FR2719906B1 - Détecteur accélérométrique capacitif. - Google Patents
Détecteur accélérométrique capacitif.Info
- Publication number
- FR2719906B1 FR2719906B1 FR9405751A FR9405751A FR2719906B1 FR 2719906 B1 FR2719906 B1 FR 2719906B1 FR 9405751 A FR9405751 A FR 9405751A FR 9405751 A FR9405751 A FR 9405751A FR 2719906 B1 FR2719906 B1 FR 2719906B1
- Authority
- FR
- France
- Prior art keywords
- capacitive
- accelerometric
- detector
- accelerometric detector
- capacitive accelerometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9405751A FR2719906B1 (fr) | 1994-05-10 | 1994-05-10 | Détecteur accélérométrique capacitif. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9405751A FR2719906B1 (fr) | 1994-05-10 | 1994-05-10 | Détecteur accélérométrique capacitif. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2719906A1 FR2719906A1 (fr) | 1995-11-17 |
FR2719906B1 true FR2719906B1 (fr) | 1996-08-02 |
Family
ID=9463081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9405751A Expired - Fee Related FR2719906B1 (fr) | 1994-05-10 | 1994-05-10 | Détecteur accélérométrique capacitif. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2719906B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2745909B1 (fr) * | 1996-03-08 | 1998-05-07 | Sagem | Dispositif capacitif de detection d'acceleration |
DE102012218906A1 (de) | 2012-10-17 | 2014-04-30 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
FR2580389B2 (fr) * | 1985-04-16 | 1989-03-03 | Sfena | Accelerometre micro-usine a rappel electrostatique |
JP2804196B2 (ja) * | 1991-10-18 | 1998-09-24 | 株式会社日立製作所 | マイクロセンサ及びそれを用いた制御システム |
-
1994
- 1994-05-10 FR FR9405751A patent/FR2719906B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2719906A1 (fr) | 1995-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |
Effective date: 20100129 |