FR2279002B1 - - Google Patents

Info

Publication number
FR2279002B1
FR2279002B1 FR7521842A FR7521842A FR2279002B1 FR 2279002 B1 FR2279002 B1 FR 2279002B1 FR 7521842 A FR7521842 A FR 7521842A FR 7521842 A FR7521842 A FR 7521842A FR 2279002 B1 FR2279002 B1 FR 2279002B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7521842A
Other versions
FR2279002A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Group AG
Original Assignee
VAT AG fuer Vakuum Apparate Technik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT AG fuer Vakuum Apparate Technik filed Critical VAT AG fuer Vakuum Apparate Technik
Publication of FR2279002A1 publication Critical patent/FR2279002A1/fr
Application granted granted Critical
Publication of FR2279002B1 publication Critical patent/FR2279002B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
FR7521842A 1974-07-15 1975-07-11 Dispositif coulissant pour la fermeture etanche aux gaz et au vide d'un orifice d'enceinte ou de conduite Granted FR2279002A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH973874A CH582842A5 (fr) 1974-07-15 1974-07-15

Publications (2)

Publication Number Publication Date
FR2279002A1 FR2279002A1 (fr) 1976-02-13
FR2279002B1 true FR2279002B1 (fr) 1977-12-09

Family

ID=4355128

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7521842A Granted FR2279002A1 (fr) 1974-07-15 1975-07-11 Dispositif coulissant pour la fermeture etanche aux gaz et au vide d'un orifice d'enceinte ou de conduite

Country Status (3)

Country Link
US (1) US4052036A (fr)
CH (1) CH582842A5 (fr)
FR (1) FR2279002A1 (fr)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1121094A (fr) * 1977-10-04 1982-03-30 Walter Brodowski Chelates de zinc et de copolyhydrazides terephtaloyl-terephtal/oxaliques
US4238111A (en) * 1978-08-04 1980-12-09 Torr Vacuum Products, Inc. Gate valve for use with vacuum equipment
US4301993A (en) * 1979-10-09 1981-11-24 Consolidated Controls Corporation Gate valve
US4495966A (en) * 1982-05-24 1985-01-29 Electron Beam Corporation Separable high vacuum valve
HU186643B (en) * 1982-12-01 1985-08-28 Alfoeldi Koeolajipari Gepgyar Closing-sealing device for gate valves
CH672355A5 (fr) * 1986-12-18 1989-11-15 Cetec Ag
FR2648533B1 (fr) * 1989-06-14 1991-09-06 Coureau Ets Jc Dispositif de commande de vanne et vanne comportant un tel dispositif de commande
US5285998A (en) * 1990-10-09 1994-02-15 Montana Sulphur & Chemical Co. Internal valve for pressure fluid containment vessels
US5228473A (en) * 1990-10-09 1993-07-20 Montana Sulphur & Chemical Co. Internal safety valve system
US5220943A (en) * 1990-10-09 1993-06-22 Montana Sulphur & Chemical Co. Internal pump assembly
US5238022A (en) * 1990-10-09 1993-08-24 Montana Sulphur & Chemical Co. Internal rotary valve actuator system
US5118078A (en) * 1991-05-16 1992-06-02 Tylan General, Inc. Butterfly valve having improved sealing characteristics
US5135032A (en) * 1991-08-14 1992-08-04 Foster Valve Corporation Slurry gate valve
US5379983A (en) * 1993-12-21 1995-01-10 Vat Holding Ag Shut-off valves for pipelines
US6215897B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
US6079693A (en) 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6328051B1 (en) 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly
US6409149B1 (en) 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
US7004453B1 (en) 2001-04-25 2006-02-28 Mykrolis Corporation Pendulum valve with a full range of position control
US6612546B2 (en) * 2001-08-01 2003-09-02 Varian, Inc. Gate valve with delayed retraction of counter plate
US6883776B2 (en) 2002-08-20 2005-04-26 Asm America, Inc. Slit valve for a semiconductor processing system
JP2006526125A (ja) * 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド 処理チャンバの開口を封止するための方法および装置
US7090192B2 (en) * 2003-10-21 2006-08-15 Vay Holding Ag Vacuum valve
US7036794B2 (en) * 2004-08-13 2006-05-02 Vat Holding Ag Method for control of a vacuum valve arranged between two vacuum chambers
DE102005004987B8 (de) 2005-02-02 2017-12-14 Vat Holding Ag Vakuumventil
DE102007034927A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
DE102007034926A1 (de) 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
CN102138033B (zh) * 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
JP2011054928A (ja) * 2009-08-04 2011-03-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
JP5337185B2 (ja) * 2011-03-11 2013-11-06 株式会社東芝 圧力制御装置
US9357589B2 (en) 2012-03-14 2016-05-31 Microwave Materials Technologies, Inc. Commercial scale microwave heating system
EP2740979A1 (fr) 2012-12-05 2014-06-11 VAT Holding AG Soupape à vide
EP2876341B1 (fr) 2013-11-21 2015-10-21 VAT Holding AG Procédé de fonctionnement d'une soupape
EP3043093B1 (fr) * 2015-01-07 2017-05-17 King Lai Hygienic Materials Co., Ltd. Soupape d'étanchéité double
US9638335B2 (en) * 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
US9470319B2 (en) * 2015-01-26 2016-10-18 King Lai Hygienic Materials Co., Ltd. Gate valve with linkage structure
CN106286874A (zh) * 2015-05-25 2017-01-04 北京实力源科技开发有限责任公司 一种插板阀
WO2016206966A1 (fr) 2015-06-22 2016-12-29 Vat Holding Ag Dispositif de commande pour une unité piston-cylindre pneumatique servant à déplacer un organe de fermeture d'une soupape à vide
KR102564611B1 (ko) 2015-08-28 2023-08-07 배트 홀딩 아게 진공밸브
KR101784839B1 (ko) * 2015-09-25 2017-11-06 프리시스 주식회사 양방향 게이트밸브
CN106090273B (zh) * 2016-06-20 2018-08-17 中一节能耐磨技术宜兴有限公司 一种陶瓷双闸板进料阀
EP3372883B1 (fr) * 2017-03-09 2019-12-11 VAT Holding AG Vanne de contrôle de vide comprenant un capteur optique
AU2018236340A1 (en) 2017-03-15 2019-10-03 915 Labs, Inc. Multi-pass microwave heating system
CA3056607A1 (fr) 2017-03-15 2018-09-20 915 Labs, LLC Elements de regulation d'energie de chauffage par micro-ondes ameliore d'articles emballes
MX2019011675A (es) 2017-04-17 2019-11-01 915 Labs Llc Sistema de pasteurizacion y esterilizacion asistido por microondas usando configuraciones sinergisticas de envasado, transportador y lanzador.
EP3421852A1 (fr) * 2017-06-30 2019-01-02 VAT Holding AG Soupape à vide dotée d'un capteur inertiel
CN107677520B (zh) * 2017-11-21 2023-10-20 中国石油大学(北京) 一种天然气样品采集装置及采集方法
US20190178390A1 (en) * 2017-12-07 2019-06-13 King Lai Hygienic Materials Co., Ltd Spring free gate valve
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
DE102019129344A1 (de) * 2019-10-30 2021-05-06 Vat Holding Ag Vakuumventil
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
GB2591814A (en) * 2020-02-10 2021-08-11 Edwards Vacuum Llc Housing for a vacuum pump
JP2023058273A (ja) * 2021-10-13 2023-04-25 Smc株式会社 ゲートバルブ
TWI835047B (zh) * 2022-01-05 2024-03-11 新萊應材科技有限公司 利用彈力啟閉之閘閥

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2789582A (en) * 1954-07-13 1957-04-23 Clinton H Dunham Expansible spectacle line-blind
US2986371A (en) * 1958-08-11 1961-05-30 Hydril Co Gate type valve
US3237916A (en) * 1963-10-02 1966-03-01 Grove Valve & Regulator Co Disc valve
GB1089272A (en) * 1964-06-08 1967-11-01 Edwards High Vacuum Int Ltd Improvements in or relating to gate valves
DE1945901A1 (de) * 1969-02-21 1970-09-10 Siegfried Schertler Absperrschieber,insbesondere fuer Gas- und Vakuumleitungen

Also Published As

Publication number Publication date
FR2279002A1 (fr) 1976-02-13
DE2528043A1 (de) 1976-01-29
CH582842A5 (fr) 1976-12-15
DE2528043B2 (de) 1977-05-18
US4052036A (en) 1977-10-04

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Legal Events

Date Code Title Description
ST Notification of lapse