FR2721105B1 - Capteur capacitif a électrodes concentriques et son procédé de fabrication. - Google Patents

Capteur capacitif a électrodes concentriques et son procédé de fabrication.

Info

Publication number
FR2721105B1
FR2721105B1 FR9407032A FR9407032A FR2721105B1 FR 2721105 B1 FR2721105 B1 FR 2721105B1 FR 9407032 A FR9407032 A FR 9407032A FR 9407032 A FR9407032 A FR 9407032A FR 2721105 B1 FR2721105 B1 FR 2721105B1
Authority
FR
France
Prior art keywords
manufacturing process
capacitive sensor
concentric electrodes
concentric
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9407032A
Other languages
English (en)
Other versions
FR2721105A1 (fr
Inventor
Jean-Claude Godefroy
Claude Galaud
Pierre Josso
Serge Alperine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR9407032A priority Critical patent/FR2721105B1/fr
Publication of FR2721105A1 publication Critical patent/FR2721105A1/fr
Application granted granted Critical
Publication of FR2721105B1 publication Critical patent/FR2721105B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR9407032A 1994-06-09 1994-06-09 Capteur capacitif a électrodes concentriques et son procédé de fabrication. Expired - Fee Related FR2721105B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9407032A FR2721105B1 (fr) 1994-06-09 1994-06-09 Capteur capacitif a électrodes concentriques et son procédé de fabrication.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9407032A FR2721105B1 (fr) 1994-06-09 1994-06-09 Capteur capacitif a électrodes concentriques et son procédé de fabrication.

Publications (2)

Publication Number Publication Date
FR2721105A1 FR2721105A1 (fr) 1995-12-15
FR2721105B1 true FR2721105B1 (fr) 1996-08-14

Family

ID=9464020

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9407032A Expired - Fee Related FR2721105B1 (fr) 1994-06-09 1994-06-09 Capteur capacitif a électrodes concentriques et son procédé de fabrication.

Country Status (1)

Country Link
FR (1) FR2721105B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
FR2938326B1 (fr) 2008-11-13 2011-03-04 Nanotec Solution Capteur capacitif haute temperature a collage ciment
EP2442077A1 (fr) * 2010-10-12 2012-04-18 Future Technology (Sensors) Ltd Ensembles de capteurs

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3617373A1 (de) * 1986-05-23 1987-11-26 Mtu Muenchen Gmbh Kapazitives messsystem
FR2638174B1 (fr) * 1988-10-26 1991-01-18 Onera (Off Nat Aerospatiale) Procede de protection de surface de pieces metalliques contre la corrosion a temperature elevee, et piece traitee par ce procede

Also Published As

Publication number Publication date
FR2721105A1 (fr) 1995-12-15

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Effective date: 20090228