FR2072172A5 - - Google Patents

Info

Publication number
FR2072172A5
FR2072172A5 FR7040285A FR7040285A FR2072172A5 FR 2072172 A5 FR2072172 A5 FR 2072172A5 FR 7040285 A FR7040285 A FR 7040285A FR 7040285 A FR7040285 A FR 7040285A FR 2072172 A5 FR2072172 A5 FR 2072172A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7040285A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2072172A5 publication Critical patent/FR2072172A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
FR7040285A 1969-12-23 1970-10-27 Expired FR2072172A5 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88772569A 1969-12-23 1969-12-23

Publications (1)

Publication Number Publication Date
FR2072172A5 true FR2072172A5 (it) 1971-09-24

Family

ID=25391730

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7040285A Expired FR2072172A5 (it) 1969-12-23 1970-10-27

Country Status (3)

Country Link
DE (1) DE2061942A1 (it)
FR (1) FR2072172A5 (it)
GB (1) GB1277862A (it)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2455075A1 (fr) * 1979-04-24 1980-11-21 Rhone Poulenc Ind Composition a base de solvants chlores pour l'elimination de resines photoresistantes
FR2455076A1 (fr) * 1979-04-24 1980-11-21 Rhone Poulenc Ind Composition pour l'elimination des resines photoresistantes
EP0065977A1 (en) * 1980-12-08 1982-12-08 Western Electric Company, Incorporated Removing hardened organic materials during fabrication of integrated circuits

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8712354D0 (en) * 1987-05-26 1987-07-01 Pyrene Chemical Services Ltd Paint stripper composition

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2455075A1 (fr) * 1979-04-24 1980-11-21 Rhone Poulenc Ind Composition a base de solvants chlores pour l'elimination de resines photoresistantes
FR2455076A1 (fr) * 1979-04-24 1980-11-21 Rhone Poulenc Ind Composition pour l'elimination des resines photoresistantes
EP0065977A1 (en) * 1980-12-08 1982-12-08 Western Electric Company, Incorporated Removing hardened organic materials during fabrication of integrated circuits
EP0065977A4 (en) * 1980-12-08 1986-02-13 Western Electric Co REMOVE CURED ORGANIC MATERIALS DURING THE PRODUCTION OF INTEGRATED CIRCUITS.

Also Published As

Publication number Publication date
GB1277862A (en) 1972-06-14
DE2061942A1 (de) 1971-06-24

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Legal Events

Date Code Title Description
ST Notification of lapse