FR2408909A1 - Source de vapeur metallique a debit reglable et application aux analyseurs ioniques - Google Patents

Source de vapeur metallique a debit reglable et application aux analyseurs ioniques

Info

Publication number
FR2408909A1
FR2408909A1 FR7734272A FR7734272A FR2408909A1 FR 2408909 A1 FR2408909 A1 FR 2408909A1 FR 7734272 A FR7734272 A FR 7734272A FR 7734272 A FR7734272 A FR 7734272A FR 2408909 A1 FR2408909 A1 FR 2408909A1
Authority
FR
France
Prior art keywords
source
application
analyzers
adjustable flow
ionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7734272A
Other languages
English (en)
Other versions
FR2408909B1 (fr
Inventor
Bruno Blanchard
Patrick Carrier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7734272A priority Critical patent/FR2408909A1/fr
Priority to US05/957,811 priority patent/US4197455A/en
Priority to JP13897078A priority patent/JPS5476288A/ja
Publication of FR2408909A1 publication Critical patent/FR2408909A1/fr
Application granted granted Critical
Publication of FR2408909B1 publication Critical patent/FR2408909B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details

Abstract

SOURCE DE VAPEUR METALLIQUE A DEBIT REGLABLE. LA SOURCE COMPREND UN TUBE DE SORTIE CHAUFFE. DE PREFERENCE LE TUBE EST METALLIQUE ET CHAUFFE PAR EFFET JOULE. APPLICATION AUX SOURCES DE VAPEUR ALCALINE POUR LES ANALYSEURS IONIQUES.
FR7734272A 1977-11-15 1977-11-15 Source de vapeur metallique a debit reglable et application aux analyseurs ioniques Granted FR2408909A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR7734272A FR2408909A1 (fr) 1977-11-15 1977-11-15 Source de vapeur metallique a debit reglable et application aux analyseurs ioniques
US05/957,811 US4197455A (en) 1977-11-15 1978-11-06 Metal vapor source with a regulatable flow and to an ion analyzer equipped with such a source
JP13897078A JPS5476288A (en) 1977-11-15 1978-11-13 Flow rate controllable metal vapor source and ion analyzer equipped with such source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7734272A FR2408909A1 (fr) 1977-11-15 1977-11-15 Source de vapeur metallique a debit reglable et application aux analyseurs ioniques

Publications (2)

Publication Number Publication Date
FR2408909A1 true FR2408909A1 (fr) 1979-06-08
FR2408909B1 FR2408909B1 (fr) 1980-11-28

Family

ID=9197609

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7734272A Granted FR2408909A1 (fr) 1977-11-15 1977-11-15 Source de vapeur metallique a debit reglable et application aux analyseurs ioniques

Country Status (3)

Country Link
US (1) US4197455A (fr)
JP (1) JPS5476288A (fr)
FR (1) FR2408909A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997049116A1 (fr) * 1996-06-19 1997-12-24 Micrion Corporation Systeme de distribution de gaz pour traitement par faisceau de particules
US7923702B2 (en) 2007-11-13 2011-04-12 Carl Zeiss Nts Gmbh System and method for processing an object
US8939108B2 (en) 2008-02-18 2015-01-27 Carl Zeiss Microscopy Gmbh Processing system

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4814612A (en) * 1983-08-30 1989-03-21 Research Corporation Method and means for vaporizing liquids for detection or analysis
US4861989A (en) * 1983-08-30 1989-08-29 Research Corporation Technologies, Inc. Ion vapor source for mass spectrometry of liquids
US4730111A (en) * 1983-08-30 1988-03-08 Research Corporation Ion vapor source for mass spectrometry of liquids
US4960992A (en) * 1983-08-30 1990-10-02 Research Corporation Technologies Method and means for vaporizing liquids by means of heating a sample capillary tube for detection or analysis
US4988871A (en) * 1989-05-08 1991-01-29 Leybold Inficon, Inc. Gas partial pressure sensor for vacuum chamber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1132049A (fr) * 1954-05-26 1957-03-04 Thomson Houston Comp Francaise Dispositif d'introduction d'un échantillon dans un spectrographe de masse
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
FR1341917A (fr) * 1961-12-20 1963-11-02 Ass Elect Ind Dispositif d'introduction d'un échantillon de gaz dans un appareil d'analyse

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2789299A (en) * 1954-08-13 1957-04-23 Frank J Verderber Fountain squeegee
US3888107A (en) * 1969-10-08 1975-06-10 Dow Chemical Co Differential thermal analysis cell assembly

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2967239A (en) * 1954-02-19 1961-01-03 Gen Electric Method and apparatus for analyzing constituents of a substance
FR1132049A (fr) * 1954-05-26 1957-03-04 Thomson Houston Comp Francaise Dispositif d'introduction d'un échantillon dans un spectrographe de masse
FR1341917A (fr) * 1961-12-20 1963-11-02 Ass Elect Ind Dispositif d'introduction d'un échantillon de gaz dans un appareil d'analyse

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997049116A1 (fr) * 1996-06-19 1997-12-24 Micrion Corporation Systeme de distribution de gaz pour traitement par faisceau de particules
US5851413A (en) * 1996-06-19 1998-12-22 Micrion Corporation Gas delivery systems for particle beam processing
US7923702B2 (en) 2007-11-13 2011-04-12 Carl Zeiss Nts Gmbh System and method for processing an object
US8939108B2 (en) 2008-02-18 2015-01-27 Carl Zeiss Microscopy Gmbh Processing system

Also Published As

Publication number Publication date
US4197455A (en) 1980-04-08
JPS5476288A (en) 1979-06-18
FR2408909B1 (fr) 1980-11-28

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Legal Events

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ST Notification of lapse