FR2274073A1 - Procede de positionnement automatique des surfaces d'image et/ou d'objet dans les copieurs optiques - Google Patents

Procede de positionnement automatique des surfaces d'image et/ou d'objet dans les copieurs optiques

Info

Publication number: FR2274073A1
Authority: FR; France
Prior art keywords: positioning image; object surfaces; automatically positioning; optical copiers; copiers
Prior art date: 1974-06-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

FR7514031A

Other languages

English (en)

French (fr)

Other versions

FR2274073B1 (ja

Inventor

Hans-Erdmann Korth

Albert Frosch

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-06-06

Filing date

1975-04-29

Publication date

1976-01-02

1974-06-06 Priority claimed from DE19742427323 external-priority patent/DE2427323C2/de

1975-04-29 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

1976-01-02 Publication of FR2274073A1 publication Critical patent/FR2274073A1/fr

1977-07-08 Application granted granted Critical

1977-07-08 Publication of FR2274073B1 publication Critical patent/FR2274073B1/fr

Status Granted legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Focusing (AREA)
Projection-Type Copiers In General (AREA)
Automatic Focus Adjustment (AREA)

FR7514031A 1974-06-06 1975-04-29 Procede de positionnement automatique des surfaces d'image et/ou d'objet dans les copieurs optiques Granted FR2274073A1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE19742427323 DE2427323C2 (de)		1974-06-06	Verfahren zur automatischen Positionierung der Bild- und/oder Objektflächen bei optischen Kopiervorrichtungen

Publications (2)

Publication Number	Publication Date
FR2274073A1 true FR2274073A1 (fr)	1976-01-02
FR2274073B1 FR2274073B1 (ja)	1977-07-08

Family

ID=5917467

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR7514031A Granted FR2274073A1 (fr)	1974-06-06	1975-04-29	Procede de positionnement automatique des surfaces d'image et/ou d'objet dans les copieurs optiques

Country Status (5)

Country	Link
JP (1)	JPS5925212B2 (ja)
CA (1)	CA1032382A (ja)
FR (1)	FR2274073A1 (ja)
GB (1)	GB1501908A (ja)
IT (1)	IT1037606B (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2447050A1 (fr) *	1978-10-19	1980-08-14	Censor Patent Versuch	Dispositif pour projeter l'image d'un masque sur un substrat
EP0015789A1 (fr) *	1979-02-27	1980-09-17	Thomson-Csf	Dispositif optique de projection en photorépétition
EP0017044A2 (en) *	1979-04-02	1980-10-15	Eaton-Optimetrix Inc.	A system for positioning a utilization device
EP0019721A1 (de) *	1979-05-30	1980-12-10	International Business Machines Corporation	Optische Projektionseinrichtung zum Ausrichten eines Projektionsbildes auf einer Oberfläche
US4540278A (en) *	1979-04-02	1985-09-10	Optimetrix Corporation	Optical focusing system
EP0341983A2 (en) *	1988-05-10	1989-11-15	Canon Kabushiki Kaisha	Exposure system
US5276725A (en) *	1988-05-10	1994-01-04	Canon Kabushiki Kaisha	Exposure system

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS607764B2 (ja) *	1976-04-28	1985-02-27	キヤノン株式会社	走査型光検出装置
JPS53135653A (en) *	1977-05-01	1978-11-27	Canon Inc	Photoelectric detecting optical device
JPS5532662A (en) *	1978-08-30	1980-03-07	Bando Chem Ind Ltd	Stamp compound
JPS5817446A (ja) *	1981-07-24	1983-02-01	Hitachi Ltd	投影露光方法および装置
JPS59100406A (ja) *	1982-11-30	1984-06-09	Asahi Optical Co Ltd	顕微鏡系における自動合焦装置
JPS6021051A (ja) *	1983-07-14	1985-02-02	Nippon Telegr & Teleph Corp <Ntt>	レンズ投影露光方法及び装置
JPS6174338A (ja) *	1984-09-20	1986-04-16	Hitachi Ltd	縮小投影露光装置およびその方法
JPS61221716A (ja) *	1985-01-22	1986-10-02	ケイエルエイ・インストラメンツ・コ−ポレ−シヨン	顕微鏡を用いる光学的検査装置の自動焦点装置
JP2622841B2 (ja) *	1987-09-24	1997-06-25	旭光学工業株式会社	露光装置
JP2501053B2 (ja) *	1991-10-04	1996-05-29	株式会社日立製作所	紫外パルスレ―ザによる投影式露光方法
JPH0712019B2 (ja) *	1992-03-13	1995-02-08	株式会社日立製作所	投影露光方法及び投影露光装置
JP2530423B2 (ja) *	1994-04-22	1996-09-04	株式会社日立製作所	パタ−ン刻印装置
GB2414294B (en)	2004-05-20	2006-08-02	Teraview Ltd	Apparatus and method for investigating a sample
CN109947140B (zh) *	2019-04-03	2023-08-22	辽宁科技大学	一种5自由度激光准直微调装置及其调节方法

1975
- 1975-04-24 IT IT2270575A patent/IT1037606B/it active
- 1975-04-29 FR FR7514031A patent/FR2274073A1/fr active Granted
- 1975-05-07 GB GB1908675A patent/GB1501908A/en not_active Expired
- 1975-05-21 CA CA227,456A patent/CA1032382A/en not_active Expired
- 1975-06-04 JP JP50066647A patent/JPS5925212B2/ja not_active Expired

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2447050A1 (fr) *	1978-10-19	1980-08-14	Censor Patent Versuch	Dispositif pour projeter l'image d'un masque sur un substrat
EP0015789A1 (fr) *	1979-02-27	1980-09-17	Thomson-Csf	Dispositif optique de projection en photorépétition
FR2450470A1 (fr) *	1979-02-27	1980-09-26	Thomson Csf	Systeme optique de projection en photorepetition
EP0017044A2 (en) *	1979-04-02	1980-10-15	Eaton-Optimetrix Inc.	A system for positioning a utilization device
EP0017044A3 (en) *	1979-04-02	1980-12-10	Optimetrix Corporation	Optical focusing system
US4540278A (en) *	1979-04-02	1985-09-10	Optimetrix Corporation	Optical focusing system
EP0019721A1 (de) *	1979-05-30	1980-12-10	International Business Machines Corporation	Optische Projektionseinrichtung zum Ausrichten eines Projektionsbildes auf einer Oberfläche
EP0341983A2 (en) *	1988-05-10	1989-11-15	Canon Kabushiki Kaisha	Exposure system
EP0341983A3 (en) *	1988-05-10	1990-06-13	Canon Kabushiki Kaisha	Exposure system
US5276725A (en) *	1988-05-10	1994-01-04	Canon Kabushiki Kaisha	Exposure system

Also Published As

Publication number	Publication date
FR2274073B1 (ja)	1977-07-08
DE2427323B1 (de)	1975-09-25
JPS516565A (ja)	1976-01-20
CA1032382A (en)	1978-06-06
GB1501908A (en)	1978-02-22
DE2427323A1 (ja)	1975-09-25
JPS5925212B2 (ja)	1984-06-15
IT1037606B (it)	1979-11-20

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FR2274073A1 (fr)	1976-01-02	Procede de positionnement automatique des surfaces d'image et/ou d'objet dans les copieurs optiques
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IT1118412B (it)	1986-03-03	Procedimento per l analisi di immagini in movimento
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Legal Events

Date	Code	Title	Description
1987-02-27	ST	Notification of lapse