FR2789224B1 - TRAINING ON BOARD OF A SEMICONDUCTOR WAFER - Google Patents

TRAINING ON BOARD OF A SEMICONDUCTOR WAFER

Info

Publication number
FR2789224B1
FR2789224B1 FR9901122A FR9901122A FR2789224B1 FR 2789224 B1 FR2789224 B1 FR 2789224B1 FR 9901122 A FR9901122 A FR 9901122A FR 9901122 A FR9901122 A FR 9901122A FR 2789224 B1 FR2789224 B1 FR 2789224B1
Authority
FR
France
Prior art keywords
training
board
semiconductor wafer
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9901122A
Other languages
French (fr)
Other versions
FR2789224A1 (en
Inventor
Thomas Riedel
Joel Brouat
Pierre Merenda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9901122A priority Critical patent/FR2789224B1/en
Priority to PCT/FR2000/000168 priority patent/WO2000045428A1/en
Publication of FR2789224A1 publication Critical patent/FR2789224A1/en
Application granted granted Critical
Publication of FR2789224B1 publication Critical patent/FR2789224B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02021—Edge treatment, chamfering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR9901122A 1999-01-28 1999-01-28 TRAINING ON BOARD OF A SEMICONDUCTOR WAFER Expired - Fee Related FR2789224B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9901122A FR2789224B1 (en) 1999-01-28 1999-01-28 TRAINING ON BOARD OF A SEMICONDUCTOR WAFER
PCT/FR2000/000168 WO2000045428A1 (en) 1999-01-28 2000-01-25 Method for levelling the edge of a semiconductor wafer and corresponding levelling machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9901122A FR2789224B1 (en) 1999-01-28 1999-01-28 TRAINING ON BOARD OF A SEMICONDUCTOR WAFER

Publications (2)

Publication Number Publication Date
FR2789224A1 FR2789224A1 (en) 2000-08-04
FR2789224B1 true FR2789224B1 (en) 2003-10-03

Family

ID=9541456

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9901122A Expired - Fee Related FR2789224B1 (en) 1999-01-28 1999-01-28 TRAINING ON BOARD OF A SEMICONDUCTOR WAFER

Country Status (2)

Country Link
FR (1) FR2789224B1 (en)
WO (1) WO2000045428A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH566643A5 (en) * 1973-10-11 1975-09-15 Bbc Brown Boveri & Cie
JPS62287625A (en) * 1986-06-06 1987-12-14 Hitachi Ltd Spin type etching device
JPH02130922A (en) * 1988-11-11 1990-05-18 Toshiba Corp Etching equipment for semiconductor substrate
JPH0661215A (en) * 1992-08-06 1994-03-04 Mitsubishi Electric Corp Treatment device for thin board body like wafer
JP3111300B2 (en) * 1993-10-20 2000-11-20 株式会社日立製作所 Sealed spin etching system for semiconductor devices

Also Published As

Publication number Publication date
FR2789224A1 (en) 2000-08-04
WO2000045428A1 (en) 2000-08-03

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070930