FR2698991B1 - Systeme de tableau electrostatique d'attraction. - Google Patents

Systeme de tableau electrostatique d'attraction.

Info

Publication number
FR2698991B1
FR2698991B1 FR9313266A FR9313266A FR2698991B1 FR 2698991 B1 FR2698991 B1 FR 2698991B1 FR 9313266 A FR9313266 A FR 9313266A FR 9313266 A FR9313266 A FR 9313266A FR 2698991 B1 FR2698991 B1 FR 2698991B1
Authority
FR
France
Prior art keywords
electrostatic attraction
board system
attraction board
electrostatic
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9313266A
Other languages
English (en)
Other versions
FR2698991A1 (fr
Inventor
Kasahara Keiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Abisare Co Ltd
Original Assignee
Abisare Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abisare Co Ltd filed Critical Abisare Co Ltd
Publication of FR2698991A1 publication Critical patent/FR2698991A1/fr
Application granted granted Critical
Publication of FR2698991B1 publication Critical patent/FR2698991B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
FR9313266A 1992-12-03 1993-11-08 Systeme de tableau electrostatique d'attraction. Expired - Fee Related FR2698991B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP32430792 1992-12-03
JP5049611A JPH06225556A (ja) 1992-12-03 1993-03-10 静電吸着装置

Publications (2)

Publication Number Publication Date
FR2698991A1 FR2698991A1 (fr) 1994-06-10
FR2698991B1 true FR2698991B1 (fr) 1995-09-29

Family

ID=26390027

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9313266A Expired - Fee Related FR2698991B1 (fr) 1992-12-03 1993-11-08 Systeme de tableau electrostatique d'attraction.

Country Status (5)

Country Link
US (1) US5486974A (fr)
JP (1) JPH06225556A (fr)
DE (1) DE4326375A1 (fr)
FR (1) FR2698991B1 (fr)
GB (1) GB2273205B (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994003964A1 (fr) * 1992-08-04 1994-02-17 Peter Marion Rubino Systeme de support electrostatique
JP3249696B2 (ja) * 1994-11-28 2002-01-21 日新電機株式会社 静電チャックおよびその使用方法
JPH0955420A (ja) * 1995-08-11 1997-02-25 Anelva Corp 静電吸着機構
US6117246A (en) * 1997-01-31 2000-09-12 Applied Materials, Inc. Conductive polymer pad for supporting a workpiece upon a workpiece support surface of an electrostatic chuck
US6259592B1 (en) 1998-11-19 2001-07-10 Applied Materials, Inc. Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same
US7554787B2 (en) * 2006-06-05 2009-06-30 Sri International Wall crawling devices
JP4879771B2 (ja) * 2007-02-05 2012-02-22 富士通セミコンダクター株式会社 静電チャック
WO2009085991A2 (fr) * 2007-12-20 2009-07-09 Saint-Gobain Ceramics & Plastics, Inc. Support électrostatique et son procédé de réalisation
JP2010177698A (ja) * 2010-04-12 2010-08-12 Fujitsu Semiconductor Ltd 静電チャックの製造方法
JP2010166086A (ja) * 2010-04-12 2010-07-29 Fujitsu Semiconductor Ltd 静電チャックを用いた半導体製造装置
US9623679B1 (en) * 2015-11-18 2017-04-18 Xerox Corporation Electrostatic platen for conductive pet film printing
JP7090354B2 (ja) * 2018-03-29 2022-06-24 株式会社クリエイティブテクノロジー 吸着パッド

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3359469A (en) * 1964-04-23 1967-12-19 Simco Co Inc Electrostatic pinning method and copyboard
US3448356A (en) * 1966-05-24 1969-06-03 Simco Co Inc The Electrostatic copyholder and method for making same
US3480364A (en) * 1967-07-28 1969-11-25 Simco Co Inc The Multilayer electrostatic copyboard and light panel
US3634740A (en) * 1970-04-20 1972-01-11 Addressograph Multigraph Electrostatic holddown
US3916270A (en) * 1974-05-02 1975-10-28 Tektronix Inc Electrostatic holddown apparatus
JPS56155759A (en) * 1980-05-07 1981-12-02 Toyo Seikan Kaisha Ltd Coating plastic bottle and its manufacture
JPS6059104B2 (ja) * 1982-02-03 1985-12-23 株式会社東芝 静電チヤツク板
JPS61152497A (ja) * 1984-12-27 1986-07-11 呉羽化学工業株式会社 静電吸着装置
DE3619961C1 (de) * 1986-06-13 1987-11-19 Wilde Membran Impuls Tech Wechselhalter fuer einen Informationstraeger
JPS63257481A (ja) * 1987-04-14 1988-10-25 Abisare:Kk 静電保持装置
EP0288613A1 (fr) * 1987-05-01 1988-11-02 Agfa-Gevaert N.V. Support électrostatique
JP2525593Y2 (ja) * 1988-02-05 1997-02-12 株式会社 アビサレ 静電吸着シート
JPH0227748A (ja) * 1988-07-16 1990-01-30 Tomoegawa Paper Co Ltd 静電チャック装置及びその作成方法
US4975802A (en) * 1988-07-25 1990-12-04 Kabushiki Kaisha Abisare Electrostatic adsorbing apparatus having electrostatic adsorbing plate for adsorbing and laminating a plurality of objects to be adsorbed
JPH02142373A (ja) * 1988-11-18 1990-05-31 Showa Rubber Kk 静電吸着板
JPH02304946A (ja) * 1989-05-19 1990-12-18 Mitsui Petrochem Ind Ltd 静電チャック
JPH02307551A (ja) * 1989-05-20 1990-12-20 Abisare:Kk 静電吸着シート
US5173834A (en) * 1989-06-02 1992-12-22 Roland Dg Corporation Electrostatic attraction apparatus
JPH03227554A (ja) * 1990-02-01 1991-10-08 Tokyo Electron Ltd 静電チャック
JP2535663B2 (ja) * 1990-10-02 1996-09-18 株式会社アビサレ 掲示装置
JPH0695596A (ja) * 1992-07-29 1994-04-08 Abisare:Kk 静電掲示装置

Also Published As

Publication number Publication date
DE4326375A1 (de) 1994-06-09
GB2273205A (en) 1994-06-08
GB9324168D0 (en) 1994-01-12
FR2698991A1 (fr) 1994-06-10
JPH06225556A (ja) 1994-08-12
US5486974A (en) 1996-01-23
GB2273205B (en) 1996-06-19

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Legal Events

Date Code Title Description
ST Notification of lapse