FR2916083B1 - Procede de fabrication d'un dispositif a semiconducteur comportant un transistor fet avec grille en t - Google Patents

Procede de fabrication d'un dispositif a semiconducteur comportant un transistor fet avec grille en t

Info

Publication number
FR2916083B1
FR2916083B1 FR0851445A FR0851445A FR2916083B1 FR 2916083 B1 FR2916083 B1 FR 2916083B1 FR 0851445 A FR0851445 A FR 0851445A FR 0851445 A FR0851445 A FR 0851445A FR 2916083 B1 FR2916083 B1 FR 2916083B1
Authority
FR
France
Prior art keywords
grid
producing
semiconductor device
fet transistor
fet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0851445A
Other languages
English (en)
Other versions
FR2916083A1 (fr
Inventor
Yasuki Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2916083A1 publication Critical patent/FR2916083A1/fr
Application granted granted Critical
Publication of FR2916083B1 publication Critical patent/FR2916083B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/8252—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using III-V technology
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
FR0851445A 2007-05-10 2008-03-05 Procede de fabrication d'un dispositif a semiconducteur comportant un transistor fet avec grille en t Expired - Fee Related FR2916083B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007126017A JP5320689B2 (ja) 2007-05-10 2007-05-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
FR2916083A1 FR2916083A1 (fr) 2008-11-14
FR2916083B1 true FR2916083B1 (fr) 2011-11-25

Family

ID=39868958

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0851445A Expired - Fee Related FR2916083B1 (fr) 2007-05-10 2008-03-05 Procede de fabrication d'un dispositif a semiconducteur comportant un transistor fet avec grille en t

Country Status (4)

Country Link
US (1) US7625789B2 (fr)
JP (1) JP5320689B2 (fr)
DE (1) DE102008010328A1 (fr)
FR (1) FR2916083B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010067692A (ja) * 2008-09-09 2010-03-25 Toshiba Corp 半導体装置及び半導体装置の製造方法
US9293379B2 (en) * 2009-09-03 2016-03-22 Raytheon Company Semiconductor structure with layers having different hydrogen contents
US20110053336A1 (en) * 2009-09-03 2011-03-03 Raytheon Company Method for selective deposition of dielectric layers on semiconductor structures
US9082722B2 (en) * 2013-03-25 2015-07-14 Raytheon Company Monolithic integrated circuit (MMIC) structure and method for forming such structure
US9490282B2 (en) * 2015-03-19 2016-11-08 Omnivision Technologies, Inc. Photosensitive capacitor pixel for image sensor
US9478652B1 (en) 2015-04-10 2016-10-25 Raytheon Company Monolithic integrated circuit (MMIC) structure having composite etch stop layer and method for forming such structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04328867A (ja) * 1991-04-30 1992-11-17 Sekiyu Sangyo Kasseika Center 赤外線検出器
JPH05129345A (ja) * 1991-11-08 1993-05-25 Toshiba Corp マイクロ波集積回路の製造方法
JP2522159B2 (ja) 1993-06-24 1996-08-07 日本電気株式会社 半導体集積回路の製造方法
JP2605647B2 (ja) 1993-12-27 1997-04-30 日本電気株式会社 半導体装置の製造方法
JP3226808B2 (ja) * 1996-11-26 2001-11-05 ルーセント テクノロジーズ インコーポレイテッド 集積回路チップを製造する方法
JP2000138237A (ja) * 1998-11-02 2000-05-16 Nec Corp 感光性有機膜を有する半導体装置及びその製造方法
KR100827437B1 (ko) * 2006-05-22 2008-05-06 삼성전자주식회사 Ｍｉｍ 커패시터를 구비하는 반도체 집적 회로 장치 및이의 제조 방법

Also Published As

Publication number Publication date
DE102008010328A1 (de) 2008-11-20
US7625789B2 (en) 2009-12-01
FR2916083A1 (fr) 2008-11-14
US20080280400A1 (en) 2008-11-13
JP5320689B2 (ja) 2013-10-23
JP2008282997A (ja) 2008-11-20

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Effective date: 20161130