FR2256526A1 - - Google Patents

Info

Publication number: FR2256526A1
Authority: FR; France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

FR7441919A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

International Business Machines Corp

Original Assignee

International Business Machines Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-12-28

Filing date

1974-11-26

Publication date

1975-07-25

1974-11-26 Application filed by International Business Machines Corp filed Critical International Business Machines Corp

1975-07-25 Publication of FR2256526A1 publication Critical patent/FR2256526A1/fr

Status Withdrawn legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)

FR7441919A 1973-12-28 1974-11-26 Withdrawn FR2256526A1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US429410A US3930181A (en)	1973-12-28	1973-12-28	Lens and deflection unit arrangement for electron beam columns

Publications (1)

Publication Number	Publication Date
FR2256526A1 true FR2256526A1 (fr)	1975-07-25

Family

ID=23703121

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR7441919A Withdrawn FR2256526A1 (fr)	1973-12-28	1974-11-26

Country Status (6)

Country	Link
US (1)	US3930181A (fr)
JP (1)	JPS5099464A (fr)
CA (1)	CA1024667A (fr)
DE (1)	DE2449000A1 (fr)
FR (1)	FR2256526A1 (fr)
IT (1)	IT1026651B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2507816A1 (fr) *	1981-06-15	1982-12-17	Nippon Telegraph & Telephone	Systeme deflecteur de focalisation pour faisceau de particules chargees

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2386109A1 (fr) *	1977-04-01	1978-10-27	Cgr Mev	Tete d'irradiation a rayons g pour une irradiation panoramique et generateur de rayons g comportant une telle tete d'irradiation
US4475044A (en) *	1979-04-23	1984-10-02	Hitachi, Ltd.	Apparatus for focus-deflecting a charged particle beam
JPS5760647A (en) *	1980-09-26	1982-04-12	Jeol Ltd	Magnetic field intensity control method
US4376249A (en) *	1980-11-06	1983-03-08	International Business Machines Corporation	Variable axis electron beam projection system
US4395691A (en) *	1982-03-04	1983-07-26	Hughes Aircraft Company	Beam deflection system
US4544846A (en) *	1983-06-28	1985-10-01	International Business Machines Corporation	Variable axis immersion lens electron beam projection system
DE3521464A1 (de) *	1985-06-14	1986-12-18	Siemens AG, 1000 Berlin und 8000 München	Spektrometer-objektiv fuer die elektronenstrahl-messtechnik
EP0236807A3 (fr) *	1986-03-07	1990-05-16	Siemens Aktiengesellschaft	Objectif de spectromètre en technique de mesure par faisceau corpusculaire
US6090528A (en) *	1999-10-27	2000-07-18	Gordon; Michael S.	Spot-to-spot stitching in electron beam lithography utilizing square aperture with serrated edge
KR100489911B1 (ko) *	1999-12-14	2005-05-17	어플라이드 머티어리얼스, 인코포레이티드	하전 입자 빔을 사용하여 표본을 검사하는 방법 및 시스템
US7800062B2 (en) *	2002-06-11	2010-09-21	Applied Materials, Inc.	Method and system for the examination of specimen
US7528614B2 (en)	2004-12-22	2009-05-05	Applied Materials, Inc.	Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
US8461526B2 (en)	2010-12-01	2013-06-11	Kla-Tencor Corporation	Electron beam column and methods of using same
US8362425B2 (en)	2011-03-23	2013-01-29	Kla-Tencor Corporation	Multiple-beam system for high-speed electron-beam inspection
US8664594B1 (en)	2011-04-18	2014-03-04	Kla-Tencor Corporation	Electron-optical system for high-speed and high-sensitivity inspections
US9848778B2 (en)	2011-04-29	2017-12-26	Medtronic, Inc.	Method and device to monitor patients with kidney disease
US9561316B2 (en)	2011-04-29	2017-02-07	Medtronic, Inc.	Intersession monitoring for blood fluid removal therapy
JP6002428B2 (ja) *	2012-04-24	2016-10-05	株式会社日立ハイテクノロジーズ	荷電粒子線装置
US9623164B2 (en)	2013-02-01	2017-04-18	Medtronic, Inc.	Systems and methods for multifunctional volumetric fluid control
US10543052B2 (en)	2013-02-01	2020-01-28	Medtronic, Inc.	Portable dialysis cabinet
US10010663B2 (en)	2013-02-01	2018-07-03	Medtronic, Inc.	Fluid circuit for delivery of renal replacement therapies
US9884145B2 (en)	2013-11-26	2018-02-06	Medtronic, Inc.	Parallel modules for in-line recharging of sorbents using alternate duty cycles
US9713665B2 (en)	2014-12-10	2017-07-25	Medtronic, Inc.	Degassing system for dialysis

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2803770A (en) *	1950-09-18	1957-08-20	Fernseh Gmbh	Electron discharge tube apparatus
BE620211A (fr) *	1961-08-23
US3158774A (en) *	1962-06-08	1964-11-24	Joel F Fleming	Image orthicon focusing coil and field flaring ring
GB1044090A (en) *	1963-12-06	1966-09-28	Tokyo Shibaura Electric Co	Television pickup tubes and methods of operating the same
US3471741A (en) *	1967-04-07	1969-10-07	Rca Corp	Television camera including an image isocon tube
GB1188417A (en) *	1968-04-03	1970-04-15	John Robert Garrood	Electron Beam Apparatus
US3714422A (en) *	1970-04-06	1973-01-30	Hitachi Ltd	Scanning stereoscopic electron microscope
US3801784A (en) *	1972-04-14	1974-04-02	Research Corp	Scanning electron microscope operating in area scan and angle scan modes

1973
- 1973-12-28 US US429410A patent/US3930181A/en not_active Expired - Lifetime
1974
- 1974-10-15 DE DE19742449000 patent/DE2449000A1/de active Pending
- 1974-11-07 CA CA213,224A patent/CA1024667A/fr not_active Expired
- 1974-11-26 FR FR7441919A patent/FR2256526A1/fr not_active Withdrawn
- 1974-11-29 IT IT29998/74A patent/IT1026651B/it active
- 1974-12-03 JP JP49137809A patent/JPS5099464A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2507816A1 (fr) *	1981-06-15	1982-12-17	Nippon Telegraph & Telephone	Systeme deflecteur de focalisation pour faisceau de particules chargees

Also Published As

Publication number	Publication date
CA1024667A (fr)	1978-01-17
IT1026651B (it)	1978-10-20
JPS5099464A (fr)	1975-08-07
US3930181A (en)	1975-12-30
DE2449000A1 (de)	1975-07-03

Legal Events

Date	Code	Title	Description
1977-01-07	ST	Notification of lapse

Publication	Publication Date	Title
AR201758A1 (fr)	1975-04-15
AU476761B2 (fr)	1976-09-30
AU465372B2 (fr)	1975-09-25
AR201235Q (fr)	1975-02-21
AR201231Q (fr)	1975-02-21
AU474593B2 (fr)	1976-07-29
AU474838B2 (fr)	1976-08-05
AU465453B2 (fr)	1975-09-25
AU465434B2 (fr)	1975-09-25
AU471343B2 (fr)	1976-04-15
AU450229B2 (fr)	1974-07-04
AR201229Q (fr)	1975-02-21
AU466283B2 (fr)	1975-10-23
AR199451A1 (fr)	1974-08-30
AU477823B2 (fr)	1975-06-19
AU471461B2 (fr)	1976-04-29
AR193950A1 (fr)	1973-05-31
AR200256A1 (fr)	1974-10-31
AU476873B1 (fr)	1975-01-09
AU461342B2 (fr)	1975-05-22
AR201432A1 (fr)	1975-03-14
AR210729A1 (fr)	1977-09-15
AR200885A1 (fr)	1974-12-27
AU477824B2 (fr)	1975-07-17
AU1891376A (fr)	1977-01-20

FR2256526A1 - - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (1)

Publications (1)

Family

ID=23703121

Family Applications (1)

Country Status (6)

Cited By (1)

Families Citing this family (23)

Family Cites Families (8)

Cited By (1)

Also Published As

Similar Documents

Legal Events