FR2297452A1 - Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control - Google Patents
Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction controlInfo
- Publication number
- FR2297452A1 FR2297452A1 FR7500422A FR7500422A FR2297452A1 FR 2297452 A1 FR2297452 A1 FR 2297452A1 FR 7500422 A FR7500422 A FR 7500422A FR 7500422 A FR7500422 A FR 7500422A FR 2297452 A1 FR2297452 A1 FR 2297452A1
- Authority
- FR
- France
- Prior art keywords
- target
- oscilloscope
- electron beam
- current
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The scanned target is surrounded by an auxiliary electrode that collects electrons that pass the target. The position of impact is shown on an oscilloscope with X and Y coordinates. The oscilloscope includes a Wehnelt electrode modulating the intensity of the electron beam, and supplied by a voltage which is a function of the current on the target due to the electron flux. A summator adds the currents (Ia) and (Ib) produced by the beam impinging on the target and surrounding electrode respectively. The target current (Ia) is compared with a reference current, and an analog gate is connected to the outputs of the comparator and summator to give an output signal I't = (Ia + Ib)Y(Ia-epsilon), that is transmitted to the Wehnelt electrode via an amplifier, differentiating between direct input I't and inverse input It=Ia + Ib obtained from an integrator. The anode of the oscilloscope is connected to an amplifier and voltage divider in series, which release a voltage proportional to the acceleration voltage of the electrons. Amplifiers are to take the current signals of the oscilloscope and control the electron beam deflecting plates. Used for the sepn. of isotopes, ionic implantation, irradiation, ionic machine finishing, etc.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7500422A FR2297452A1 (en) | 1975-01-08 | 1975-01-08 | Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7500422A FR2297452A1 (en) | 1975-01-08 | 1975-01-08 | Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2297452A1 true FR2297452A1 (en) | 1976-08-06 |
FR2297452B1 FR2297452B1 (en) | 1978-07-13 |
Family
ID=9149510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7500422A Granted FR2297452A1 (en) | 1975-01-08 | 1975-01-08 | Electron beam target scanning control - converts intensity of beam on target to current signal displayed on oscilloscope for beam direction control |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2297452A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2425720A1 (en) * | 1978-05-12 | 1979-12-07 | Philips Nv | DEVICE FOR DIRECTING ELECTRICALLY CHARGED PARTICLES TO A TARGET |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2220871A1 (en) * | 1973-07-27 | 1974-10-04 | Jeol Ltd |
-
1975
- 1975-01-08 FR FR7500422A patent/FR2297452A1/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2220871A1 (en) * | 1973-07-27 | 1974-10-04 | Jeol Ltd |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2425720A1 (en) * | 1978-05-12 | 1979-12-07 | Philips Nv | DEVICE FOR DIRECTING ELECTRICALLY CHARGED PARTICLES TO A TARGET |
Also Published As
Publication number | Publication date |
---|---|
FR2297452B1 (en) | 1978-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |