FR2876391B1 - NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD - Google Patents

NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD

Info

Publication number
FR2876391B1
FR2876391B1 FR0401749A FR0401749A FR2876391B1 FR 2876391 B1 FR2876391 B1 FR 2876391B1 FR 0401749 A FR0401749 A FR 0401749A FR 0401749 A FR0401749 A FR 0401749A FR 2876391 B1 FR2876391 B1 FR 2876391B1
Authority
FR
France
Prior art keywords
implementing
metal piece
nitriding process
ionic implantation
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0401749A
Other languages
French (fr)
Other versions
FR2876391A1 (en
Inventor
Frederic Guernalec
Denis Busardo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ionics France SA
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0401047A external-priority patent/FR2876390A1/en
Application filed by Individual filed Critical Individual
Priority to FR0401749A priority Critical patent/FR2876391B1/en
Priority to FR0500963A priority patent/FR2879625B1/en
Priority to PCT/FR2005/000224 priority patent/WO2005085491A2/en
Priority to CA002554921A priority patent/CA2554921A1/en
Priority to NZ549587A priority patent/NZ549587A/en
Priority to JP2006551878A priority patent/JP2007524760A/en
Priority to RU2006131577/02A priority patent/RU2372418C2/en
Priority to EP05717536A priority patent/EP1725694A2/en
Priority to KR1020067018009A priority patent/KR20070029139A/en
Priority to US10/587,465 priority patent/US20090212238A1/en
Priority to BRPI0507447-9A priority patent/BRPI0507447A/en
Priority to AU2005219596A priority patent/AU2005219596B2/en
Publication of FR2876391A1 publication Critical patent/FR2876391A1/en
Publication of FR2876391B1 publication Critical patent/FR2876391B1/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Electron Sources, Ion Sources (AREA)
FR0401749A 2004-02-04 2004-02-21 NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD Expired - Lifetime FR2876391B1 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR0401749A FR2876391B1 (en) 2004-02-04 2004-02-21 NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD
FR0500963A FR2879625B1 (en) 2004-02-04 2005-01-31 NITRIDING DEVICE BY IONIC IMPLANTATION OF AN ALUMINUM ALLOY PART AND METHOD USING SUCH A DEVICE
RU2006131577/02A RU2372418C2 (en) 2004-02-04 2005-02-02 Device for nitriding components made from aluminium alloy through ion-implantation doping and method where said device is used
US10/587,465 US20090212238A1 (en) 2004-02-04 2005-02-02 Apparatus for ion nitriding an aluminum alloy part and process employing such apparatus
NZ549587A NZ549587A (en) 2004-02-04 2005-02-02 Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
JP2006551878A JP2007524760A (en) 2004-02-04 2005-02-02 Apparatus for nitriding aluminum alloy parts by ion implantation and method using such apparatus
PCT/FR2005/000224 WO2005085491A2 (en) 2004-02-04 2005-02-02 Device and method for nitriding by ionic implantation of an aluminium alloy part
EP05717536A EP1725694A2 (en) 2004-02-04 2005-02-02 Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
KR1020067018009A KR20070029139A (en) 2004-02-04 2005-02-02 Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
CA002554921A CA2554921A1 (en) 2004-02-04 2005-02-02 Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
BRPI0507447-9A BRPI0507447A (en) 2004-02-04 2005-02-02 ion implant device in an aluminum alloy part and process for treating an aluminum alloy
AU2005219596A AU2005219596B2 (en) 2004-02-04 2005-02-02 Device and method for nitriding by ionic implantation of an aluminium alloy part

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0401047A FR2876390A1 (en) 2004-02-04 2004-02-04 Aluminium alloy component ion implantation system for nitriding uses electronic cyclotronic resonance source producing multi-energy ions
FR0401749A FR2876391B1 (en) 2004-02-04 2004-02-21 NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD

Publications (2)

Publication Number Publication Date
FR2876391A1 FR2876391A1 (en) 2006-04-14
FR2876391B1 true FR2876391B1 (en) 2007-05-18

Family

ID=34953697

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0401749A Expired - Lifetime FR2876391B1 (en) 2004-02-04 2004-02-21 NITRIDING PROCESS FOR IONIC IMPLANTATION OF A METAL PIECE AND DEVICE FOR IMPLEMENTING THE METHOD

Country Status (2)

Country Link
FR (1) FR2876391B1 (en)
RU (1) RU2372418C2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2949236B1 (en) 2009-08-19 2011-10-28 Aircelle Sa ION IMPLANTATION METHOD FOR PRODUCING A HYDROPHOBIC SURFACE
RU170203U1 (en) * 2016-02-24 2017-04-18 федеральное государственное бюджетное образовательное учреждение высшего образования "Волгоградский государственный аграрный университет" (ФГБОУ ВО Волгоградский ГАУ) INSTALLATION FOR BODY ALLOYING

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60211061A (en) * 1984-04-05 1985-10-23 Toyota Central Res & Dev Lab Inc Ion-nitrifying method of aluminum material
JPS61295371A (en) * 1985-06-24 1986-12-26 Nippon Light Metal Co Ltd Production of aluminum material having aluminum nitride layer
FR2718568B1 (en) * 1994-04-06 1996-07-05 France Telecom High energy implantation method from a low or medium current type implanter and corresponding devices.
JP3284886B2 (en) * 1996-06-20 2002-05-20 株式会社日立製作所 Ion source and ion implanter
WO2000026431A1 (en) * 1998-11-03 2000-05-11 Epion Corporation Gas cluster ion beams for formation of nitride films
EP1288329A1 (en) * 2001-09-03 2003-03-05 C C R GmbH Beschichtungstechnologie Process for fabricating of thin nitride- or oxide layers

Also Published As

Publication number Publication date
RU2006131577A (en) 2008-03-10
FR2876391A1 (en) 2006-04-14
RU2372418C2 (en) 2009-11-10

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