FR2531938B1 - PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER - Google Patents
PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINERInfo
- Publication number
- FR2531938B1 FR2531938B1 FR8214395A FR8214395A FR2531938B1 FR 2531938 B1 FR2531938 B1 FR 2531938B1 FR 8214395 A FR8214395 A FR 8214395A FR 8214395 A FR8214395 A FR 8214395A FR 2531938 B1 FR2531938 B1 FR 2531938B1
- Authority
- FR
- France
- Prior art keywords
- thin plates
- plates stored
- push lift
- collective container
- collective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8214395A FR2531938B1 (en) | 1982-08-20 | 1982-08-20 | PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8214395A FR2531938B1 (en) | 1982-08-20 | 1982-08-20 | PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2531938A1 FR2531938A1 (en) | 1984-02-24 |
FR2531938B1 true FR2531938B1 (en) | 1986-02-21 |
Family
ID=9276975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8214395A Expired FR2531938B1 (en) | 1982-08-20 | 1982-08-20 | PUSH LIFT FOR THIN PLATES STORED IN A COLLECTIVE CONTAINER |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2531938B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4568234A (en) * | 1983-05-23 | 1986-02-04 | Asq Boats, Inc. | Wafer transfer apparatus |
DE3875209D1 (en) * | 1987-08-13 | 1992-11-12 | Siemens Ag | DEVICE FOR IDENTIFYING DIFFERENT SEMICONDUCTOR DISCS. |
US5298111A (en) * | 1991-05-31 | 1994-03-29 | Shin-Etsu Handotai Co., Ltd. | Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4311427A (en) * | 1979-12-21 | 1982-01-19 | Varian Associates, Inc. | Wafer transfer system |
JPS5691427A (en) * | 1979-12-25 | 1981-07-24 | Mitsubishi Electric Corp | Device for processing semiconductor substrate |
EP0047132B1 (en) * | 1980-09-02 | 1985-07-03 | Heraeus Quarzschmelze Gmbh | Method of and apparatus for transferring semiconductor wafers between carrier members |
-
1982
- 1982-08-20 FR FR8214395A patent/FR2531938B1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2531938A1 (en) | 1984-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |