FR2558095B1 - Perfectionnements apportes aux tetes de travail des machines de polissage et analogues - Google Patents

Perfectionnements apportes aux tetes de travail des machines de polissage et analogues

Info

Publication number
FR2558095B1
FR2558095B1 FR8404175A FR8404175A FR2558095B1 FR 2558095 B1 FR2558095 B1 FR 2558095B1 FR 8404175 A FR8404175 A FR 8404175A FR 8404175 A FR8404175 A FR 8404175A FR 2558095 B1 FR2558095 B1 FR 2558095B1
Authority
FR
France
Prior art keywords
polishing machines
working heads
heads
working
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8404175A
Other languages
English (en)
Other versions
FR2558095A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8404175A priority Critical patent/FR2558095B1/fr
Priority to EP85420047A priority patent/EP0156746A1/fr
Publication of FR2558095A1 publication Critical patent/FR2558095A1/fr
Application granted granted Critical
Publication of FR2558095B1 publication Critical patent/FR2558095B1/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
FR8404175A 1984-03-14 1984-03-14 Perfectionnements apportes aux tetes de travail des machines de polissage et analogues Expired FR2558095B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8404175A FR2558095B1 (fr) 1984-03-14 1984-03-14 Perfectionnements apportes aux tetes de travail des machines de polissage et analogues
EP85420047A EP0156746A1 (fr) 1984-03-14 1985-03-13 Perfectionnements apportés aux têtes de travail des machines de polissage et analogues

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8404175A FR2558095B1 (fr) 1984-03-14 1984-03-14 Perfectionnements apportes aux tetes de travail des machines de polissage et analogues

Publications (2)

Publication Number Publication Date
FR2558095A1 FR2558095A1 (fr) 1985-07-19
FR2558095B1 true FR2558095B1 (fr) 1988-04-08

Family

ID=9302151

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8404175A Expired FR2558095B1 (fr) 1984-03-14 1984-03-14 Perfectionnements apportes aux tetes de travail des machines de polissage et analogues

Country Status (2)

Country Link
EP (1) EP0156746A1 (fr)
FR (1) FR2558095B1 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910009320B1 (ko) * 1986-08-19 1991-11-09 미쓰비시 마테리알 가부시기가이샤 연마장치
USRE38878E1 (en) * 1992-09-24 2005-11-15 Ebara Corporation Polishing apparatus
EP0589433B1 (fr) * 1992-09-24 1999-07-28 Ebara Corporation Appareil de polissage
US6024630A (en) * 1995-06-09 2000-02-15 Applied Materials, Inc. Fluid-pressure regulated wafer polishing head
TW371635B (en) * 1996-10-10 1999-10-11 Applied Materials Inc Carrier head with a layer conformable material for a chemical mechanical polishing system
US6036587A (en) * 1996-10-10 2000-03-14 Applied Materials, Inc. Carrier head with layer of conformable material for a chemical mechanical polishing system
US6146259A (en) 1996-11-08 2000-11-14 Applied Materials, Inc. Carrier head with local pressure control for a chemical mechanical polishing apparatus
US6183354B1 (en) 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6398621B1 (en) 1997-05-23 2002-06-04 Applied Materials, Inc. Carrier head with a substrate sensor
US5957751A (en) * 1997-05-23 1999-09-28 Applied Materials, Inc. Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
US5964653A (en) 1997-07-11 1999-10-12 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US5916015A (en) * 1997-07-25 1999-06-29 Speedfam Corporation Wafer carrier for semiconductor wafer polishing machine
US5993302A (en) * 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
US6080050A (en) * 1997-12-31 2000-06-27 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
JPH11262857A (ja) * 1998-03-18 1999-09-28 Rohm Co Ltd 半導体ウェハの研磨装置
US6422927B1 (en) 1998-12-30 2002-07-23 Applied Materials, Inc. Carrier head with controllable pressure and loading area for chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US6722965B2 (en) 2000-07-11 2004-04-20 Applied Materials Inc. Carrier head with flexible membranes to provide controllable pressure and loading area
US6857945B1 (en) 2000-07-25 2005-02-22 Applied Materials, Inc. Multi-chamber carrier head with a flexible membrane
US7198561B2 (en) 2000-07-25 2007-04-03 Applied Materials, Inc. Flexible membrane for multi-chamber carrier head
US7255637B2 (en) 2000-09-08 2007-08-14 Applied Materials, Inc. Carrier head vibration damping
US7497767B2 (en) 2000-09-08 2009-03-03 Applied Materials, Inc. Vibration damping during chemical mechanical polishing
US6848980B2 (en) 2001-10-10 2005-02-01 Applied Materials, Inc. Vibration damping in a carrier head
US6676497B1 (en) 2000-09-08 2004-01-13 Applied Materials Inc. Vibration damping in a chemical mechanical polishing system
US6739958B2 (en) 2002-03-19 2004-05-25 Applied Materials Inc. Carrier head with a vibration reduction feature for a chemical mechanical polishing system
US7255771B2 (en) 2004-03-26 2007-08-14 Applied Materials, Inc. Multiple zone carrier head with flexible membrane

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1653108A (en) * 1926-04-29 1927-12-20 Koenig Otto Alfred Surfacing machine
US1840254A (en) * 1929-06-27 1932-01-05 Fischman & Sons I Polishing apparatus
US2189472A (en) * 1937-09-27 1940-02-06 Edward G Peterson Buffing device
US2323962A (en) * 1941-07-25 1943-07-13 George W Williams Sanding and buffing tool
DE1029699B (de) * 1954-06-30 1958-05-08 Fritz Graupner Vorrichtung zum Planschleifen von Steinplatten, insbesondere Terrazzoplatten
US2860496A (en) * 1955-04-13 1958-11-18 Berne Tocci Guilbert Ring oscillator
US2781617A (en) * 1955-05-27 1957-02-19 Jerry J Lines Swivel sander
US3053063A (en) * 1960-08-03 1962-09-11 Flexan Corp Abrading disc mount
DE1677168A1 (de) * 1967-03-09 1971-04-29 Franke Gmbh Edelstahlerzeugnis Schleif- und Poliervorrichtung
US3553907A (en) * 1967-06-07 1971-01-12 Litton Industries Inc Grinding machine for ring-like workpieces
US3499641A (en) * 1967-10-02 1970-03-10 Collins Radio Co Fluid pressure actuated diaphragm workpiece clamping device
FR2239089A6 (en) * 1973-07-24 1975-02-21 Zeitlin Leo Polishing or grinding machine - inflatable pneumatic or hydraulic cushion to oppose rotation of guide
US4373991A (en) * 1982-01-28 1983-02-15 Western Electric Company, Inc. Methods and apparatus for polishing a semiconductor wafer

Also Published As

Publication number Publication date
FR2558095A1 (fr) 1985-07-19
EP0156746A1 (fr) 1985-10-02

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse