FR2020888A1 - - Google Patents
Info
- Publication number
- FR2020888A1 FR2020888A1 FR6934775A FR6934775A FR2020888A1 FR 2020888 A1 FR2020888 A1 FR 2020888A1 FR 6934775 A FR6934775 A FR 6934775A FR 6934775 A FR6934775 A FR 6934775A FR 2020888 A1 FR2020888 A1 FR 2020888A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US76853768A | 1968-10-17 | 1968-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2020888A1 true FR2020888A1 (de) | 1970-07-17 |
Family
ID=25082774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR6934775A Withdrawn FR2020888A1 (de) | 1968-10-17 | 1969-10-10 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS493022B1 (de) |
| DE (1) | DE1951336A1 (de) |
| FR (1) | FR2020888A1 (de) |
| GB (1) | GB1278499A (de) |
| NL (1) | NL6914998A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7897061B2 (en) * | 2006-02-01 | 2011-03-01 | Cabot Microelectronics Corporation | Compositions and methods for CMP of phase change alloys |
| JP5017709B2 (ja) | 2006-09-07 | 2012-09-05 | ジルトロニック アクチエンゲゼルシャフト | シリコンウェーハのエッチング方法および半導体シリコンウェーハの製造方法 |
| DE102007061084A1 (de) | 2007-12-19 | 2009-07-02 | Federal-Mogul Sealing Systems Gmbh | Metallische Flachdichtung und Herstellverfahren |
-
1969
- 1969-08-20 GB GB4152969A patent/GB1278499A/en not_active Expired
- 1969-09-29 JP JP7696669A patent/JPS493022B1/ja active Pending
- 1969-10-03 NL NL6914998A patent/NL6914998A/xx unknown
- 1969-10-10 FR FR6934775A patent/FR2020888A1/fr not_active Withdrawn
- 1969-10-11 DE DE19691951336 patent/DE1951336A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1278499A (en) | 1972-06-21 |
| NL6914998A (de) | 1970-04-21 |
| JPS493022B1 (de) | 1974-01-24 |
| DE1951336A1 (de) | 1970-04-23 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |