FR2734366B1 - MONOLITHIC ACCELERATION SENSOR - Google Patents

MONOLITHIC ACCELERATION SENSOR

Info

Publication number
FR2734366B1
FR2734366B1 FR9505778A FR9505778A FR2734366B1 FR 2734366 B1 FR2734366 B1 FR 2734366B1 FR 9505778 A FR9505778 A FR 9505778A FR 9505778 A FR9505778 A FR 9505778A FR 2734366 B1 FR2734366 B1 FR 2734366B1
Authority
FR
France
Prior art keywords
acceleration sensor
monolithic acceleration
monolithic
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9505778A
Other languages
French (fr)
Other versions
FR2734366A1 (en
Inventor
Pierre Dautriche
Daniel Vellou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne e2v Semiconductors SAS
Original Assignee
Thomson SCF Semiconducteurs Specifiques
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson SCF Semiconducteurs Specifiques filed Critical Thomson SCF Semiconducteurs Specifiques
Priority to FR9505778A priority Critical patent/FR2734366B1/en
Publication of FR2734366A1 publication Critical patent/FR2734366A1/en
Application granted granted Critical
Publication of FR2734366B1 publication Critical patent/FR2734366B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
FR9505778A 1995-05-16 1995-05-16 MONOLITHIC ACCELERATION SENSOR Expired - Fee Related FR2734366B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9505778A FR2734366B1 (en) 1995-05-16 1995-05-16 MONOLITHIC ACCELERATION SENSOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9505778A FR2734366B1 (en) 1995-05-16 1995-05-16 MONOLITHIC ACCELERATION SENSOR

Publications (2)

Publication Number Publication Date
FR2734366A1 FR2734366A1 (en) 1996-11-22
FR2734366B1 true FR2734366B1 (en) 1997-06-20

Family

ID=9479019

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9505778A Expired - Fee Related FR2734366B1 (en) 1995-05-16 1995-05-16 MONOLITHIC ACCELERATION SENSOR

Country Status (1)

Country Link
FR (1) FR2734366B1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2460485A1 (en) * 1979-06-29 1981-01-23 Thomson Csf PIEZOELECTRIC ACCELERATION SENSOR WITH TRANSDUCER ELEMENT IN POLYMERIC MATERIAL AND SECURITY SYSTEM FOR A CENTRIFUGE PROVIDED WITH SUCH A SENSOR

Also Published As

Publication number Publication date
FR2734366A1 (en) 1996-11-22

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20110131