FR2712396B1 - Method for manufacturing an integrated optical device and device thus manufactured. - Google Patents
Method for manufacturing an integrated optical device and device thus manufactured.Info
- Publication number
- FR2712396B1 FR2712396B1 FR9313698A FR9313698A FR2712396B1 FR 2712396 B1 FR2712396 B1 FR 2712396B1 FR 9313698 A FR9313698 A FR 9313698A FR 9313698 A FR9313698 A FR 9313698A FR 2712396 B1 FR2712396 B1 FR 2712396B1
- Authority
- FR
- France
- Prior art keywords
- manufactured
- manufacturing
- integrated optical
- optical device
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1347—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion implantation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12119—Bend
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12183—Ion-exchange
- G02B2006/12185—Ion-exchange field-assisted ion-exchange
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Geophysics And Detection Of Objects (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9313698A FR2712396B1 (en) | 1993-11-12 | 1993-11-12 | Method for manufacturing an integrated optical device and device thus manufactured. |
DE69407429T DE69407429T2 (en) | 1993-11-12 | 1994-10-31 | MANUFACTURE OF A BURNED WAVE GUIDE WITH DIFFERENT PENETRATION DEPTHS |
JP51362295A JP3378009B2 (en) | 1993-11-12 | 1994-10-31 | Method of manufacturing waveguide embedded at multiple embedding depths |
PCT/FR1994/001263 WO1995013553A1 (en) | 1993-11-12 | 1994-10-31 | Manufacture of a waveguide embedded at several depths |
ES95900177T ES2112626T3 (en) | 1993-11-12 | 1994-10-31 | MANUFACTURE OF A BURIED WAVE GUIDE AT VARIOUS BURIAL DEPTHS. |
US08/640,744 US5708750A (en) | 1993-11-12 | 1994-10-31 | Manufacture of a buried wave guide at several burying depths |
EP95900177A EP0728318B1 (en) | 1993-11-12 | 1994-10-31 | Manufacture of a waveguide embedded at several depths |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9313698A FR2712396B1 (en) | 1993-11-12 | 1993-11-12 | Method for manufacturing an integrated optical device and device thus manufactured. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2712396A1 FR2712396A1 (en) | 1995-05-19 |
FR2712396B1 true FR2712396B1 (en) | 1995-12-22 |
Family
ID=9452919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9313698A Expired - Fee Related FR2712396B1 (en) | 1993-11-12 | 1993-11-12 | Method for manufacturing an integrated optical device and device thus manufactured. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5708750A (en) |
EP (1) | EP0728318B1 (en) |
JP (1) | JP3378009B2 (en) |
DE (1) | DE69407429T2 (en) |
ES (1) | ES2112626T3 (en) |
FR (1) | FR2712396B1 (en) |
WO (1) | WO1995013553A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19609289A1 (en) * | 1996-03-09 | 1997-09-11 | Iot Integrierte Optik Gmbh | Process for manufacturing integrated optical components by ion exchange with a grating mask for layer waveguides |
FR2751759B1 (en) * | 1996-07-24 | 1998-09-11 | Schneider Electric Sa | INTEGRATED OPTICAL DEVICE WITH ACTIVE AND PASSIVE GUIDANCE ZONES |
FR2820217B1 (en) * | 2001-01-31 | 2003-04-18 | Teem Photonics | INTEGRATED OPTICAL STRUCTURE HAVING AT LEAST ONE UNDERGROUND GUIDE PORTION AND ITS MANUFACTURING METHOD |
US6751391B2 (en) | 2001-07-24 | 2004-06-15 | Agilent Technologies, Inc. | Optical systems incorporating waveguides and methods of manufacture |
FR2836558B1 (en) * | 2002-02-22 | 2004-10-29 | Teem Photonics | MASK ALLOWING THE MANUFACTURE OF AN OPTICAL GUIDE WITH VARIABLE UNDERGROUND AND METHOD OF USING SAID MASK TO OBTAIN THE GUIDE WITH VARIABLE UNDERGROUND |
US6956983B2 (en) * | 2002-05-31 | 2005-10-18 | Intel Corporation | Epitaxial growth for waveguide tapering |
US6989284B2 (en) * | 2002-05-31 | 2006-01-24 | Intel Corporation | Fabrication of a waveguide taper through ion implantation |
FR3006453B1 (en) * | 2013-05-30 | 2016-10-28 | Inst Polytechnique Grenoble | POLARIZATION ROTATING OPTICAL DEVICE INTEGRATED IN A GLASS SUBSTRATE AND METHOD OF MANUFACTURING THE SAME |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2152464B1 (en) * | 1971-09-16 | 1974-05-31 | Thomson Csf | |
JPS5897005A (en) * | 1981-12-04 | 1983-06-09 | Nec Corp | Production of optical waveguide |
US4711514A (en) * | 1985-01-11 | 1987-12-08 | Hughes Aircraft Company | Product of and process for forming tapered waveguides |
JPH02113209A (en) * | 1988-10-24 | 1990-04-25 | Nippon Sheet Glass Co Ltd | Manufacture of y-branch waveguide |
JP2598533B2 (en) * | 1989-01-26 | 1997-04-09 | 日本板硝子株式会社 | Method of forming optical waveguide |
JPH04243216A (en) * | 1991-01-17 | 1992-08-31 | Nec Corp | Production of optical waveguide and optical integrated element and production thereof |
-
1993
- 1993-11-12 FR FR9313698A patent/FR2712396B1/en not_active Expired - Fee Related
-
1994
- 1994-10-31 ES ES95900177T patent/ES2112626T3/en not_active Expired - Lifetime
- 1994-10-31 JP JP51362295A patent/JP3378009B2/en not_active Expired - Lifetime
- 1994-10-31 US US08/640,744 patent/US5708750A/en not_active Expired - Lifetime
- 1994-10-31 DE DE69407429T patent/DE69407429T2/en not_active Expired - Lifetime
- 1994-10-31 EP EP95900177A patent/EP0728318B1/en not_active Expired - Lifetime
- 1994-10-31 WO PCT/FR1994/001263 patent/WO1995013553A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
FR2712396A1 (en) | 1995-05-19 |
ES2112626T3 (en) | 1998-04-01 |
US5708750A (en) | 1998-01-13 |
JPH09504887A (en) | 1997-05-13 |
EP0728318B1 (en) | 1997-12-17 |
EP0728318A1 (en) | 1996-08-28 |
WO1995013553A1 (en) | 1995-05-18 |
DE69407429T2 (en) | 1998-07-16 |
DE69407429D1 (en) | 1998-01-29 |
JP3378009B2 (en) | 2003-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20130731 |