FR2531938B1 - PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER - Google Patents

PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER

Info

Publication number
FR2531938B1
FR2531938B1 FR8214395A FR8214395A FR2531938B1 FR 2531938 B1 FR2531938 B1 FR 2531938B1 FR 8214395 A FR8214395 A FR 8214395A FR 8214395 A FR8214395 A FR 8214395A FR 2531938 B1 FR2531938 B1 FR 2531938B1
Authority
FR
France
Prior art keywords
thin plates
plates stored
push lift
collective container
collective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8214395A
Other languages
French (fr)
Other versions
FR2531938A1 (en
Inventor
Gerard Petroz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Cristaux and Detecteurs SAS
Original Assignee
Crismatec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crismatec SA filed Critical Crismatec SA
Priority to FR8214395A priority Critical patent/FR2531938B1/en
Publication of FR2531938A1 publication Critical patent/FR2531938A1/en
Application granted granted Critical
Publication of FR2531938B1 publication Critical patent/FR2531938B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
FR8214395A 1982-08-20 1982-08-20 PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER Expired FR2531938B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8214395A FR2531938B1 (en) 1982-08-20 1982-08-20 PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8214395A FR2531938B1 (en) 1982-08-20 1982-08-20 PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER

Publications (2)

Publication Number Publication Date
FR2531938A1 FR2531938A1 (en) 1984-02-24
FR2531938B1 true FR2531938B1 (en) 1986-02-21

Family

ID=9276975

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8214395A Expired FR2531938B1 (en) 1982-08-20 1982-08-20 PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER

Country Status (1)

Country Link
FR (1) FR2531938B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568234A (en) * 1983-05-23 1986-02-04 Asq Boats, Inc. Wafer transfer apparatus
DE3875209D1 (en) * 1987-08-13 1992-11-12 Siemens Ag DEVICE FOR IDENTIFYING DIFFERENT SEMICONDUCTOR DISCS.
US5298111A (en) * 1991-05-31 1994-03-29 Shin-Etsu Handotai Co., Ltd. Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4311427A (en) * 1979-12-21 1982-01-19 Varian Associates, Inc. Wafer transfer system
JPS5691427A (en) * 1979-12-25 1981-07-24 Mitsubishi Electric Corp Device for processing semiconductor substrate
EP0047132B1 (en) * 1980-09-02 1985-07-03 Heraeus Quarzschmelze Gmbh Method of and apparatus for transferring semiconductor wafers between carrier members

Also Published As

Publication number Publication date
FR2531938A1 (en) 1984-02-24

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Legal Events

Date Code Title Description
ST Notification of lapse