FR2911429B1 - "procede et systeme de detection d'amas de defauts a la surface d'un substrat" - Google Patents

"procede et systeme de detection d'amas de defauts a la surface d'un substrat"

Info

Publication number
FR2911429B1
FR2911429B1 FR0700192A FR0700192A FR2911429B1 FR 2911429 B1 FR2911429 B1 FR 2911429B1 FR 0700192 A FR0700192 A FR 0700192A FR 0700192 A FR0700192 A FR 0700192A FR 2911429 B1 FR2911429 B1 FR 2911429B1
Authority
FR
France
Prior art keywords
substrate
detecting fault
amounts
fault amounts
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0700192A
Other languages
English (en)
Other versions
FR2911429A1 (fr
Inventor
Walter Schwarzenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0700192A priority Critical patent/FR2911429B1/fr
Publication of FR2911429A1 publication Critical patent/FR2911429A1/fr
Application granted granted Critical
Publication of FR2911429B1 publication Critical patent/FR2911429B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR0700192A 2007-01-11 2007-01-11 "procede et systeme de detection d'amas de defauts a la surface d'un substrat" Expired - Fee Related FR2911429B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0700192A FR2911429B1 (fr) 2007-01-11 2007-01-11 "procede et systeme de detection d'amas de defauts a la surface d'un substrat"

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0700192A FR2911429B1 (fr) 2007-01-11 2007-01-11 "procede et systeme de detection d'amas de defauts a la surface d'un substrat"

Publications (2)

Publication Number Publication Date
FR2911429A1 FR2911429A1 (fr) 2008-07-18
FR2911429B1 true FR2911429B1 (fr) 2009-04-17

Family

ID=38441636

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0700192A Expired - Fee Related FR2911429B1 (fr) 2007-01-11 2007-01-11 "procede et systeme de detection d'amas de defauts a la surface d'un substrat"

Country Status (1)

Country Link
FR (1) FR2911429B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2980916B1 (fr) 2011-10-03 2014-03-28 Soitec Silicon On Insulator Procede de fabrication d'une structure de type silicium sur isolant

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240866A (en) * 1992-02-03 1993-08-31 At&T Bell Laboratories Method for characterizing failed circuits on semiconductor wafers
JPH10214866A (ja) * 1997-01-28 1998-08-11 Hitachi Ltd 不良解析方法および装置
TWI230343B (en) * 2002-05-03 2005-04-01 Chi Mei Optoelectronics Corp A method for classifying a substrate
JP4310090B2 (ja) * 2002-09-27 2009-08-05 株式会社日立製作所 欠陥データ解析方法及びその装置並びにレビューシステム

Also Published As

Publication number Publication date
FR2911429A1 (fr) 2008-07-18

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100930