 | 無機エレクトレットベースの電気機械デバイスおよびその作成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0959514A FR2954582B1 (fr) | 2009-12-23 | 2009-12-23 | Dispositif electromecanique a base d'electret, et son procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2954582A1 FR2954582A1 (fr) | 2011-06-24 |
FR2954582B1 true FR2954582B1 (fr) | 2017-11-03 |
Family
ID=42674606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0959514A Active FR2954582B1 (fr) | 2009-12-23 | 2009-12-23 | Dispositif electromecanique a base d'electret, et son procede de fabrication |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120273904A1 (fr) |
EP (1) | EP2517354A1 (fr) |
JP (1) | JP2013516099A (fr) |
FR (1) | FR2954582B1 (fr) |
WO (1) | WO2011076806A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6594619B2 (ja) * | 2014-11-14 | 2019-10-23 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
CN106209003B (zh) * | 2016-07-06 | 2019-03-22 | 中国科学院上海微***与信息技术研究所 | 利用薄膜转移技术制备薄膜体声波器件的方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2681472B1 (fr) | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
JP4424331B2 (ja) * | 2005-08-01 | 2010-03-03 | セイコーエプソン株式会社 | 静電アクチュエータ、液滴吐出ヘッド、液滴吐出ヘッドの駆動方法及び静電アクチュエータの製造方法 |
DE102005043034A1 (de) * | 2005-09-09 | 2007-03-15 | Siemens Ag | Vorrichtung und Verfahren zur Bewegung einer Flüssigkeit |
US7362035B2 (en) * | 2005-09-22 | 2008-04-22 | The Penn State Research Foundation | Polymer bulk acoustic resonator |
CN101128070A (zh) * | 2006-08-17 | 2008-02-20 | 雅马哈株式会社 | 声电换能器 |
-
2009
- 2009-12-23 FR FR0959514A patent/FR2954582B1/fr active Active
-
2010
- 2010-12-21 WO PCT/EP2010/070411 patent/WO2011076806A1/fr active Application Filing
- 2010-12-21 JP JP2012545301A patent/JP2013516099A/ja active Pending
- 2010-12-21 EP EP10799024A patent/EP2517354A1/fr not_active Ceased
- 2010-12-21 US US13/518,056 patent/US20120273904A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2013516099A (ja) | 2013-05-09 |
US20120273904A1 (en) | 2012-11-01 |
WO2011076806A1 (fr) | 2011-06-30 |
FR2954582A1 (fr) | 2011-06-24 |
EP2517354A1 (fr) | 2012-10-31 |
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