FR2679030B1 - PIEZOELECTRIC MICROSENSORS. - Google Patents

PIEZOELECTRIC MICROSENSORS.

Info

Publication number
FR2679030B1
FR2679030B1 FR9108605A FR9108605A FR2679030B1 FR 2679030 B1 FR2679030 B1 FR 2679030B1 FR 9108605 A FR9108605 A FR 9108605A FR 9108605 A FR9108605 A FR 9108605A FR 2679030 B1 FR2679030 B1 FR 2679030B1
Authority
FR
France
Prior art keywords
microsensors
piezoelectric
piezoelectric microsensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9108605A
Other languages
French (fr)
Other versions
FR2679030A1 (en
Inventor
Robin Philippe
Bureau Jean-Marc
Broussoux Dominique
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR9108605A priority Critical patent/FR2679030B1/en
Publication of FR2679030A1 publication Critical patent/FR2679030A1/en
Application granted granted Critical
Publication of FR2679030B1 publication Critical patent/FR2679030B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
FR9108605A 1991-07-09 1991-07-09 PIEZOELECTRIC MICROSENSORS. Expired - Fee Related FR2679030B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9108605A FR2679030B1 (en) 1991-07-09 1991-07-09 PIEZOELECTRIC MICROSENSORS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9108605A FR2679030B1 (en) 1991-07-09 1991-07-09 PIEZOELECTRIC MICROSENSORS.

Publications (2)

Publication Number Publication Date
FR2679030A1 FR2679030A1 (en) 1993-01-15
FR2679030B1 true FR2679030B1 (en) 1993-09-24

Family

ID=9414874

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9108605A Expired - Fee Related FR2679030B1 (en) 1991-07-09 1991-07-09 PIEZOELECTRIC MICROSENSORS.

Country Status (1)

Country Link
FR (1) FR2679030B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110672241B (en) * 2019-09-02 2022-03-22 南京理工大学 Shock wave pressure sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555953A (en) * 1984-04-16 1985-12-03 Paolo Dario Composite, multifunctional tactile sensor

Also Published As

Publication number Publication date
FR2679030A1 (en) 1993-01-15

Similar Documents

Publication Publication Date Title
FI921594A0 (en) SENSOR FOER ANVAENDNING I LIVMODERN.
DE69310474D1 (en) Piezoelectric sensor
DE59103924D1 (en) MICROMECHANICAL TURN RATE SENSOR.
NO891123L (en) Transducer.
DE3880263D1 (en) PIEZOELECTRIC SENSOR.
DE69021772D1 (en) Piezoelectric accelerometer.
DE3879662D1 (en) VIBRATION SENSOR.
DE69206570D1 (en) Piezoelectric motor.
DE59103409D1 (en) Retro-reflective sensor.
DE69113597D1 (en) Piezoelectric rotation rate sensor.
DE59006845D1 (en) Capacitive sensor.
DE69323602D1 (en) Piezoelectric sensors
DE69004730D1 (en) Roll vibration sensor.
DE69208851D1 (en) Piezoelectric accelerometer
DE69108715D1 (en) CAPACITIVE FORCE SENSOR.
FI923892A0 (en) STRUCTURAL ELEMENT FOER EN KAERNREAKTORS BRAENSLESTAVSMONTERING.
NO892999D0 (en) SENSOR.
DE69206522D1 (en) Vibrator.
DE69209132D1 (en) Piezoelectric sensor
DE59104214D1 (en) Ultrasonic sensor.
DE59203214D1 (en) Inertial sensor.
IT8845749A0 (en) POSITION TRANSDUCER.
DE69007002D1 (en) Rolamit sensor.
DE59106323D1 (en) Pressure sensor.
DE59009149D1 (en) Transducer arrangement.

Legal Events

Date Code Title Description
ST Notification of lapse