FR2633675B1 - TURBOMOLECULAR PUMP - Google Patents

TURBOMOLECULAR PUMP

Info

Publication number
FR2633675B1
FR2633675B1 FR8808738A FR8808738A FR2633675B1 FR 2633675 B1 FR2633675 B1 FR 2633675B1 FR 8808738 A FR8808738 A FR 8808738A FR 8808738 A FR8808738 A FR 8808738A FR 2633675 B1 FR2633675 B1 FR 2633675B1
Authority
FR
France
Prior art keywords
rotor
piston
bore
stator
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8808738A
Other languages
French (fr)
Other versions
FR2633675A1 (en
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR8808738A priority Critical patent/FR2633675B1/en
Priority to JP1163624A priority patent/JPH0278798A/en
Priority to FI893103A priority patent/FI893103A/en
Priority to AT89111755T priority patent/ATE69088T1/en
Priority to EP89111755A priority patent/EP0348931B1/en
Priority to DE8989111755T priority patent/DE68900380D1/en
Publication of FR2633675A1 publication Critical patent/FR2633675A1/en
Application granted granted Critical
Publication of FR2633675B1 publication Critical patent/FR2633675B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)

Abstract

Turbomolecular pump comprising a rotor (40) and a stator (1, 42), the rotor being supported in the stator by bearings (3, 4), the stator (1, 42), in its part carrying the said bearings being pierced with a bore (6) equipped with a piston (13) delimiting with the said bore chambers (16, 17) forming grease reserves, at least one radial channel (9, 10) extending from each of these chambers, the said piston (13) possessing towards its outer end, means (14) for allowing it to penetrate into the said bore (6), characterised in that each channel (9, 10) terminates opposite a threaded cylindrical bearing surface (31, 32) integral with the rotor (40) and immediately adjacent to a supporting bearing (3, 4) of the rotor, bringing the grease axially to the said bearing along a circular ring, the said piston (13) being equipped with a gasket (25) located between the chambers (16, 17) and its outer end (26), the said means making it possible for the piston to penetrate into the bore comprising a drive means (20) activated periodically.
FR8808738A 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP Expired - Fee Related FR2633675B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (en) 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP
JP1163624A JPH0278798A (en) 1988-06-29 1989-06-26 Turbo-molecular pump
FI893103A FI893103A (en) 1988-06-29 1989-06-26 TURBOMOLEKYLAER PUMP.
AT89111755T ATE69088T1 (en) 1988-06-29 1989-06-28 TURBOMOLECULAR PUMP.
EP89111755A EP0348931B1 (en) 1988-06-29 1989-06-28 Turbomolecular pump
DE8989111755T DE68900380D1 (en) 1988-06-29 1989-06-28 TURBOMOLECULAR PUMP.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (en) 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP

Publications (2)

Publication Number Publication Date
FR2633675A1 FR2633675A1 (en) 1990-01-05
FR2633675B1 true FR2633675B1 (en) 1991-02-15

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8808738A Expired - Fee Related FR2633675B1 (en) 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP

Country Status (6)

Country Link
EP (1) EP0348931B1 (en)
JP (1) JPH0278798A (en)
AT (1) ATE69088T1 (en)
DE (1) DE68900380D1 (en)
FI (1) FI893103A (en)
FR (1) FR2633675B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (en) * 2012-08-24 2017-02-15 株式会社島津製作所 Vacuum pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (en) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbo-molecular vacuum pump with two=part rotor spindle - has solid lubricant ejected from spindle interior towards top and bottom bearings
NL8601666A (en) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev LUBRICATION DEVICE.

Also Published As

Publication number Publication date
ATE69088T1 (en) 1991-11-15
EP0348931B1 (en) 1991-10-30
DE68900380D1 (en) 1991-12-05
FI893103A0 (en) 1989-06-26
FR2633675A1 (en) 1990-01-05
FI893103A (en) 1989-12-30
JPH0278798A (en) 1990-03-19
EP0348931A1 (en) 1990-01-03

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Legal Events

Date Code Title Description
ST Notification of lapse