FR2876180B1 - Resonateur a masses oscillantes. - Google Patents
Resonateur a masses oscillantes.Info
- Publication number
- FR2876180B1 FR2876180B1 FR0452276A FR0452276A FR2876180B1 FR 2876180 B1 FR2876180 B1 FR 2876180B1 FR 0452276 A FR0452276 A FR 0452276A FR 0452276 A FR0452276 A FR 0452276A FR 2876180 B1 FR2876180 B1 FR 2876180B1
- Authority
- FR
- France
- Prior art keywords
- resonator
- oscillating masses
- masses
- oscillating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
- H03H9/02275—Comb electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2431—Ring resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
- H03H2009/02346—Anchors for ring resonators
- H03H2009/02354—Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H2009/2442—Square resonators
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0452276A FR2876180B1 (fr) | 2004-10-06 | 2004-10-06 | Resonateur a masses oscillantes. |
EP05810750A EP1797395A1 (fr) | 2004-10-06 | 2005-10-05 | Resonateur a masses oscillantes |
US11/576,777 US7637155B2 (en) | 2004-10-06 | 2005-10-05 | Oscillating mass resonator |
PCT/FR2005/050815 WO2006037928A1 (fr) | 2004-10-06 | 2005-10-05 | Resonateur a masses oscillantes |
JP2007535218A JP2008516217A (ja) | 2004-10-06 | 2005-10-05 | 振動質量共振器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0452276A FR2876180B1 (fr) | 2004-10-06 | 2004-10-06 | Resonateur a masses oscillantes. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2876180A1 FR2876180A1 (fr) | 2006-04-07 |
FR2876180B1 true FR2876180B1 (fr) | 2006-12-08 |
Family
ID=34954605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0452276A Expired - Fee Related FR2876180B1 (fr) | 2004-10-06 | 2004-10-06 | Resonateur a masses oscillantes. |
Country Status (5)
Country | Link |
---|---|
US (1) | US7637155B2 (fr) |
EP (1) | EP1797395A1 (fr) |
JP (1) | JP2008516217A (fr) |
FR (1) | FR2876180B1 (fr) |
WO (1) | WO2006037928A1 (fr) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2905457B1 (fr) * | 2006-09-01 | 2008-10-17 | Commissariat Energie Atomique | Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives. |
FR2910742B1 (fr) | 2006-12-22 | 2009-05-01 | Commissariat Energie Atomique | Oscillateur mecanique forme d'un reseau d'oscillateurs elementaires |
US8141424B2 (en) * | 2008-09-12 | 2012-03-27 | Invensense, Inc. | Low inertia frame for detecting coriolis acceleration |
US8952832B2 (en) | 2008-01-18 | 2015-02-10 | Invensense, Inc. | Interfacing application programs and motion sensors of a device |
US7934423B2 (en) | 2007-12-10 | 2011-05-03 | Invensense, Inc. | Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics |
US8462109B2 (en) | 2007-01-05 | 2013-06-11 | Invensense, Inc. | Controlling and accessing content using motion processing on mobile devices |
US8508039B1 (en) | 2008-05-08 | 2013-08-13 | Invensense, Inc. | Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics |
US8250921B2 (en) | 2007-07-06 | 2012-08-28 | Invensense, Inc. | Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics |
DE102007051591B4 (de) * | 2007-10-12 | 2019-04-25 | Robert Bosch Gmbh | Mikromechanische Vorrichtung mit Antriebsrahmen |
US7777596B2 (en) | 2007-12-18 | 2010-08-17 | Robert Bosch Gmbh | MEMS resonator structure and method |
JP5228675B2 (ja) * | 2008-07-29 | 2013-07-03 | 富士通株式会社 | 角速度センサおよび電子装置 |
FI20095201A0 (fi) * | 2009-03-02 | 2009-03-02 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
JP5206709B2 (ja) * | 2009-03-18 | 2013-06-12 | 株式会社豊田中央研究所 | 可動体を備えている装置 |
FR2945621B1 (fr) | 2009-05-15 | 2011-08-26 | Commissariat Energie Atomique | Structure de couplage pour gyrometre resonnant |
FR2946479A1 (fr) * | 2009-06-09 | 2010-12-10 | Commissariat Energie Atomique | Resonateur electromecanique a ancrage resonant. |
CN102334008B (zh) * | 2010-01-12 | 2015-07-15 | 索尼公司 | 角速度传感器、电子设备以及角速度的检测方法 |
JP4905574B2 (ja) * | 2010-03-25 | 2012-03-28 | 株式会社豊田中央研究所 | 可動部分を備えている積層構造体 |
US9571013B2 (en) | 2010-10-12 | 2017-02-14 | Colorado Seminary | Micromechanical resonators |
JP5789485B2 (ja) * | 2011-11-08 | 2015-10-07 | 日本電波工業株式会社 | 水晶振動子 |
EP2544370B1 (fr) * | 2011-07-06 | 2020-01-01 | Nxp B.V. | Résonateur MEMS |
WO2014153142A1 (fr) | 2013-03-14 | 2014-09-25 | Colorado Seminary, Which Owns And Operates The University Of Denver | Impacteur mems d'aérosols |
FR3008190B1 (fr) | 2013-07-08 | 2015-08-07 | Commissariat Energie Atomique | Procede et dispositif de mesure d'un champ magnetique au moyen d'excitations synchronisees |
US9476712B2 (en) | 2013-07-31 | 2016-10-25 | Honeywell International Inc. | MEMS device mechanism enhancement for robust operation through severe shock and acceleration |
US9772604B2 (en) * | 2013-12-23 | 2017-09-26 | Eta Sa Manufacture Horlogere Suisse | Timepiece synchronization mechanism |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
DE4414237A1 (de) * | 1994-04-23 | 1995-10-26 | Bosch Gmbh Robert | Mikromechanischer Schwinger eines Schwingungsgyrometers |
DE19500800A1 (de) * | 1994-06-16 | 1995-12-21 | Bosch Gmbh Robert | Beschleunigungssensor |
DE4442033C2 (de) * | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
US5635638A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Coupling for multiple masses in a micromachined device |
JP3882972B2 (ja) * | 1998-06-18 | 2007-02-21 | アイシン精機株式会社 | 角速度センサ |
DE19844686A1 (de) * | 1998-09-29 | 2000-04-06 | Fraunhofer Ges Forschung | Mikromechanischer Drehratensensor und Verfahren zur Herstellung |
JP2000105124A (ja) * | 1998-09-30 | 2000-04-11 | Aisin Seiki Co Ltd | 静電駆動,静電検出式の角速度センサ |
FR2846740B1 (fr) * | 2002-11-05 | 2005-02-04 | Thales Sa | Capteur gyrometrique micro-usine, a detection dans le plan de la plaque usinee |
US6843127B1 (en) * | 2003-07-30 | 2005-01-18 | Motorola, Inc. | Flexible vibratory micro-electromechanical device |
US6892575B2 (en) * | 2003-10-20 | 2005-05-17 | Invensense Inc. | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
-
2004
- 2004-10-06 FR FR0452276A patent/FR2876180B1/fr not_active Expired - Fee Related
-
2005
- 2005-10-05 JP JP2007535218A patent/JP2008516217A/ja active Pending
- 2005-10-05 EP EP05810750A patent/EP1797395A1/fr not_active Withdrawn
- 2005-10-05 US US11/576,777 patent/US7637155B2/en not_active Expired - Fee Related
- 2005-10-05 WO PCT/FR2005/050815 patent/WO2006037928A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
FR2876180A1 (fr) | 2006-04-07 |
EP1797395A1 (fr) | 2007-06-20 |
WO2006037928A1 (fr) | 2006-04-13 |
JP2008516217A (ja) | 2008-05-15 |
US7637155B2 (en) | 2009-12-29 |
US20090249873A1 (en) | 2009-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 12 |
|
PLFP | Fee payment |
Year of fee payment: 13 |
|
ST | Notification of lapse |
Effective date: 20180629 |