FR2419507B1 - - Google Patents
Info
- Publication number
- FR2419507B1 FR2419507B1 FR7905867A FR7905867A FR2419507B1 FR 2419507 B1 FR2419507 B1 FR 2419507B1 FR 7905867 A FR7905867 A FR 7905867A FR 7905867 A FR7905867 A FR 7905867A FR 2419507 B1 FR2419507 B1 FR 2419507B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53026610A JPS589362B2 (ja) | 1978-03-10 | 1978-03-10 | 赤外線多層フイルム膜厚測定方法及びその測定装置 |
| JP1639879A JPS55109904A (en) | 1979-02-15 | 1979-02-15 | Optical physical-value measuring instrument of penetration type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2419507A1 FR2419507A1 (fr) | 1979-10-05 |
| FR2419507B1 true FR2419507B1 (de) | 1983-10-28 |
Family
ID=26352740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7905867A Granted FR2419507A1 (fr) | 1978-03-10 | 1979-03-07 | Procede et installations pour mesurer les epaisseurs des couches d'une pellicule a plusieurs couches |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2909400C2 (de) |
| FR (1) | FR2419507A1 (de) |
| GB (1) | GB2016678B (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3014774C2 (de) * | 1980-04-17 | 1984-11-08 | Paul Lippke Gmbh & Co Kg, 5450 Neuwied | Unter Anwendung von Ultrarot-Strahlung ausgeführtes Verfahren zum Messen der Dicke oder des Flächengewichtes einer Beschichtung auf einer Unterlage |
| DE3248091A1 (de) * | 1982-12-24 | 1984-06-28 | Leybold-Heraeus GmbH, 5000 Köln | Messverfahren und fotometeranordnung fuer die herstellung von vielfach-schichtsystemen |
| JPS617445A (ja) * | 1984-06-21 | 1986-01-14 | Toshiba Corp | 銅酸化被膜の酸化度判別装置 |
| US4631408A (en) * | 1984-09-24 | 1986-12-23 | Kollmorgen Technologies Corporation | Method of simultaneously determining gauge and orientation of polymer films |
| DE3585875D1 (de) * | 1984-12-24 | 1992-05-21 | Mitsubishi Heavy Ind Ltd | Verfahren zum steuern der dicke des aus einem fluessigen gemisch von fetten koerpern und wasser bestehenden films in druckmaschinen. |
| DE3631652C2 (de) * | 1986-09-17 | 1994-05-19 | Siemens Ag | Meßanordnung zur berührungslosen Dickenbestimmung |
| DE3728705A1 (de) * | 1987-08-28 | 1989-03-09 | Agfa Gevaert Ag | Vorrichtung zur ueberpruefung von beschichteten und unbeschichteten folien |
| DE3728704A1 (de) * | 1987-08-28 | 1989-03-09 | Agfa Gevaert Ag | Vorrichtung zur bestimmung der dicke von schichttraegern |
| GB9219450D0 (en) * | 1992-09-15 | 1992-10-28 | Glaverbel | Thin film thickness monitoring and control |
| IL109589A0 (en) * | 1993-05-14 | 1994-08-26 | Hughes Aircraft Co | Apparatus and method for performing high spatial resolution thin film layer thickness metrology |
| DE29502560U1 (de) * | 1995-02-16 | 1995-03-30 | "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum | Vorrichtung zur Bestimmung der Schichtdicke farbiger Schichten auf transparenten Substraten |
| DE19847617C2 (de) * | 1998-10-15 | 2002-11-07 | Sensor Instr Gmbh | Verfahren und Vorrichtung zum Messen der Länge des Lichtleiters |
| JP4904165B2 (ja) * | 2004-01-15 | 2012-03-28 | デポジッション サイエンス インク | 堆積工程中に薄膜の光学的特性を監視する方法および装置 |
| DE102010025277A1 (de) | 2010-06-28 | 2011-12-29 | Sensorik-Bayern Gmbh | Vorrichtung und Verfahren zum Steuern des Auftrags einer Beschichtung |
| DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3405268A (en) * | 1965-03-12 | 1968-10-08 | Brun Sensor Systems Inc | Radiant energy absorption gage for measuring the weight of a base material and the content of a material sorbed by the base material |
| GB1137144A (en) * | 1966-05-04 | 1968-12-18 | Ici Ltd | Method and apparatus for measuring absorption of electro-magnetic radiation |
| US3631526A (en) * | 1969-11-05 | 1971-12-28 | Brun Sensor Systems Inc | Apparatus and methods for eliminating interference effect errors in dual-beam infrared measurements |
| FR2082717A5 (de) * | 1970-03-25 | 1971-12-10 | Cellophane Sa | |
| US3869211A (en) * | 1972-06-29 | 1975-03-04 | Canon Kk | Instrument for measuring thickness of thin film |
| US3824017A (en) * | 1973-03-26 | 1974-07-16 | Ibm | Method of determining the thickness of contiguous thin films on a substrate |
| US4027161A (en) * | 1976-04-05 | 1977-05-31 | Industrial Nucleonics Corporation | Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation |
-
1979
- 1979-03-02 GB GB7907539A patent/GB2016678B/en not_active Expired
- 1979-03-07 FR FR7905867A patent/FR2419507A1/fr active Granted
- 1979-03-09 DE DE19792909400 patent/DE2909400C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2016678B (en) | 1982-09-15 |
| FR2419507A1 (fr) | 1979-10-05 |
| GB2016678A (en) | 1979-09-26 |
| DE2909400C2 (de) | 1985-12-05 |
| DE2909400A1 (de) | 1979-09-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TP | Transmission of property | ||
| ST | Notification of lapse |