FR2923301B1 - Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir - Google Patents

Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir

Info

Publication number
FR2923301B1
FR2923301B1 FR0707719A FR0707719A FR2923301B1 FR 2923301 B1 FR2923301 B1 FR 2923301B1 FR 0707719 A FR0707719 A FR 0707719A FR 0707719 A FR0707719 A FR 0707719A FR 2923301 B1 FR2923301 B1 FR 2923301B1
Authority
FR
France
Prior art keywords
mirror
raideur
realizing
tool
distributed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0707719A
Other languages
English (en)
Other versions
FR2923301A1 (fr
Inventor
Frederic Rooms
Sebastien Camet
Jean-Francois Curis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UJF FILIALE
Original Assignee
UJF FILIALE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UJF FILIALE filed Critical UJF FILIALE
Priority to FR0707719A priority Critical patent/FR2923301B1/fr
Priority to EP08871239A priority patent/EP2206006A1/fr
Priority to CA2703870A priority patent/CA2703870A1/fr
Priority to US12/740,057 priority patent/US8810891B2/en
Priority to JP2010531559A priority patent/JP5452497B2/ja
Priority to PCT/FR2008/001542 priority patent/WO2009092901A1/fr
Publication of FR2923301A1 publication Critical patent/FR2923301A1/fr
Application granted granted Critical
Publication of FR2923301B1 publication Critical patent/FR2923301B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FR0707719A 2007-11-02 2007-11-02 Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir Expired - Fee Related FR2923301B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0707719A FR2923301B1 (fr) 2007-11-02 2007-11-02 Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir
EP08871239A EP2206006A1 (fr) 2007-11-02 2008-10-31 Miroir deformable à raideur répartie, outil et procédé pour réaliser un tel miroir
CA2703870A CA2703870A1 (fr) 2007-11-02 2008-10-31 Miroir deformable a raideur repartie, outil et procede pour realiser un tel miroir
US12/740,057 US8810891B2 (en) 2007-11-02 2008-10-31 Deformable mirror with distributed stiffness, tool and method for producing such a mirror
JP2010531559A JP5452497B2 (ja) 2007-11-02 2008-10-31 分散型剛体を備えた可変ミラー、可変ミラー製造ツール、および可変ミラー製造方法
PCT/FR2008/001542 WO2009092901A1 (fr) 2007-11-02 2008-10-31 Miroir deformable à raideur répartie, outil et procédé pour réaliser un tel miroir

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0707719A FR2923301B1 (fr) 2007-11-02 2007-11-02 Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir

Publications (2)

Publication Number Publication Date
FR2923301A1 FR2923301A1 (fr) 2009-05-08
FR2923301B1 true FR2923301B1 (fr) 2010-09-17

Family

ID=39433909

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0707719A Expired - Fee Related FR2923301B1 (fr) 2007-11-02 2007-11-02 Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir

Country Status (6)

Country Link
US (1) US8810891B2 (fr)
EP (1) EP2206006A1 (fr)
JP (1) JP5452497B2 (fr)
CA (1) CA2703870A1 (fr)
FR (1) FR2923301B1 (fr)
WO (1) WO2009092901A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2232653B1 (fr) 2007-12-21 2013-03-27 Board of Trustees of Michigan State University Controle de phase dans impulsions laser ultracourtes par un miroir deformable dans une extenseur d'impulsions
FR2935054B1 (fr) 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
US8861075B2 (en) 2009-03-05 2014-10-14 Board Of Trustees Of Michigan State University Laser amplification system
US8630322B2 (en) 2010-03-01 2014-01-14 Board Of Trustees Of Michigan State University Laser system for output manipulation
FR2973168B1 (fr) * 2011-03-24 2013-05-17 Thales Sa Systeme d'actionnement pour reflecteur d'antenne a surface reflechissante deformable
FR2974425B1 (fr) * 2011-04-19 2014-06-27 Centre Nat Etd Spatiales Dispositif de correction d'au moins une aberration d'evolution connue a miroir deformable
GB2490143B (en) * 2011-04-20 2013-03-13 Rolls Royce Plc Method of manufacturing a component
US9500855B2 (en) * 2012-06-04 2016-11-22 The Boeing Company Modal corrector mirror with compliant actuation for optical aberrations
JP6308790B2 (ja) * 2013-02-18 2018-04-11 キヤノン株式会社 可変形状ミラー及びその製造方法
FR3019315B1 (fr) * 2014-03-25 2017-09-08 Wavelens Dispositif optique a membrane deformable
FR3047321B1 (fr) * 2016-02-03 2018-02-23 Thales Miroir deformable
JP6929024B2 (ja) * 2016-07-06 2021-09-01 キヤノン株式会社 光学装置、露光装置及び物品の製造方法
CN112068307B (zh) * 2020-09-21 2021-12-07 中国科学院长春光学精密机械与物理研究所 一种混合式热驱动波前改正装置
DE102022116700A1 (de) * 2022-07-05 2024-01-11 Carl Zeiss Smt Gmbh Optische Baugruppe, Projektionsbelichtungsanlage für die Halbleiterlithographie und Verfahren

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516062A (en) * 1983-10-27 1985-05-07 The Perkin-Elmer Corporation Actuator
US5166818A (en) 1991-03-11 1992-11-24 Bell Communications Research, Inc. Optical pulse-shaping device and method, and optical communications station and method
DE4208229A1 (de) 1992-03-14 1993-09-16 Krupp Industrietech Formeinstellbarer teleskopspiegel
US5684566A (en) * 1995-05-24 1997-11-04 Svg Lithography Systems, Inc. Illumination system and method employing a deformable mirror and diffractive optical elements
US5831780A (en) 1996-01-31 1998-11-03 Raytheon Company Continually supported thin mirror with force-type actuators
FR2757277B1 (fr) * 1996-12-16 1999-03-05 Sfim Ind Dispositif pour la commande de la deformation d'un miroir d'un systeme optique
FR2813677A1 (fr) * 2000-09-07 2002-03-08 Sagem Procede et systeme pour la realisation d'une surface de forme figee de grande precision
DE10160893A1 (de) * 2001-12-12 2003-07-17 Diehl Munitionssysteme Gmbh Verformbarer Spiegel
US7708415B2 (en) 2003-10-20 2010-05-04 Bae Systems Plc Mirror structure having piezoelectric element bonded to a mirror substrate
US8162494B2 (en) 2003-11-21 2012-04-24 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Surface deformation actuation structure
JP2006018176A (ja) * 2004-07-05 2006-01-19 Olympus Corp 静電型可変形状鏡
FR2876460B1 (fr) 2004-10-12 2007-05-18 Centre Nat Rech Scient Cnrse Miroir deformable

Also Published As

Publication number Publication date
JP5452497B2 (ja) 2014-03-26
US20110019295A1 (en) 2011-01-27
JP2011503641A (ja) 2011-01-27
WO2009092901A1 (fr) 2009-07-30
US8810891B2 (en) 2014-08-19
FR2923301A1 (fr) 2009-05-08
EP2206006A1 (fr) 2010-07-14
CA2703870A1 (fr) 2009-07-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150731