FR2309034A1 - Microscope electronique a balayage - Google Patents
Microscope electronique a balayageInfo
- Publication number
- FR2309034A1 FR2309034A1 FR7611920A FR7611920A FR2309034A1 FR 2309034 A1 FR2309034 A1 FR 2309034A1 FR 7611920 A FR7611920 A FR 7611920A FR 7611920 A FR7611920 A FR 7611920A FR 2309034 A1 FR2309034 A1 FR 2309034A1
- Authority
- FR
- France
- Prior art keywords
- scanning microscope
- electronique
- electronique scanning
- microscope
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4944175A JPS51124369A (en) | 1975-04-23 | 1975-04-23 | Field magnification varying device |
JP50118562A JPS5243355A (en) | 1975-10-01 | 1975-10-01 | Test data transfer device for electric particle line eqipment |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2309034A1 true FR2309034A1 (fr) | 1976-11-19 |
FR2309034B1 FR2309034B1 (fr) | 1979-06-01 |
Family
ID=26389836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7611920A Granted FR2309034A1 (fr) | 1975-04-23 | 1976-04-22 | Microscope electronique a balayage |
Country Status (3)
Country | Link |
---|---|
US (1) | US4020343A (fr) |
FR (1) | FR2309034A1 (fr) |
GB (1) | GB1560722A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2335945A1 (fr) * | 1975-12-19 | 1977-07-15 | Jeol Ltd | Dispositif electronique a balayage |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4543512A (en) * | 1980-10-15 | 1985-09-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Electron beam exposure system |
DE3235727A1 (de) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum hervorheben eines objektbereichs in einem rastermikroskop |
DE3538857A1 (de) * | 1985-11-02 | 1987-05-07 | Leybold Heraeus Gmbh & Co Kg | Einrichtung fuer die eingabe eines sollwerts fuer den auftreffpunkt eines elektronenstrahls auf ein medium |
JPH0487148A (ja) * | 1990-07-26 | 1992-03-19 | Shimadzu Corp | 試料移動経路指定自動分析装置 |
US5477049A (en) * | 1994-01-21 | 1995-12-19 | Seiko Instruments Inc. | Particle analysis method |
US5834774A (en) * | 1996-07-24 | 1998-11-10 | Jeol Ltd. | Scanning electron microscope |
JPH1097836A (ja) * | 1996-09-24 | 1998-04-14 | Hitachi Keisokki Service Kk | 走査形電子顕微鏡 |
US6727911B1 (en) * | 1999-04-28 | 2004-04-27 | Jeol Ltd. | Method and apparatus for observing specimen image on scanning charged-particle beam instrument |
US7940972B2 (en) * | 2007-05-16 | 2011-05-10 | General Electric Company | System and method of extended field of view image acquisition of an imaged subject |
US8442292B2 (en) * | 2008-07-01 | 2013-05-14 | Hitachi Medical Corporation | X-ray CT apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3229087A (en) * | 1961-09-25 | 1966-01-11 | First Pennsylvania Banking And | Electron microanalyzer and monitoring system |
GB1126368A (en) * | 1965-12-11 | 1968-09-05 | Ti Group Services Ltd | Method of calibrating scanning micro-analysers, and apparatus therefor |
US3795808A (en) * | 1971-05-18 | 1974-03-05 | P Knights | Electron microscopes |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2302004A5 (fr) * | 1973-08-31 | 1976-09-17 | Thomson Csf | Systeme de poursuite automatique d'une cible, procedant par analyse de contraste video |
-
1976
- 1976-04-09 GB GB14694/76A patent/GB1560722A/en not_active Expired
- 1976-04-21 US US05/678,770 patent/US4020343A/en not_active Expired - Lifetime
- 1976-04-22 FR FR7611920A patent/FR2309034A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3229087A (en) * | 1961-09-25 | 1966-01-11 | First Pennsylvania Banking And | Electron microanalyzer and monitoring system |
GB1126368A (en) * | 1965-12-11 | 1968-09-05 | Ti Group Services Ltd | Method of calibrating scanning micro-analysers, and apparatus therefor |
US3795808A (en) * | 1971-05-18 | 1974-03-05 | P Knights | Electron microscopes |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2335945A1 (fr) * | 1975-12-19 | 1977-07-15 | Jeol Ltd | Dispositif electronique a balayage |
Also Published As
Publication number | Publication date |
---|---|
FR2309034B1 (fr) | 1979-06-01 |
US4020343A (en) | 1977-04-26 |
GB1560722A (en) | 1980-02-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |