FR2326030A1 - ELECTRONIC SCANNING MICROSCOPE FOR THE CONTROL OF OBJECT STRUCTURES - Google Patents

ELECTRONIC SCANNING MICROSCOPE FOR THE CONTROL OF OBJECT STRUCTURES

Info

Publication number
FR2326030A1
FR2326030A1 FR7628344A FR7628344A FR2326030A1 FR 2326030 A1 FR2326030 A1 FR 2326030A1 FR 7628344 A FR7628344 A FR 7628344A FR 7628344 A FR7628344 A FR 7628344A FR 2326030 A1 FR2326030 A1 FR 2326030A1
Authority
FR
France
Prior art keywords
control
scanning microscope
electronic scanning
object structures
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7628344A
Other languages
French (fr)
Other versions
FR2326030B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2326030A1 publication Critical patent/FR2326030A1/en
Application granted granted Critical
Publication of FR2326030B1 publication Critical patent/FR2326030B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7628344A 1975-09-24 1976-09-21 ELECTRONIC SCANNING MICROSCOPE FOR THE CONTROL OF OBJECT STRUCTURES Granted FR2326030A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18851275A DD124091A1 (en) 1975-09-24 1975-09-24

Publications (2)

Publication Number Publication Date
FR2326030A1 true FR2326030A1 (en) 1977-04-22
FR2326030B1 FR2326030B1 (en) 1982-03-19

Family

ID=5501778

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7628344A Granted FR2326030A1 (en) 1975-09-24 1976-09-21 ELECTRONIC SCANNING MICROSCOPE FOR THE CONTROL OF OBJECT STRUCTURES

Country Status (5)

Country Link
DD (1) DD124091A1 (en)
DE (1) DE2635356C2 (en)
FR (1) FR2326030A1 (en)
GB (1) GB1532862A (en)
SU (1) SU1191980A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110301A2 (en) * 1982-11-29 1984-06-13 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimension of secondary electron emission object
EP0176745A1 (en) * 1984-09-24 1986-04-09 Siemens Aktiengesellschaft Device and method to measure lengths in a scanning corpuscular microscope
EP0177566A1 (en) * 1984-03-20 1986-04-16 Nixon Larry Sheldon Method for precision sem measurements.

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device
DE3802598C1 (en) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0110301A2 (en) * 1982-11-29 1984-06-13 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimension of secondary electron emission object
EP0110301A3 (en) * 1982-11-29 1986-06-11 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimension of secondary electron emission object
EP0177566A1 (en) * 1984-03-20 1986-04-16 Nixon Larry Sheldon Method for precision sem measurements.
EP0177566A4 (en) * 1984-03-20 1987-03-26 Nixon Larry Sheldon Method for precision sem measurements.
EP0176745A1 (en) * 1984-09-24 1986-04-09 Siemens Aktiengesellschaft Device and method to measure lengths in a scanning corpuscular microscope

Also Published As

Publication number Publication date
DE2635356A1 (en) 1977-04-07
DD124091A1 (en) 1977-02-02
GB1532862A (en) 1978-11-22
FR2326030B1 (en) 1982-03-19
SU1191980A1 (en) 1985-11-15
DE2635356C2 (en) 1984-08-16

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Legal Events

Date Code Title Description
ST Notification of lapse