FR2722878B1 - Capteur de pression differentielle de type capacitif - Google Patents

Capteur de pression differentielle de type capacitif

Info

Publication number
FR2722878B1
FR2722878B1 FR9409088A FR9409088A FR2722878B1 FR 2722878 B1 FR2722878 B1 FR 2722878B1 FR 9409088 A FR9409088 A FR 9409088A FR 9409088 A FR9409088 A FR 9409088A FR 2722878 B1 FR2722878 B1 FR 2722878B1
Authority
FR
France
Prior art keywords
pressure sensor
differential pressure
capacitive type
type differential
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9409088A
Other languages
English (en)
Other versions
FR2722878A1 (fr
Inventor
Jean Hermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Priority to FR9409088A priority Critical patent/FR2722878B1/fr
Publication of FR2722878A1 publication Critical patent/FR2722878A1/fr
Application granted granted Critical
Publication of FR2722878B1 publication Critical patent/FR2722878B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR9409088A 1994-07-22 1994-07-22 Capteur de pression differentielle de type capacitif Expired - Fee Related FR2722878B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9409088A FR2722878B1 (fr) 1994-07-22 1994-07-22 Capteur de pression differentielle de type capacitif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9409088A FR2722878B1 (fr) 1994-07-22 1994-07-22 Capteur de pression differentielle de type capacitif

Publications (2)

Publication Number Publication Date
FR2722878A1 FR2722878A1 (fr) 1996-01-26
FR2722878B1 true FR2722878B1 (fr) 1996-09-06

Family

ID=9465651

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9409088A Expired - Fee Related FR2722878B1 (fr) 1994-07-22 1994-07-22 Capteur de pression differentielle de type capacitif

Country Status (1)

Country Link
FR (1) FR2722878B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7539003B2 (en) * 2005-12-01 2009-05-26 Lv Sensors, Inc. Capacitive micro-electro-mechanical sensors with single crystal silicon electrodes
US9156676B2 (en) * 2013-04-09 2015-10-13 Honeywell International Inc. Sensor with isolated diaphragm

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
DE3344799A1 (de) * 1983-12-10 1985-06-13 Hans W. Dipl.-Phys. ETH Winterthur Keller Piezoresistives druckmesselement
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
DE59101980D1 (de) * 1990-05-02 1994-07-28 Siemens Ag Kapazitiver Sensor mit Frequenzausgang.
DE4206675C2 (de) * 1992-02-28 1995-04-27 Siemens Ag Verfahren zum Herstellen von Druckdifferenz-Sensoren

Also Published As

Publication number Publication date
FR2722878A1 (fr) 1996-01-26

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20110331