FR2353649B3 - - Google Patents

Info

Publication number
FR2353649B3
FR2353649B3 FR7716889A FR7716889A FR2353649B3 FR 2353649 B3 FR2353649 B3 FR 2353649B3 FR 7716889 A FR7716889 A FR 7716889A FR 7716889 A FR7716889 A FR 7716889A FR 2353649 B3 FR2353649 B3 FR 2353649B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7716889A
Other languages
French (fr)
Other versions
FR2353649A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2353649A1 publication Critical patent/FR2353649A1/fr
Application granted granted Critical
Publication of FR2353649B3 publication Critical patent/FR2353649B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7716889A 1976-06-02 1977-06-02 Procede et dispositif pour le depot de couches regulieres sur des substrats surfaciques Granted FR2353649A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762624700 DE2624700A1 (de) 1976-06-02 1976-06-02 Verfahren und vorrichtung zum gleichfoermigen beschichten von flaechigen substraten

Publications (2)

Publication Number Publication Date
FR2353649A1 FR2353649A1 (fr) 1977-12-30
FR2353649B3 true FR2353649B3 (sv) 1980-07-18

Family

ID=5979603

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7716889A Granted FR2353649A1 (fr) 1976-06-02 1977-06-02 Procede et dispositif pour le depot de couches regulieres sur des substrats surfaciques

Country Status (5)

Country Link
CH (1) CH630417A5 (sv)
DE (1) DE2624700A1 (sv)
FR (1) FR2353649A1 (sv)
GB (1) GB1529418A (sv)
IT (1) IT1076194B (sv)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
ATE7431T1 (de) * 1980-02-07 1984-05-15 Matsushita Electric Industrial Co., Ltd. Verfahren zur bildung eines glaesernen abstandstuecks in der magnetspalte eines magnetkopfes.
ATE7714T1 (de) * 1980-07-01 1984-06-15 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Verfahren zur massenherstellung von legierungen und vorrichtung hierfuer.
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
GB2234988B (en) * 1989-08-16 1993-12-08 Qpl Limited Improvements in vacuum deposition machines
DE19643702B4 (de) * 1996-10-23 2007-11-29 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom
ATE497028T1 (de) * 2000-06-22 2011-02-15 Panasonic Elec Works Co Ltd Vorrichtung und verfahren zum vakuum-ausdampfen

Also Published As

Publication number Publication date
FR2353649A1 (fr) 1977-12-30
GB1529418A (en) 1978-10-18
CH630417A5 (en) 1982-06-15
IT1076194B (it) 1985-04-27
DE2624700A1 (de) 1977-12-15

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Legal Events

Date Code Title Description
ST Notification of lapse