FR2883370B1 - METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE - Google Patents

METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Info

Publication number
FR2883370B1
FR2883370B1 FR0502771A FR0502771A FR2883370B1 FR 2883370 B1 FR2883370 B1 FR 2883370B1 FR 0502771 A FR0502771 A FR 0502771A FR 0502771 A FR0502771 A FR 0502771A FR 2883370 B1 FR2883370 B1 FR 2883370B1
Authority
FR
France
Prior art keywords
arms
resonator
manufacturing
measuring device
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0502771A
Other languages
French (fr)
Other versions
FR2883370A1 (en
Inventor
Jose Beitia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0502771A priority Critical patent/FR2883370B1/en
Publication of FR2883370A1 publication Critical patent/FR2883370A1/en
Application granted granted Critical
Publication of FR2883370B1 publication Critical patent/FR2883370B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings

Abstract

The method involves configuring a blank (1) of a star shaped piezoelectric mechanical resonator such that a frequency of flexion mode of resonator arms (2) outside a plane of the arms is greater than a frequency of flexion modes of the arms in the plane. Upper and lower sides of the arms are corroded with a chemical etchant solution (9) e.g. amonium biflouride solution, such that a thickness reduction of the arms corresponds to a lowering of the frequency of the flexion mode outside the plane.
FR0502771A 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE Expired - Fee Related FR2883370B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0502771A FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0502771A FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Publications (2)

Publication Number Publication Date
FR2883370A1 FR2883370A1 (en) 2006-09-22
FR2883370B1 true FR2883370B1 (en) 2007-06-01

Family

ID=35295351

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0502771A Expired - Fee Related FR2883370B1 (en) 2005-03-21 2005-03-21 METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE

Country Status (1)

Country Link
FR (1) FR2883370B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5160974B2 (en) * 2008-06-23 2013-03-13 北陸電気工業株式会社 Biaxial angular velocity sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741151B1 (en) * 1995-11-13 1998-01-30 Sfim Ind MECHANICAL RESONATOR GYROMETER
JP2000304544A (en) * 1999-04-19 2000-11-02 Murata Mfg Co Ltd Angular velocity sensor and control method for its detection sensitivity
JP4288914B2 (en) * 2002-08-21 2009-07-01 パナソニック株式会社 Resonant device manufacturing method

Also Published As

Publication number Publication date
FR2883370A1 (en) 2006-09-22

Similar Documents

Publication Publication Date Title
CN105293934B (en) Glass processing method, glass etching liquid and glass substrate
WO2009078406A1 (en) Cover glass for portable terminal, method for manufacturing cover glass for portable terminal, and portable terminal apparatus
EP1258990A3 (en) Method and system for wafer-level tuning of bulk acoustic wave resonators and filters
TW200723389A (en) Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same
DE60143682D1 (en) Production method for resonator components with piezoelectric films
WO2006025967A3 (en) Semiconductor processing using energized hydrogen gas and in combination with wet cleaning
EP2075911A3 (en) Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element
DE60139983D1 (en) BENDING WAVE SENSOR
US20070000327A1 (en) Acoustic wave sensing device integrated with micro-channels and method for the same
DE602007007462D1 (en) COUPLED RESONATOR FOR A REGULATING SYSTEM
WO2004027840A3 (en) Process for etching silicon wafers
EP1292023A3 (en) Method for adjusting the temperature-dependent property of a surface acoustic wave device
TW200641182A (en) Manufacturing method of quartz crystal vibrating piece, quartz crystal vibrator, oscillator, electronic device, and electric wave clock
CN103708405A (en) On-chip large-dig-angle silicon oxide micro-disc resonant cavity and manufacturing method for same
FR2883370B1 (en) METHOD FOR MANUFACTURING A MECHANICAL STAR RESONATOR FOR A GYROMETRIC MEASURING DEVICE
KR20180011952A (en) Beveling free glass cutting method by etching
WO2009072631A1 (en) Method for manufacturing nitride semiconductor element, and nitride semiconductor element
JP2007036656A5 (en)
TW200802606A (en) Monolithic GaN material and method for producing substrate therefrom
TW200618083A (en) Deposition of hard-mask with minimized hillocks and bubbles
TW200628403A (en) Method for producing fluorine gas
CN104931137A (en) Terahertz resonator plasma chip and preparation method thereof
WO2006061205A3 (en) Method and device for etching substrates received in an etching solution
JP5936438B2 (en) Method for manufacturing piezoelectric vibration device
RU2331137C1 (en) Method of outer corner over-etching compensation in figures etched on silicon plates with surface orientation (100)

Legal Events

Date Code Title Description
TP Transmission of property
CL Concession to grant licenses
ST Notification of lapse

Effective date: 20121130