FR2795821B1 - CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF - Google Patents
CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOFInfo
- Publication number
- FR2795821B1 FR2795821B1 FR9908749A FR9908749A FR2795821B1 FR 2795821 B1 FR2795821 B1 FR 2795821B1 FR 9908749 A FR9908749 A FR 9908749A FR 9908749 A FR9908749 A FR 9908749A FR 2795821 B1 FR2795821 B1 FR 2795821B1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- metal oxide
- chemical sensor
- oxide gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9908749A FR2795821B1 (en) | 1999-07-02 | 1999-07-02 | CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF |
DE60004843T DE60004843T2 (en) | 1999-07-02 | 2000-06-28 | METAL OXIDE CHEMICAL GAS SENSOR AND RELATED PRODUCTION METHOD |
PCT/CH2000/000349 WO2001002844A1 (en) | 1999-07-02 | 2000-06-28 | Metal oxide chemical gas sensor and method for making same |
EP00936588A EP1192452B1 (en) | 1999-07-02 | 2000-06-28 | Metal oxide chemical gas sensor and method for making same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9908749A FR2795821B1 (en) | 1999-07-02 | 1999-07-02 | CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2795821A1 FR2795821A1 (en) | 2001-01-05 |
FR2795821B1 true FR2795821B1 (en) | 2001-09-14 |
Family
ID=9547793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9908749A Expired - Fee Related FR2795821B1 (en) | 1999-07-02 | 1999-07-02 | CHEMICAL SENSOR OF METAL OXIDE GAS AND MANUFACTURING METHOD THEREOF |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2795821B1 (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5345213A (en) * | 1992-10-26 | 1994-09-06 | The United States Of America, As Represented By The Secretary Of Commerce | Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation |
GB2321336B (en) * | 1997-01-15 | 2001-07-25 | Univ Warwick | Gas-sensing semiconductor devices |
-
1999
- 1999-07-02 FR FR9908749A patent/FR2795821B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2795821A1 (en) | 2001-01-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TQ | Partial transmission of property | ||
ST | Notification of lapse | ||
AU | Other act affecting the ownership or exploitation of an industrial property right |