FR2076237A5 - - Google Patents
Info
- Publication number
- FR2076237A5 FR2076237A5 FR7000386A FR7000386A FR2076237A5 FR 2076237 A5 FR2076237 A5 FR 2076237A5 FR 7000386 A FR7000386 A FR 7000386A FR 7000386 A FR7000386 A FR 7000386A FR 2076237 A5 FR2076237 A5 FR 2076237A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7000386A FR2076237A5 (fr) | 1970-01-07 | 1970-01-07 | |
US00102434A US3708229A (en) | 1970-01-07 | 1970-12-29 | System for measuring optical path length across layers of small thickness |
DE19712100236 DE2100236A1 (de) | 1970-01-07 | 1971-01-05 | Anordnung zur Messung von optischen Weglangen unter Anwendung lnterferometn scher Verfahren |
NL7100105A NL7100105A (fr) | 1970-01-07 | 1971-01-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7000386A FR2076237A5 (fr) | 1970-01-07 | 1970-01-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2076237A5 true FR2076237A5 (fr) | 1971-10-15 |
Family
ID=9048677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7000386A Expired FR2076237A5 (fr) | 1970-01-07 | 1970-01-07 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3708229A (fr) |
DE (1) | DE2100236A1 (fr) |
FR (1) | FR2076237A5 (fr) |
NL (1) | NL7100105A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2396286A1 (fr) * | 1977-06-30 | 1979-01-26 | Ibm | Procede et systeme interferometriques pour la mesure de la vitesse de decapage de surfaces opaques |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3804532A (en) * | 1972-08-03 | 1974-04-16 | Us Navy | Transparent film uniformity gauge |
US4289403A (en) * | 1977-03-04 | 1981-09-15 | Isco, Inc. | Optical phase modulation instruments |
US4310245A (en) * | 1980-03-19 | 1982-01-12 | Pritchard James L | Interferometer system |
US4526471A (en) * | 1982-06-17 | 1985-07-02 | Bykov Anatoly P | Method for sensing spatial coordinate of article point and apparatus therefor |
US4999014A (en) * | 1989-05-04 | 1991-03-12 | Therma-Wave, Inc. | Method and apparatus for measuring thickness of thin films |
US5451480A (en) * | 1990-02-26 | 1995-09-19 | At&T Corp. | Artical fabrication utilizing lithographic processes |
WO1992015924A1 (fr) * | 1991-03-04 | 1992-09-17 | Site Services, Inc. | Procedes de photolithographie et d'analyse de developpement |
US5216487A (en) * | 1991-05-22 | 1993-06-01 | Site Services, Inc. | Transmissive system for characterizing materials containing photoreactive constituents |
US5830611A (en) * | 1992-03-05 | 1998-11-03 | Bishop; Kenneth P. | Use of diffracted light from latent images in photoresist for optimizing image contrast |
US7030995B2 (en) * | 2001-12-10 | 2006-04-18 | Zygo Corporation | Apparatus and method for mechanical phase shifting interferometry |
DE102015007054A1 (de) | 2015-06-02 | 2016-12-08 | Thomas Huth-Fehre | Verfahren und Vorrichtung zur Bestimmung der Dicke von dünnen organischen Schichten |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2718811A (en) * | 1952-07-31 | 1955-09-27 | Leitz Ernst Gmbh | Apparatus for determining the thickness of adsorbed supporting liquid layers |
-
1970
- 1970-01-07 FR FR7000386A patent/FR2076237A5/fr not_active Expired
- 1970-12-29 US US00102434A patent/US3708229A/en not_active Expired - Lifetime
-
1971
- 1971-01-05 DE DE19712100236 patent/DE2100236A1/de active Pending
- 1971-01-06 NL NL7100105A patent/NL7100105A/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2396286A1 (fr) * | 1977-06-30 | 1979-01-26 | Ibm | Procede et systeme interferometriques pour la mesure de la vitesse de decapage de surfaces opaques |
Also Published As
Publication number | Publication date |
---|---|
US3708229A (en) | 1973-01-02 |
DE2100236A1 (de) | 1971-07-22 |
NL7100105A (fr) | 1971-07-09 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |