FR2906933B1 - Dispositif de separation d'une structure empilee et procede associe - Google Patents

Dispositif de separation d'une structure empilee et procede associe

Info

Publication number
FR2906933B1
FR2906933B1 FR0654138A FR0654138A FR2906933B1 FR 2906933 B1 FR2906933 B1 FR 2906933B1 FR 0654138 A FR0654138 A FR 0654138A FR 0654138 A FR0654138 A FR 0654138A FR 2906933 B1 FR2906933 B1 FR 2906933B1
Authority
FR
France
Prior art keywords
stack
periphery
separator
contact
contact point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0654138A
Other languages
English (en)
Other versions
FR2906933A1 (fr
Inventor
Hubert Moriceau
Sylvie Sartori
Philippe Montmayeul
Christophe Morales
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0654138A priority Critical patent/FR2906933B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to US12/444,062 priority patent/US20120261076A1/en
Priority to DE602007005836T priority patent/DE602007005836D1/de
Priority to EP07820925A priority patent/EP2091708B1/fr
Priority to JP2009530888A priority patent/JP2010505651A/ja
Priority to AT07820925T priority patent/ATE463331T1/de
Priority to PCT/EP2007/060548 priority patent/WO2008040782A1/fr
Publication of FR2906933A1 publication Critical patent/FR2906933A1/fr
Application granted granted Critical
Publication of FR2906933B1 publication Critical patent/FR2906933B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1961—Severing delaminating means [e.g., chisel, etc.]
    • Y10T156/1967—Cutting delaminating means
    • Y10T156/1972—Shearing delaminating means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Centrifugal Separators (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Supplying Of Containers To The Packaging Station (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Electron Tubes For Measurement (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
FR0654138A 2006-10-06 2006-10-06 Dispositif de separation d'une structure empilee et procede associe Expired - Fee Related FR2906933B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0654138A FR2906933B1 (fr) 2006-10-06 2006-10-06 Dispositif de separation d'une structure empilee et procede associe
DE602007005836T DE602007005836D1 (de) 2006-10-06 2007-10-04 Vorrichtung zum trennen einer gestapelten struktur und verwandtes verfahren
EP07820925A EP2091708B1 (fr) 2006-10-06 2007-10-04 Dispositif de separation d'une structure empilee et procede associe.
JP2009530888A JP2010505651A (ja) 2006-10-06 2007-10-04 積層構造体を分離する装置及び関連する方法
US12/444,062 US20120261076A1 (en) 2006-10-06 2007-10-04 Device for separation of a stacked structure and associated method
AT07820925T ATE463331T1 (de) 2006-10-06 2007-10-04 Vorrichtung zum trennen einer gestapelten struktur und verwandtes verfahren
PCT/EP2007/060548 WO2008040782A1 (fr) 2006-10-06 2007-10-04 Dispositif de separation d'une structure empilee et procede associe.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0654138A FR2906933B1 (fr) 2006-10-06 2006-10-06 Dispositif de separation d'une structure empilee et procede associe

Publications (2)

Publication Number Publication Date
FR2906933A1 FR2906933A1 (fr) 2008-04-11
FR2906933B1 true FR2906933B1 (fr) 2009-02-13

Family

ID=37964753

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0654138A Expired - Fee Related FR2906933B1 (fr) 2006-10-06 2006-10-06 Dispositif de separation d'une structure empilee et procede associe

Country Status (7)

Country Link
US (1) US20120261076A1 (fr)
EP (1) EP2091708B1 (fr)
JP (1) JP2010505651A (fr)
AT (1) ATE463331T1 (fr)
DE (1) DE602007005836D1 (fr)
FR (1) FR2906933B1 (fr)
WO (1) WO2008040782A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2925978B1 (fr) * 2007-12-28 2010-01-29 Commissariat Energie Atomique Procede et dispositif de separation d'une structure.
KR20150108428A (ko) 2011-04-11 2015-09-25 에베 그룹 에. 탈너 게엠베하 가요성의 캐리어 마운트 및 캐리어 기판을 분리하기 위한 장치 및 방법
KR20200019772A (ko) * 2011-12-22 2020-02-24 에베 그룹 에. 탈너 게엠베하 가요성 기판 홀더, 제1 기판을 분리하기 위한 장치 및 방법
FR2995441B1 (fr) * 2012-09-07 2015-11-06 Soitec Silicon On Insulator Dispositif de separation de deux substrats
FR3008190B1 (fr) 2013-07-08 2015-08-07 Commissariat Energie Atomique Procede et dispositif de mesure d'un champ magnetique au moyen d'excitations synchronisees
JP6469070B2 (ja) * 2016-12-21 2019-02-13 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 第１の基板を第２の基板から剥離する方法および可撓性の基板保持装置の使用
FR3093715B1 (fr) * 2019-03-15 2021-03-05 Soitec Silicon On Insulator Dispositif de maintien pour un ensemble à fracturer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11274018A (ja) * 1998-10-09 1999-10-08 Canon Inc 複合部材の分離方法および半導体基体の作製方法
JP4311702B2 (ja) * 1999-12-08 2009-08-12 キヤノン株式会社 複合部材の分離方法及び薄膜の製造方法
JP2001177080A (ja) * 1999-12-15 2001-06-29 Canon Inc 複合部材の分離方法および貼り合わせ部材の製造方法
FR2823373B1 (fr) * 2001-04-10 2005-02-04 Soitec Silicon On Insulator Dispositif de coupe de couche d'un substrat, et procede associe
FR2834380B1 (fr) * 2002-01-03 2005-02-18 Soitec Silicon On Insulator Dispositif de coupe de couche d'un substrat, et procede associe

Also Published As

Publication number Publication date
FR2906933A1 (fr) 2008-04-11
JP2010505651A (ja) 2010-02-25
EP2091708A1 (fr) 2009-08-26
ATE463331T1 (de) 2010-04-15
US20120261076A1 (en) 2012-10-18
DE602007005836D1 (de) 2010-05-20
EP2091708B1 (fr) 2010-04-07
WO2008040782A1 (fr) 2008-04-10

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120629