FR2905517B1 - Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci - Google Patents

Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci

Info

Publication number
FR2905517B1
FR2905517B1 FR0653576A FR0653576A FR2905517B1 FR 2905517 B1 FR2905517 B1 FR 2905517B1 FR 0653576 A FR0653576 A FR 0653576A FR 0653576 A FR0653576 A FR 0653576A FR 2905517 B1 FR2905517 B1 FR 2905517B1
Authority
FR
France
Prior art keywords
porogenous
precursors
novel
dielectric layers
obtained therefrom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0653576A
Other languages
English (en)
Other versions
FR2905517A1 (fr
Inventor
Manon Vautier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0653576A priority Critical patent/FR2905517B1/fr
Priority to EP07727138A priority patent/EP2004872A1/fr
Priority to PCT/EP2007/052661 priority patent/WO2007113104A1/fr
Priority to JP2009502025A priority patent/JP4960439B2/ja
Priority to US12/295,606 priority patent/US20090136667A1/en
Priority to TW096109824A priority patent/TW200746298A/zh
Publication of FR2905517A1 publication Critical patent/FR2905517A1/fr
Application granted granted Critical
Publication of FR2905517B1 publication Critical patent/FR2905517B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR0653576A 2006-03-31 2006-09-05 Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci Active FR2905517B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0653576A FR2905517B1 (fr) 2006-09-05 2006-09-05 Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci
EP07727138A EP2004872A1 (fr) 2006-03-31 2007-03-20 Nouvelles composition de precurseurs formant des pores et couches dielectriques poreuses obtenues a partir de ces compositions
PCT/EP2007/052661 WO2007113104A1 (fr) 2006-03-31 2007-03-20 Nouvelles composition de precurseurs formant des pores et couches dielectriques poreuses obtenues a partir de ces compositions
JP2009502025A JP4960439B2 (ja) 2006-03-31 2007-03-20 新規な孔形成前駆体組成物及びそれから得られる多孔誘電層
US12/295,606 US20090136667A1 (en) 2006-03-31 2007-03-20 Novel pore-forming precursors composition and porous dielectric layers obtained therefrom
TW096109824A TW200746298A (en) 2006-03-31 2007-03-22 Novel pore-forming precursors composition and porous dielectric layers obtained there from

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0653576A FR2905517B1 (fr) 2006-09-05 2006-09-05 Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci

Publications (2)

Publication Number Publication Date
FR2905517A1 FR2905517A1 (fr) 2008-03-07
FR2905517B1 true FR2905517B1 (fr) 2009-04-24

Family

ID=37908097

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0653576A Active FR2905517B1 (fr) 2006-03-31 2006-09-05 Nouveaux precurseurs porogenes et couches dielectriques poreuses obtenues a partir de ceux-ci

Country Status (1)

Country Link
FR (1) FR2905517B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7332445B2 (en) * 2004-09-28 2008-02-19 Air Products And Chemicals, Inc. Porous low dielectric constant compositions and methods for making and using same

Also Published As

Publication number Publication date
FR2905517A1 (fr) 2008-03-07

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