FR2679030B1 - PIEZOELECTRIC MICROSENSORS. - Google Patents
PIEZOELECTRIC MICROSENSORS.Info
- Publication number
- FR2679030B1 FR2679030B1 FR9108605A FR9108605A FR2679030B1 FR 2679030 B1 FR2679030 B1 FR 2679030B1 FR 9108605 A FR9108605 A FR 9108605A FR 9108605 A FR9108605 A FR 9108605A FR 2679030 B1 FR2679030 B1 FR 2679030B1
- Authority
- FR
- France
- Prior art keywords
- microsensors
- piezoelectric
- piezoelectric microsensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9108605A FR2679030B1 (en) | 1991-07-09 | 1991-07-09 | PIEZOELECTRIC MICROSENSORS. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9108605A FR2679030B1 (en) | 1991-07-09 | 1991-07-09 | PIEZOELECTRIC MICROSENSORS. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2679030A1 FR2679030A1 (en) | 1993-01-15 |
FR2679030B1 true FR2679030B1 (en) | 1993-09-24 |
Family
ID=9414874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9108605A Expired - Fee Related FR2679030B1 (en) | 1991-07-09 | 1991-07-09 | PIEZOELECTRIC MICROSENSORS. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2679030B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110672241B (en) * | 2019-09-02 | 2022-03-22 | 南京理工大学 | Shock wave pressure sensor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555953A (en) * | 1984-04-16 | 1985-12-03 | Paolo Dario | Composite, multifunctional tactile sensor |
-
1991
- 1991-07-09 FR FR9108605A patent/FR2679030B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2679030A1 (en) | 1993-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |