FR2843801B1 - Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide - Google Patents

Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide

Info

Publication number
FR2843801B1
FR2843801B1 FR0210418A FR0210418A FR2843801B1 FR 2843801 B1 FR2843801 B1 FR 2843801B1 FR 0210418 A FR0210418 A FR 0210418A FR 0210418 A FR0210418 A FR 0210418A FR 2843801 B1 FR2843801 B1 FR 2843801B1
Authority
FR
France
Prior art keywords
determining
composition
solid sample
emission spectrometer
spectrometry method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0210418A
Other languages
English (en)
Other versions
FR2843801A1 (fr
Inventor
Patrick Chapon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR0210418A priority Critical patent/FR2843801B1/fr
Publication of FR2843801A1 publication Critical patent/FR2843801A1/fr
Application granted granted Critical
Publication of FR2843801B1 publication Critical patent/FR2843801B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
FR0210418A 2002-08-20 2002-08-20 Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide Expired - Fee Related FR2843801B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0210418A FR2843801B1 (fr) 2002-08-20 2002-08-20 Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0210418A FR2843801B1 (fr) 2002-08-20 2002-08-20 Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide

Publications (2)

Publication Number Publication Date
FR2843801A1 FR2843801A1 (fr) 2004-02-27
FR2843801B1 true FR2843801B1 (fr) 2005-08-19

Family

ID=31198229

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0210418A Expired - Fee Related FR2843801B1 (fr) 2002-08-20 2002-08-20 Methode de spectrometrie et spectrometre d'emission a source a decharge luminescente pour la determination de la composition d'un echantillon solide

Country Status (1)

Country Link
FR (1) FR2843801B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006016229B4 (de) * 2006-03-29 2010-05-27 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren und Vorrichtung zur Ermittlung von Zusammensetzungen einer Festkörperprobe mittels Glimmentladungsspektroskopie und zur Ermittlung von Höhenunterschieden simultan dazu
FR3020684B1 (fr) 2014-04-30 2017-05-19 Horiba Jobin Yvon Sas Systeme et procede de spectrometrie de decharge luminescente et de mesure in situ de la profondeur de gravure d'un echantillon

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001004546A (ja) * 1999-06-18 2001-01-12 Horiba Ltd グロー放電発光分光分析装置

Also Published As

Publication number Publication date
FR2843801A1 (fr) 2004-02-27

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Effective date: 20090430