FR2297452A1 - Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control - Google Patents

Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control

Info

Publication number
FR2297452A1
FR2297452A1 FR7500422A FR7500422A FR2297452A1 FR 2297452 A1 FR2297452 A1 FR 2297452A1 FR 7500422 A FR7500422 A FR 7500422A FR 7500422 A FR7500422 A FR 7500422A FR 2297452 A1 FR2297452 A1 FR 2297452A1
Authority
FR
France
Prior art keywords
target
oscilloscope
electron beam
current
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7500422A
Other languages
French (fr)
Other versions
FR2297452B1 (en
Inventor
Michel Bruel
Jean-Francois Michaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7500422A priority Critical patent/FR2297452A1/en
Publication of FR2297452A1 publication Critical patent/FR2297452A1/en
Application granted granted Critical
Publication of FR2297452B1 publication Critical patent/FR2297452B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The scanned target is surrounded by an auxiliary electrode that collects electrons that pass the target. The position of impact is shown on an oscilloscope with X and Y coordinates. The oscilloscope includes a Wehnelt electrode modulating the intensity of the electron beam, and supplied by a voltage which is a function of the current on the target due to the electron flux. A summator adds the currents (Ia) and (Ib) produced by the beam impinging on the target and surrounding electrode respectively. The target current (Ia) is compared with a reference current, and an analog gate is connected to the outputs of the comparator and summator to give an output signal I't = (Ia + Ib)Y(Ia-epsilon), that is transmitted to the Wehnelt electrode via an amplifier, differentiating between direct input I't and inverse input It=Ia + Ib obtained from an integrator. The anode of the oscilloscope is connected to an amplifier and voltage divider in series, which release a voltage proportional to the acceleration voltage of the electrons. Amplifiers are to take the current signals of the oscilloscope and control the electron beam deflecting plates. Used for the sepn. of isotopes, ionic implantation, irradiation, ionic machine finishing, etc.
FR7500422A 1975-01-08 1975-01-08 Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control Granted FR2297452A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7500422A FR2297452A1 (en) 1975-01-08 1975-01-08 Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7500422A FR2297452A1 (en) 1975-01-08 1975-01-08 Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control

Publications (2)

Publication Number Publication Date
FR2297452A1 true FR2297452A1 (en) 1976-08-06
FR2297452B1 FR2297452B1 (en) 1978-07-13

Family

ID=9149510

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7500422A Granted FR2297452A1 (en) 1975-01-08 1975-01-08 Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control

Country Status (1)

Country Link
FR (1) FR2297452A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2425720A1 (en) * 1978-05-12 1979-12-07 Philips Nv DEVICE FOR DIRECTING ELECTRICALLY CHARGED PARTICLES TO A TARGET

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2220871A1 (en) * 1973-07-27 1974-10-04 Jeol Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2220871A1 (en) * 1973-07-27 1974-10-04 Jeol Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2425720A1 (en) * 1978-05-12 1979-12-07 Philips Nv DEVICE FOR DIRECTING ELECTRICALLY CHARGED PARTICLES TO A TARGET

Also Published As

Publication number Publication date
FR2297452B1 (en) 1978-07-13

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Legal Events

Date Code Title Description
ST Notification of lapse