FR2877142B1 - Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere. - Google Patents

Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere.

Info

Publication number
FR2877142B1
FR2877142B1 FR0452393A FR0452393A FR2877142B1 FR 2877142 B1 FR2877142 B1 FR 2877142B1 FR 0452393 A FR0452393 A FR 0452393A FR 0452393 A FR0452393 A FR 0452393A FR 2877142 B1 FR2877142 B1 FR 2877142B1
Authority
FR
France
Prior art keywords
micrometric
transferring
size object
polymer handle
millimetric size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0452393A
Other languages
English (en)
Other versions
FR2877142A1 (fr
Inventor
Marek Kostrzewa
Cioccio Lea Di
Marc Zussy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0452393A priority Critical patent/FR2877142B1/fr
Priority to EP05815527A priority patent/EP1803152A2/fr
Priority to PCT/FR2005/050863 priority patent/WO2006043000A2/fr
Priority to US11/576,136 priority patent/US20080020547A1/en
Priority to JP2007537349A priority patent/JP2008517474A/ja
Publication of FR2877142A1 publication Critical patent/FR2877142A1/fr
Application granted granted Critical
Publication of FR2877142B1 publication Critical patent/FR2877142B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
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    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
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    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Micromachines (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Die Bonding (AREA)
FR0452393A 2004-10-21 2004-10-21 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere. Expired - Fee Related FR2877142B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0452393A FR2877142B1 (fr) 2004-10-21 2004-10-21 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere.
EP05815527A EP1803152A2 (fr) 2004-10-21 2005-10-18 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere
PCT/FR2005/050863 WO2006043000A2 (fr) 2004-10-21 2005-10-18 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere
US11/576,136 US20080020547A1 (en) 2004-10-21 2005-10-18 Method Of Transferring At Least One Object Of Micrometric Or Millimetric Size By Means Of A Polymer Handle
JP2007537349A JP2008517474A (ja) 2004-10-21 2005-10-18 ポリマーハンドルを用いてマイクロメートル級またはミリメートル級のサイズの少なくとも1つの対象物を運搬するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0452393A FR2877142B1 (fr) 2004-10-21 2004-10-21 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere.

Publications (2)

Publication Number Publication Date
FR2877142A1 FR2877142A1 (fr) 2006-04-28
FR2877142B1 true FR2877142B1 (fr) 2007-05-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
FR0452393A Expired - Fee Related FR2877142B1 (fr) 2004-10-21 2004-10-21 Procede de transfert d'au moins un objet de taille micrometrique ou millimetrique au moyen d'une poignee en polymere.

Country Status (5)

Country Link
US (1) US20080020547A1 (fr)
EP (1) EP1803152A2 (fr)
JP (1) JP2008517474A (fr)
FR (1) FR2877142B1 (fr)
WO (1) WO2006043000A2 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2773261B1 (fr) 1997-12-30 2000-01-28 Commissariat Energie Atomique Procede pour le transfert d'un film mince comportant une etape de creation d'inclusions
EP1891479B1 (fr) * 2005-05-10 2014-04-09 Dow Corning Corporation Lithographie par transfert de décalcomanies submicroniques
US8030132B2 (en) * 2005-05-31 2011-10-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device including peeling step
FR2925221B1 (fr) * 2007-12-17 2010-02-19 Commissariat Energie Atomique Procede de transfert d'une couche mince
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US20080020547A1 (en) 2008-01-24
FR2877142A1 (fr) 2006-04-28
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WO2006043000A3 (fr) 2006-12-21
WO2006043000A2 (fr) 2006-04-27

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