FR2245937A1 - Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width - Google Patents

Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width

Info

Publication number
FR2245937A1
FR2245937A1 FR7335044A FR7335044A FR2245937A1 FR 2245937 A1 FR2245937 A1 FR 2245937A1 FR 7335044 A FR7335044 A FR 7335044A FR 7335044 A FR7335044 A FR 7335044A FR 2245937 A1 FR2245937 A1 FR 2245937A1
Authority
FR
France
Prior art keywords
spectroscope
electron beam
luminescent materials
study
involves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7335044A
Other languages
French (fr)
Other versions
FR2245937B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEAUVINEAU JACKY FR
Original Assignee
BEAUVINEAU JACKY FR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEAUVINEAU JACKY FR filed Critical BEAUVINEAU JACKY FR
Priority to FR7335044A priority Critical patent/FR2245937A1/en
Publication of FR2245937A1 publication Critical patent/FR2245937A1/en
Application granted granted Critical
Publication of FR2245937B1 publication Critical patent/FR2245937B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Abstract

Luminescent materials are studied by the observation of the light emitted when they are excited by an electron beam. A spectroscope is inserted between the sample and the photomultiplier tube and is operated to obtain optimum quality of image for the wavebands of interest. A sample (E) is set at an angle such that the telescope (10) receives the maximum energy from the source. A cylindrical light beam of reduced cross section is obtained at the output doublet (13). This beam is directed onto a dispersive glass prism (21) with minimum deviation for the sodium D radiation and then onto an achromatic condenser (31, 32). A slit (41) with adjustable level and opening selects the spectral region and intensity for the photomultiplier (PM).
FR7335044A 1973-10-01 1973-10-01 Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width Granted FR2245937A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7335044A FR2245937A1 (en) 1973-10-01 1973-10-01 Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7335044A FR2245937A1 (en) 1973-10-01 1973-10-01 Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width

Publications (2)

Publication Number Publication Date
FR2245937A1 true FR2245937A1 (en) 1975-04-25
FR2245937B1 FR2245937B1 (en) 1979-03-23

Family

ID=9125760

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7335044A Granted FR2245937A1 (en) 1973-10-01 1973-10-01 Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width

Country Status (1)

Country Link
FR (1) FR2245937A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2485189A1 (en) * 1980-06-19 1981-12-24 Beauvineau Jacky OPTICAL SPECTROSCOPE WITH NETWORKS AND MIRRORS FOR ELECTRONIC MICROSCOPE WITH BALANCE
FR2806527A1 (en) * 2000-03-20 2001-09-21 Schlumberger Technologies Inc SIMULTANEOUS FOCUSING COLUMN OF PARTICLE BEAM AND OPTICAL BEAM
CN102062637A (en) * 2010-12-22 2011-05-18 中国科学院长春光学精密机械与物理研究所 Support mechanism for multi-side cylindrical achromatic prism

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2485189A1 (en) * 1980-06-19 1981-12-24 Beauvineau Jacky OPTICAL SPECTROSCOPE WITH NETWORKS AND MIRRORS FOR ELECTRONIC MICROSCOPE WITH BALANCE
US4410272A (en) * 1980-06-19 1983-10-18 Jacky Beauvineau Optical spectroscope for scanning electron microscope
FR2806527A1 (en) * 2000-03-20 2001-09-21 Schlumberger Technologies Inc SIMULTANEOUS FOCUSING COLUMN OF PARTICLE BEAM AND OPTICAL BEAM
WO2001071766A1 (en) * 2000-03-20 2001-09-27 Schlumberger Technologies, Inc. Column simultaneously focusing a particle beam and an optical beam
US7045791B2 (en) * 2000-03-20 2006-05-16 Credence Systems Corporation Column simultaneously focusing a partilce beam and an optical beam
US7297948B2 (en) 2000-03-20 2007-11-20 Credence Systems Corporation Column simultaneously focusing a particle beam and an optical beam
CN102062637A (en) * 2010-12-22 2011-05-18 中国科学院长春光学精密机械与物理研究所 Support mechanism for multi-side cylindrical achromatic prism
CN102062637B (en) * 2010-12-22 2013-08-21 中国科学院长春光学精密机械与物理研究所 Support mechanism for multi-side cylindrical achromatic prism

Also Published As

Publication number Publication date
FR2245937B1 (en) 1979-03-23

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