FR2947628B1 - Procede de fabrication d'une jauge de deformation en circuit integre - Google Patents

Procede de fabrication d'une jauge de deformation en circuit integre

Info

Publication number
FR2947628B1
FR2947628B1 FR0903227A FR0903227A FR2947628B1 FR 2947628 B1 FR2947628 B1 FR 2947628B1 FR 0903227 A FR0903227 A FR 0903227A FR 0903227 A FR0903227 A FR 0903227A FR 2947628 B1 FR2947628 B1 FR 2947628B1
Authority
FR
France
Prior art keywords
integrated circuit
manufacturing integrated
deformation gauge
circuit deformation
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0903227A
Other languages
English (en)
Other versions
FR2947628A1 (fr
Inventor
Raymond Buisson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Technique des Industries Mecaniques CETIM
Original Assignee
Centre Technique des Industries Mecaniques CETIM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Technique des Industries Mecaniques CETIM filed Critical Centre Technique des Industries Mecaniques CETIM
Priority to FR0903227A priority Critical patent/FR2947628B1/fr
Publication of FR2947628A1 publication Critical patent/FR2947628A1/fr
Application granted granted Critical
Publication of FR2947628B1 publication Critical patent/FR2947628B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
FR0903227A 2009-07-01 2009-07-01 Procede de fabrication d'une jauge de deformation en circuit integre Expired - Fee Related FR2947628B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0903227A FR2947628B1 (fr) 2009-07-01 2009-07-01 Procede de fabrication d'une jauge de deformation en circuit integre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0903227A FR2947628B1 (fr) 2009-07-01 2009-07-01 Procede de fabrication d'une jauge de deformation en circuit integre

Publications (2)

Publication Number Publication Date
FR2947628A1 FR2947628A1 (fr) 2011-01-07
FR2947628B1 true FR2947628B1 (fr) 2011-08-26

Family

ID=41334357

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0903227A Expired - Fee Related FR2947628B1 (fr) 2009-07-01 2009-07-01 Procede de fabrication d'une jauge de deformation en circuit integre

Country Status (1)

Country Link
FR (1) FR2947628B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113820334B (zh) * 2021-10-26 2022-06-21 江西交通职业技术学院 基于大数据处理的桥梁寿命周期管理***

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614678A (en) * 1967-08-11 1971-10-19 Gen Electric Electromechanical filters with integral piezoresistive output and methods of making same
JP2861477B2 (ja) * 1991-06-03 1999-02-24 株式会社デンソー 半導体歪みセンサ
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
US6332359B1 (en) * 1997-04-24 2001-12-25 Fuji Electric Co., Ltd. Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor

Also Published As

Publication number Publication date
FR2947628A1 (fr) 2011-01-07

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