FR2461944B1 - - Google Patents

Info

Publication number
FR2461944B1
FR2461944B1 FR8015979A FR8015979A FR2461944B1 FR 2461944 B1 FR2461944 B1 FR 2461944B1 FR 8015979 A FR8015979 A FR 8015979A FR 8015979 A FR8015979 A FR 8015979A FR 2461944 B1 FR2461944 B1 FR 2461944B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8015979A
Other versions
FR2461944A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9157579A external-priority patent/JPS5616849A/ja
Priority claimed from JP10506579A external-priority patent/JPS5629147A/ja
Priority claimed from JP6394380A external-priority patent/JPS56160645A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2461944A1 publication Critical patent/FR2461944A1/fr
Application granted granted Critical
Publication of FR2461944B1 publication Critical patent/FR2461944B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FR8015979A 1979-07-20 1980-07-18 Procede et appareil pour examiner l'aspect exterieur d'un objet cylindrique plein Granted FR2461944A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9157579A JPS5616849A (en) 1979-07-20 1979-07-20 Automatic appearance check unit for cylindrical material
JP10506579A JPS5629147A (en) 1979-08-20 1979-08-20 Automatic physical appearance inspection unit for cylindrical object
JP6394380A JPS56160645A (en) 1980-05-16 1980-05-16 Detecting method for surface defect of body

Publications (2)

Publication Number Publication Date
FR2461944A1 FR2461944A1 (fr) 1981-02-06
FR2461944B1 true FR2461944B1 (fr) 1983-12-16

Family

ID=27298333

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8015979A Granted FR2461944A1 (fr) 1979-07-20 1980-07-18 Procede et appareil pour examiner l'aspect exterieur d'un objet cylindrique plein

Country Status (4)

Country Link
US (1) US4410278A (fr)
DE (1) DE3027373A1 (fr)
FR (1) FR2461944A1 (fr)
GB (1) GB2057675B (fr)

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US4484081A (en) * 1980-09-19 1984-11-20 Trw Inc. Defect analysis system
US4532723A (en) * 1982-03-25 1985-08-06 General Electric Company Optical inspection system
US5297222A (en) * 1982-05-04 1994-03-22 Hitachi, Ltd. Image processing apparatus
GB2133871A (en) * 1982-12-23 1984-08-01 Austin Rover Group Apparatus for a method of inspecting automotive components
IT1174127B (it) * 1983-06-14 1987-07-01 Hauni Werke Koerber & Co Kg Dispositivo di controllo ottico per sigarette
JPS6147542A (ja) * 1984-08-13 1986-03-08 Fuji Photo Film Co Ltd 感光フィルムの表面検査方法および装置
US4754148A (en) * 1986-12-10 1988-06-28 Allegheny Ludlum Corporation Adjustably positioned apparatus maintaining a fixed perpendicular distance for evaluating a curved surface
US4923066A (en) * 1987-10-08 1990-05-08 Elor Optronics Ltd. Small arms ammunition inspection system
US4872757A (en) * 1988-04-20 1989-10-10 Ball Corporation Optical convex surface profiling and gauging apparatus and method therefor
US4863275A (en) * 1988-04-20 1989-09-05 Ball Corporation Portable, shock-proof container surface profiling instrumentation
US4978495A (en) * 1988-05-27 1990-12-18 Westinghouse Electric Corp. Nuclear fuel pellet surface defect inspection apparatus
DE3928279C2 (de) * 1989-08-26 1998-05-14 Truetzschler Gmbh & Co Kg Verfahren und Vorrichtung zum Erkennen von störenden Partikeln, insbesondere Trashteilen, Nissen, Schalennissen, Noppen u. dgl., in textilem Fasergut, z. B. Baumwolle, Chemiefasern u. dgl.
US5130559A (en) * 1989-08-26 1992-07-14 Trutzschler Gmbh & Co. Kg Method and apparatus for recognizing particle impurities in textile fiber
FR2667398B1 (fr) * 1990-09-27 1992-10-30 Cogema Procede et installation d'examen automatique de la surface circonferentielle d'objets cylindriques.
US5174947A (en) * 1990-12-14 1992-12-29 Westinghouse Electric Corporation Nuclear fuel pellet turning apparatus and method
US5147047A (en) * 1991-01-14 1992-09-15 Westinghouse Electric Corp. Pellet inspection system
US5207976A (en) * 1991-04-05 1993-05-04 Westinghouse Electric Corp. Pellet slide and inspection assembly in a nuclear fuel pellet surface defect inspection apparatus
US5345309A (en) * 1991-10-10 1994-09-06 Ball Corporation Precision three dimensional profiling and measurement system for cylindrical containers
US5432600A (en) * 1992-05-15 1995-07-11 Philip Morris Incorporated Systems for optically inspecting cylindrical surfaces
US5448365A (en) * 1992-05-15 1995-09-05 Philip Morris Incorporated Systems for optical inspection
US5309486A (en) * 1992-11-12 1994-05-03 Westinghouse Electric Corp. Non-contact flaw detection for cylindrical nuclear fuel pellets
FR2700007B1 (fr) * 1992-12-29 1995-03-10 Fabrication Combustibles Ste Fra Procédé et dispositif optiques de classification automatique de pastilles cylindriques de combustible nucléaire.
GB9304966D0 (en) * 1993-03-11 1993-04-28 British Nucelar Fuels Plc Optical measuring system
GB9309238D0 (en) * 1993-05-05 1993-06-16 British Nuclear Fuels Plc Apparatus for detection of surface defects
DE4325921A1 (de) * 1993-08-02 1995-02-09 Schlafhorst & Co W Kreuzspulenqualitätsprüfung
EP0838026B1 (fr) * 1995-06-15 2003-03-19 British Nuclear Fuels PLC Controle de la surface d'un objet
GB9613685D0 (en) * 1996-06-28 1996-08-28 Crosfield Electronics Ltd An illumination unit
US6108078A (en) * 1997-11-21 2000-08-22 Kabushiki Kaisha Topcon Method and apparatus for surface inspection
JP2000241117A (ja) * 1999-02-22 2000-09-08 Keyence Corp 画像のエッジ検出方法、検査装置及び記録媒体
SE516096C2 (sv) * 1999-08-11 2001-11-19 Westinghouse Atom Ab Förfarande och anordning för inspektion av och mätning vid ett föremål
US20020079469A1 (en) * 2000-12-21 2002-06-27 Kennedy Hamish Alexander Nigel Product tracking during grading
JP2002323306A (ja) * 2001-04-26 2002-11-08 Sigma:Kk 円筒体の歪量測定装置
DE10160297B4 (de) * 2001-12-07 2007-06-21 Robert Bosch Gmbh Vorrichtung zur Untersuchung der Oberfläche eines rotationssystemmetrischen Körpers
US20050174567A1 (en) * 2004-02-09 2005-08-11 Mectron Engineering Company Crack detection system
US7751624B2 (en) * 2004-08-19 2010-07-06 Nextace Corporation System and method for automating document search and report generation
JP2006162288A (ja) * 2004-12-02 2006-06-22 Nippon Sheet Glass Co Ltd ロッドの反り検査方法および検査装置
EP1943504B1 (fr) 2005-11-02 2010-09-08 Microscan Systems, Inc. Illuminateur pour surfaces cylindriques incurvees
US7792419B2 (en) 2005-11-02 2010-09-07 Microscan Systems, Inc. Illuminator-especially for cylindrical curved surfaces
WO2007092950A2 (fr) * 2006-02-09 2007-08-16 Kla-Tencor Technologies Corporation Procédés et systèmes permettant de déterminer une caractéristique d'une plaquette
DE102006008840B4 (de) * 2006-02-25 2009-05-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beleuchtungsvorrichtung für zylindrische Objekte, damit durchgeführtes Oberflächenuntersuchungsverfahren und Computerprogrammprodukt
WO2007137261A2 (fr) * 2006-05-22 2007-11-29 Kla-Tencor Technologies Corporation Procédés et des systèmes servant : à détecter des trous d'aiguille dans un film formé sur une tranche de semi-conducteur, et à suivre la marche d'un outil de traitement thermique.
JP5024636B2 (ja) * 2006-06-27 2012-09-12 日本電気株式会社 基板又は電子部品の反り解析方法、基板又は電子部品の反り解析システム及び基板又は電子部品の反り解析プログラム
JP5349742B2 (ja) * 2006-07-07 2013-11-20 株式会社日立ハイテクノロジーズ 表面検査方法及び表面検査装置
DE102007014036B4 (de) * 2007-03-23 2009-02-05 Siemens Ag Haltevorrichtung mit drei Auflageelementen zum Drehen eines zylindrischen Gegenstands, optische Messanordnung
FR2914423B1 (fr) * 2007-03-26 2009-07-31 Proditec Soc Par Actions Simpl Dispositif de controle visuel automatise.
US7812941B2 (en) * 2007-06-15 2010-10-12 Abbott Cardiovascular Systems Inc. Systems and methods for the inspection of cylinders
US8003157B2 (en) 2007-06-15 2011-08-23 Abbott Cardiovascular Systems Inc. System and method for coating a stent
JP2009014510A (ja) * 2007-07-04 2009-01-22 Hitachi High-Technologies Corp 検査方法及び検査装置
US7912658B2 (en) * 2008-05-28 2011-03-22 Kla-Tencor Corp. Systems and methods for determining two or more characteristics of a wafer
WO2009155502A2 (fr) * 2008-06-19 2009-12-23 Kla-Tencor Corporation Procédés informatiques, support lisible par ordinateur et systèmes pour déterminer une ou plusieurs caractéristiques d'une plaquette
US8269960B2 (en) * 2008-07-24 2012-09-18 Kla-Tencor Corp. Computer-implemented methods for inspecting and/or classifying a wafer
JP5655936B2 (ja) * 2011-03-23 2015-01-21 トヨタ自動車株式会社 ワークの欠陥検出装置
CN104220932B (zh) * 2012-02-21 2017-02-22 Asml荷兰有限公司 检查设备和方法
JP5847304B2 (ja) * 2012-05-16 2016-01-20 株式会社日立ハイテクノロジーズ 検査装置
US9518932B2 (en) * 2013-11-06 2016-12-13 Kla-Tencor Corp. Metrology optimized inspection
MX2016009958A (es) * 2014-02-04 2016-10-31 Nsk Americas Inc Aparato y metodo de inspeccion de un ensamble de columna de direccion soportado a media longitud.
US9588056B2 (en) * 2014-05-29 2017-03-07 Corning Incorporated Method for particle detection on flexible substrates
WO2016025593A1 (fr) * 2014-08-12 2016-02-18 Mectron Engineering Company, Inc. Système d'inspection vidéo de pièces
CN106442555A (zh) * 2016-10-13 2017-02-22 广东理工学院 用于检测圆柱形工件表面缺陷的成像装置及成像方法
DE102016121659A1 (de) * 2016-11-11 2018-05-17 New Np Gmbh Vorrichtung und Verfahren zur Erfassung und/oder Untersuchung eines Abtrages an einer Oberfläche eines zylindrischen Bauteiles
WO2018132258A1 (fr) * 2017-01-10 2018-07-19 Sunspring America, Inc. Technologies d'identification de défauts
CN106990119A (zh) * 2017-04-27 2017-07-28 中科慧远视觉技术（洛阳）有限公司 一种自动检测白玻表面缺陷的视觉检测***及检测方法
CN110702696A (zh) * 2019-10-14 2020-01-17 珠海博明视觉科技有限公司 一种磁瓦表面缺陷检测装置
CN112345555A (zh) * 2020-10-30 2021-02-09 凌云光技术股份有限公司 外观检查机高亮成像光源***
CN112697807B (zh) * 2020-12-09 2024-03-26 江汉大学 一种圆柱状物体表面裂纹宽度检测方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1072551A (en) * 1963-05-21 1967-06-21 Pilkington Brothers Ltd Improvements in or relating to the manufacture of flat material
GB1338663A (en) * 1971-08-25 1973-11-28 Andreev J N Apparatus for checking the surface of resistor bases
BE788990A (fr) * 1971-09-23 1973-03-19 Lilly Co Eli Systeme optique de controle de capsules
US3834822A (en) * 1973-03-29 1974-09-10 Gen Motors Corp Method and apparatus for surface defect detection using detection of non-symmetrical patterns of non-specularly reflected light
GB1491241A (en) * 1975-01-15 1977-11-09 Plessey Co Ltd Methods and apparatus for profile monitoring
CA1057704A (fr) * 1976-01-06 1979-07-03 Westinghouse Electric Corporation Tri photoelectrique de pastilles de combustible nucleaire ebrechees
JPS5342063A (en) * 1976-09-29 1978-04-17 Hitachi Ltd Appearance inspector for cylindrical body
US4162126A (en) * 1976-12-10 1979-07-24 Hitachi, Ltd. Surface detect test apparatus
JPS6026973B2 (ja) * 1976-12-24 1985-06-26 株式会社日立製作所 物体の表面検査方法及びその装置
US4226539A (en) * 1976-12-24 1980-10-07 Hitachi, Ltd. Cylindrical body appearance inspection apparatus
JPS6055762B2 (ja) * 1977-04-08 1985-12-06 株式会社日立製作所 円筒物体外観検査装置
US4253768A (en) * 1978-08-09 1981-03-03 Westinghouse Electric Corp. Processing system for detection and the classification of flaws on metallic surfaces

Also Published As

Publication number Publication date
DE3027373A1 (de) 1981-03-19
FR2461944A1 (fr) 1981-02-06
GB2057675B (en) 1983-11-16
GB2057675A (en) 1981-04-01
DE3027373C2 (fr) 1988-07-21
US4410278A (en) 1983-10-18

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