FR2564198B1 - Dispositif d'analyse et de correction de surfaces d'onde en temps reel - Google Patents

Dispositif d'analyse et de correction de surfaces d'onde en temps reel

Info

Publication number
FR2564198B1
FR2564198B1 FR8407370A FR8407370A FR2564198B1 FR 2564198 B1 FR2564198 B1 FR 2564198B1 FR 8407370 A FR8407370 A FR 8407370A FR 8407370 A FR8407370 A FR 8407370A FR 2564198 B1 FR2564198 B1 FR 2564198B1
Authority
FR
France
Prior art keywords
analyzing
real time
wave surfaces
correcting wave
correcting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8407370A
Other languages
English (en)
Other versions
FR2564198A1 (fr
Inventor
Jean-Claude Fontanella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR8407370A priority Critical patent/FR2564198B1/fr
Priority to US06/731,896 priority patent/US4645346A/en
Priority to JP60098144A priority patent/JPS60253940A/ja
Priority to DE8585400919T priority patent/DE3566579D1/de
Priority to EP85400919A priority patent/EP0168270B1/fr
Publication of FR2564198A1 publication Critical patent/FR2564198A1/fr
Application granted granted Critical
Publication of FR2564198B1 publication Critical patent/FR2564198B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Communication System (AREA)
  • Holo Graphy (AREA)
FR8407370A 1984-05-11 1984-05-11 Dispositif d'analyse et de correction de surfaces d'onde en temps reel Expired FR2564198B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8407370A FR2564198B1 (fr) 1984-05-11 1984-05-11 Dispositif d'analyse et de correction de surfaces d'onde en temps reel
US06/731,896 US4645346A (en) 1984-05-11 1985-05-08 Device for analyzing and correcting wavefront surfaces in real time
JP60098144A JPS60253940A (ja) 1984-05-11 1985-05-10 実時間波面分析修正装置
DE8585400919T DE3566579D1 (en) 1984-05-11 1985-05-10 Device for analyzing and correcting wavefront surfaces in real time
EP85400919A EP0168270B1 (fr) 1984-05-11 1985-05-10 Dispositif pour l'analyse et la correction de surfaces d'ondes en temps réel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8407370A FR2564198B1 (fr) 1984-05-11 1984-05-11 Dispositif d'analyse et de correction de surfaces d'onde en temps reel

Publications (2)

Publication Number Publication Date
FR2564198A1 FR2564198A1 (fr) 1985-11-15
FR2564198B1 true FR2564198B1 (fr) 1986-09-19

Family

ID=9303911

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8407370A Expired FR2564198B1 (fr) 1984-05-11 1984-05-11 Dispositif d'analyse et de correction de surfaces d'onde en temps reel

Country Status (5)

Country Link
US (1) US4645346A (fr)
EP (1) EP0168270B1 (fr)
JP (1) JPS60253940A (fr)
DE (1) DE3566579D1 (fr)
FR (1) FR2564198B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4743118A (en) * 1985-04-04 1988-05-10 Ricoh Company, Ltd. Method of detecting origin of shear and measuring amount of shear in shearing interferometer systems
JPH06500405A (ja) * 1991-05-14 1994-01-13 ブルースカイ　リサーチ　インコーポレイテッド 動的シアリング干渉計
JP3043979B2 (ja) * 1995-10-20 2000-05-22 サンデン株式会社 スクロール型圧縮機用ボトムプレート
US7146060B2 (en) * 2002-12-27 2006-12-05 Cicchiello James M Real-time correction of phase distortion
US7283251B1 (en) * 2005-10-26 2007-10-16 Lockheed Martin Corporation Black fringe wavefront sensor
US7511826B2 (en) * 2006-02-27 2009-03-31 Asml Holding N.V. Symmetrical illumination forming system and method
CN106767391B (zh) * 2016-12-23 2019-06-14 浙江大学 四波前横向剪切干涉波前传感器的灵敏度增强装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2163861A5 (fr) * 1971-12-03 1973-07-27 Anvar
US3923400A (en) * 1974-01-03 1975-12-02 Itek Corp Real-time wavefront correction system
JPS54119706U (fr) * 1978-02-07 1979-08-22
JPS5533941U (fr) * 1978-08-23 1980-03-05

Also Published As

Publication number Publication date
JPS60253940A (ja) 1985-12-14
US4645346A (en) 1987-02-24
EP0168270A1 (fr) 1986-01-15
EP0168270B1 (fr) 1988-11-30
FR2564198A1 (fr) 1985-11-15
DE3566579D1 (en) 1989-01-05

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Legal Events

Date Code Title Description
ST Notification of lapse