FR2101061B2 - - Google Patents
Info
- Publication number
- FR2101061B2 FR2101061B2 FR7030040A FR7030040A FR2101061B2 FR 2101061 B2 FR2101061 B2 FR 2101061B2 FR 7030040 A FR7030040 A FR 7030040A FR 7030040 A FR7030040 A FR 7030040A FR 2101061 B2 FR2101061 B2 FR 2101061B2
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7030040A FR2101061B2 (de) | 1970-08-14 | 1970-08-14 | |
DE19712134144 DE2134144A1 (de) | 1970-07-09 | 1971-07-08 | Opto-elektrisches Schreibsystem zur Herstellung von Mikroschaltungen |
US00160725A US3732796A (en) | 1970-07-09 | 1971-07-08 | Line tracing systems using laser energy for exposing photo-sensitive substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7030040A FR2101061B2 (de) | 1970-08-14 | 1970-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2101061A2 FR2101061A2 (de) | 1972-03-31 |
FR2101061B2 true FR2101061B2 (de) | 1973-11-23 |
Family
ID=9060237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7030040A Expired FR2101061B2 (de) | 1970-07-09 | 1970-08-14 |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2101061B2 (de) |
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1970
- 1970-08-14 FR FR7030040A patent/FR2101061B2/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2101061A2 (de) | 1972-03-31 |