FR2853991B1 - Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne - Google Patents

Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne

Info

Publication number
FR2853991B1
FR2853991B1 FR0304814A FR0304814A FR2853991B1 FR 2853991 B1 FR2853991 B1 FR 2853991B1 FR 0304814 A FR0304814 A FR 0304814A FR 0304814 A FR0304814 A FR 0304814A FR 2853991 B1 FR2853991 B1 FR 2853991B1
Authority
FR
France
Prior art keywords
dismantling
substrates
treatment
intermediate substrate
improved polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0304814A
Other languages
English (en)
Other versions
FR2853991A1 (fr
Inventor
Sebastien Kerdiles
Fabrice Letertre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0304814A priority Critical patent/FR2853991B1/fr
Publication of FR2853991A1 publication Critical patent/FR2853991A1/fr
Application granted granted Critical
Publication of FR2853991B1 publication Critical patent/FR2853991B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
FR0304814A 2003-04-17 2003-04-17 Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne Expired - Fee Related FR2853991B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0304814A FR2853991B1 (fr) 2003-04-17 2003-04-17 Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0304814A FR2853991B1 (fr) 2003-04-17 2003-04-17 Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne

Publications (2)

Publication Number Publication Date
FR2853991A1 FR2853991A1 (fr) 2004-10-22
FR2853991B1 true FR2853991B1 (fr) 2005-10-28

Family

ID=33041940

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0304814A Expired - Fee Related FR2853991B1 (fr) 2003-04-17 2003-04-17 Procede de traitement de substrats demontables, et substrat intermediaire demontable, avec polissage perfectionne

Country Status (1)

Country Link
FR (1) FR2853991B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110648909B (zh) * 2019-09-30 2022-03-18 福建北电新材料科技有限公司 回磨方法、衬底晶片以及电子器件

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2961948B1 (fr) * 2010-06-23 2012-08-03 Soitec Silicon On Insulator Procede de traitement d'une piece en materiau compose
FR3059149A1 (fr) * 2016-11-21 2018-05-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de fabrication d'un film mince a base d'inp ou de gaas

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10275905A (ja) * 1997-03-31 1998-10-13 Mitsubishi Electric Corp シリコンウェーハの製造方法およびシリコンウェーハ
US6287941B1 (en) * 1999-04-21 2001-09-11 Silicon Genesis Corporation Surface finishing of SOI substrates using an EPI process
US6537606B2 (en) * 2000-07-10 2003-03-25 Epion Corporation System and method for improving thin films by gas cluster ion beam processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110648909B (zh) * 2019-09-30 2022-03-18 福建北电新材料科技有限公司 回磨方法、衬底晶片以及电子器件

Also Published As

Publication number Publication date
FR2853991A1 (fr) 2004-10-22

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20101230