FR2827270B1 - Procede de fabrication de pieces microscopiques - Google Patents

Procede de fabrication de pieces microscopiques

Info

Publication number
FR2827270B1
FR2827270B1 FR0109363A FR0109363A FR2827270B1 FR 2827270 B1 FR2827270 B1 FR 2827270B1 FR 0109363 A FR0109363 A FR 0109363A FR 0109363 A FR0109363 A FR 0109363A FR 2827270 B1 FR2827270 B1 FR 2827270B1
Authority
FR
France
Prior art keywords
microscopic parts
manufacturing
manufacturing microscopic
parts
microscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0109363A
Other languages
English (en)
Other versions
FR2827270A1 (fr
Inventor
Tarik Bourouina
Takahisa Masuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0109363A priority Critical patent/FR2827270B1/fr
Priority to PCT/FR2002/002488 priority patent/WO2003007026A1/fr
Publication of FR2827270A1 publication Critical patent/FR2827270A1/fr
Application granted granted Critical
Publication of FR2827270B1 publication Critical patent/FR2827270B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00388—Etch mask forming
    • B81C1/00404—Mask characterised by its size, orientation or shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Drying Of Semiconductors (AREA)
FR0109363A 2001-07-13 2001-07-13 Procede de fabrication de pieces microscopiques Expired - Fee Related FR2827270B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0109363A FR2827270B1 (fr) 2001-07-13 2001-07-13 Procede de fabrication de pieces microscopiques
PCT/FR2002/002488 WO2003007026A1 (fr) 2001-07-13 2002-07-12 Procede de fabrication de pieces microscopiques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0109363A FR2827270B1 (fr) 2001-07-13 2001-07-13 Procede de fabrication de pieces microscopiques

Publications (2)

Publication Number Publication Date
FR2827270A1 FR2827270A1 (fr) 2003-01-17
FR2827270B1 true FR2827270B1 (fr) 2004-01-02

Family

ID=8865474

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0109363A Expired - Fee Related FR2827270B1 (fr) 2001-07-13 2001-07-13 Procede de fabrication de pieces microscopiques

Country Status (2)

Country Link
FR (1) FR2827270B1 (fr)
WO (1) WO2003007026A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1500975A3 (fr) * 2003-07-21 2006-01-18 Ingeneric GmbH Procédé pour la fabrication de microstructures optiques
FR2875339B1 (fr) 2004-09-16 2006-12-08 St Microelectronics Sa Transistor mos a grille deformable
NL1034489C2 (nl) 2007-10-09 2009-04-14 Micronit Microfluidics Bv Werkwijzen voor het vervaardigen van een microstructuur.
EP2937311B1 (fr) * 2014-04-25 2019-08-21 Rolex Sa Procédé de fabrication d'un composant horloger renforcé, composant horloger et pièce d'horlogerie correspondants
EP3656733A1 (fr) * 2018-11-23 2020-05-27 Murata Manufacturing Co., Ltd. Procédé de gravure de structures encastrées

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398082A1 (fr) * 1989-05-19 1990-11-22 Siemens Aktiengesellschaft Procédé de fabrication d'une lentille optique
JP3089870B2 (ja) * 1992-12-28 2000-09-18 富士電機株式会社 シリコン基体の加工方法
CA2298492A1 (fr) * 1999-02-19 2000-08-19 Hyun-Kuk Shin Micro-lentille, micro-lentille combinee et laser a emission par la surface a cavite verticale, ainsi que methodes de fabrication connexes

Also Published As

Publication number Publication date
FR2827270A1 (fr) 2003-01-17
WO2003007026A1 (fr) 2003-01-23

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Legal Events

Date Code Title Description
ST Notification of lapse