FR2954524B1 - Reseau de diffraction reflechissant dielectrique optimise - Google Patents
Reseau de diffraction reflechissant dielectrique optimiseInfo
- Publication number
- FR2954524B1 FR2954524B1 FR0959157A FR0959157A FR2954524B1 FR 2954524 B1 FR2954524 B1 FR 2954524B1 FR 0959157 A FR0959157 A FR 0959157A FR 0959157 A FR0959157 A FR 0959157A FR 2954524 B1 FR2954524 B1 FR 2954524B1
- Authority
- FR
- France
- Prior art keywords
- dielectric reflecting
- diffraction network
- reflecting diffraction
- optimized dielectric
- optimized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0959157A FR2954524B1 (fr) | 2009-12-17 | 2009-12-17 | Reseau de diffraction reflechissant dielectrique optimise |
JP2012543872A JP6005522B2 (ja) | 2009-12-17 | 2010-12-13 | 最適化された反射誘電体回折格子 |
PCT/FR2010/052684 WO2011073554A1 (fr) | 2009-12-17 | 2010-12-13 | Réseau de diffraction réfléchissant diélectrique optimisé |
CN2010800623534A CN102812388A (zh) | 2009-12-17 | 2010-12-13 | 优化的电介质反射式衍射光栅 |
US13/516,906 US20120300302A1 (en) | 2009-12-17 | 2010-12-13 | Optimized dielectric reflective diffraction grating |
EP10807464A EP2513688A1 (fr) | 2009-12-17 | 2010-12-13 | Réseau de diffraction réfléchissant diélectrique optimisé |
KR1020127018362A KR101759213B1 (ko) | 2009-12-17 | 2010-12-13 | 최적화된 유전체 반사 회절격자 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0959157A FR2954524B1 (fr) | 2009-12-17 | 2009-12-17 | Reseau de diffraction reflechissant dielectrique optimise |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2954524A1 FR2954524A1 (fr) | 2011-06-24 |
FR2954524B1 true FR2954524B1 (fr) | 2012-09-28 |
Family
ID=42091521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0959157A Active FR2954524B1 (fr) | 2009-12-17 | 2009-12-17 | Reseau de diffraction reflechissant dielectrique optimise |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120300302A1 (fr) |
EP (1) | EP2513688A1 (fr) |
JP (1) | JP6005522B2 (fr) |
KR (1) | KR101759213B1 (fr) |
CN (1) | CN102812388A (fr) |
FR (1) | FR2954524B1 (fr) |
WO (1) | WO2011073554A1 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102314040B (zh) * | 2011-09-05 | 2013-04-17 | 青岛大学 | 一种宽光谱金属介质膜光栅及其优化方法 |
CN102313920B (zh) * | 2011-09-05 | 2013-06-05 | 青岛大学 | 一种基于非规整膜层结构的宽光谱金属介质膜光栅 |
CN103592714B (zh) * | 2013-10-17 | 2015-07-08 | 同济大学 | 一种易于制备的反射式多通道滤光元件的设计方法 |
CN104777532B (zh) * | 2015-04-03 | 2017-02-22 | 中国科学院上海光学精密机械研究所 | 基于级联光栅结构的超窄带te偏振光谱选择性吸收器 |
US11112618B2 (en) | 2015-09-03 | 2021-09-07 | Asml Netherlands B.V. | Beam splitting apparatus |
US10241244B2 (en) * | 2016-07-29 | 2019-03-26 | Lumentum Operations Llc | Thin film total internal reflection diffraction grating for single polarization or dual polarization |
US11333807B2 (en) | 2017-06-08 | 2022-05-17 | Lawrence Livermore National Security, Llc | Metal-overcoated grating and method |
US20210181391A1 (en) * | 2017-11-06 | 2021-06-17 | Aalto University Foundation Sr | A Field-Enhancing Device |
JP2019120500A (ja) * | 2017-12-28 | 2019-07-22 | 株式会社ミツトヨ | スケールおよびその製造方法 |
US11747528B2 (en) * | 2018-08-31 | 2023-09-05 | Samsung Electronics Co., Ltd. | Diffraction grating device, method of manufacturing the same, and optical apparatus including the diffraction grating device |
DE102018220629A1 (de) * | 2018-11-29 | 2020-06-04 | Carl Zeiss Smt Gmbh | Spiegel für eine Beleuchtungsoptik einer Projektionsbelichtungsanlage mit einem Spektralfilter in Form einer Gitterstruktur und Verfahren zur Herstellung eines Spektralfilters in Form einer Gitterstruktur auf einem Spiegel |
CN111366999B (zh) * | 2020-03-26 | 2021-11-26 | 合肥工业大学 | 一种基于三氧化钼渐变光栅的宽带极化敏感吸收器 |
CN114460676B (zh) * | 2022-03-03 | 2024-01-09 | 福建睿创光电科技有限公司 | 一种1030nm正弦型介质光栅及其制作方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5907436A (en) * | 1995-09-29 | 1999-05-25 | The Regents Of The University Of California | Multilayer dielectric diffraction gratings |
AT410732B (de) * | 1999-07-07 | 2003-07-25 | Femtolasers Produktions Gmbh | Dispersiver mehrschichtiger spiegel |
US6400509B1 (en) * | 2000-04-07 | 2002-06-04 | Zolo Technologies, Inc. | Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices |
JP2002098820A (ja) * | 2000-09-21 | 2002-04-05 | Nippon Sheet Glass Co Ltd | 反射型回折格子 |
CN100585384C (zh) * | 2002-12-19 | 2010-01-27 | 尤纳克西斯巴尔策斯公司 | 产生电磁场分布的方法 |
CN100526919C (zh) * | 2003-02-18 | 2009-08-12 | 住友电气工业株式会社 | 衍射光栅元件及其制造方法和设计方法 |
CN100476476C (zh) * | 2004-03-24 | 2009-04-08 | Enablence有限公司 | 平面波导反射衍射光栅 |
JP5050594B2 (ja) * | 2007-03-20 | 2012-10-17 | 旭硝子株式会社 | 分光装置 |
JP5311757B2 (ja) * | 2007-03-29 | 2013-10-09 | キヤノン株式会社 | 反射光学素子、露光装置およびデバイス製造方法 |
US8116002B2 (en) * | 2007-08-27 | 2012-02-14 | Lumella Inc. | Grating device with adjusting layer |
-
2009
- 2009-12-17 FR FR0959157A patent/FR2954524B1/fr active Active
-
2010
- 2010-12-13 JP JP2012543872A patent/JP6005522B2/ja active Active
- 2010-12-13 US US13/516,906 patent/US20120300302A1/en not_active Abandoned
- 2010-12-13 KR KR1020127018362A patent/KR101759213B1/ko active IP Right Grant
- 2010-12-13 CN CN2010800623534A patent/CN102812388A/zh active Pending
- 2010-12-13 WO PCT/FR2010/052684 patent/WO2011073554A1/fr active Application Filing
- 2010-12-13 EP EP10807464A patent/EP2513688A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2011073554A1 (fr) | 2011-06-23 |
FR2954524A1 (fr) | 2011-06-24 |
KR20130008513A (ko) | 2013-01-22 |
EP2513688A1 (fr) | 2012-10-24 |
CN102812388A (zh) | 2012-12-05 |
US20120300302A1 (en) | 2012-11-29 |
JP2013514542A (ja) | 2013-04-25 |
KR101759213B1 (ko) | 2017-07-18 |
JP6005522B2 (ja) | 2016-10-12 |
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