FR1534762A - Optical probing method and device - Google Patents
Optical probing method and deviceInfo
- Publication number
- FR1534762A FR1534762A FR106895A FR106895A FR1534762A FR 1534762 A FR1534762 A FR 1534762A FR 106895 A FR106895 A FR 106895A FR 106895 A FR106895 A FR 106895A FR 1534762 A FR1534762 A FR 1534762A
- Authority
- FR
- France
- Prior art keywords
- probing method
- optical probing
- optical
- probing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR106895A FR1534762A (en) | 1967-05-18 | 1967-05-18 | Optical probing method and device |
FR150591A FR94871E (en) | 1967-05-18 | 1968-05-03 | Optical probing method and device. |
LU56099D LU56099A1 (en) | 1967-05-18 | 1968-05-16 | |
GB2345068A GB1206668A (en) | 1967-05-18 | 1968-05-16 | Optical contour tracing arrangement |
BE715248D BE715248A (en) | 1967-05-18 | 1968-05-16 | |
DE19681761416 DE1761416A1 (en) | 1967-05-18 | 1968-05-17 | Optical shape scanner |
NL6806977A NL6806977A (en) | 1967-05-18 | 1968-05-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR106895A FR1534762A (en) | 1967-05-18 | 1967-05-18 | Optical probing method and device |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1534762A true FR1534762A (en) | 1968-08-02 |
Family
ID=8631083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR106895A Expired FR1534762A (en) | 1967-05-18 | 1967-05-18 | Optical probing method and device |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE715248A (en) |
DE (1) | DE1761416A1 (en) |
FR (1) | FR1534762A (en) |
GB (1) | GB1206668A (en) |
LU (1) | LU56099A1 (en) |
NL (1) | NL6806977A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2096880A1 (en) * | 1970-06-11 | 1972-03-03 | Mitsubishi Electric Corp | Laser beam machining appts - automatically adjusted using control beam passing through semi-transparent mirrors |
FR2325018A1 (en) * | 1975-06-23 | 1977-04-15 | Ibm | INTERVAL MEASURING DEVICE FOR DEFINING THE DISTANCE BETWEEN TWO OR MORE FACES |
EP0015506A1 (en) * | 1979-03-06 | 1980-09-17 | Dieter Dr. Röss | Change of distance measuring apparatus comprising a laser light source |
FR2503860A1 (en) * | 1981-04-10 | 1982-10-15 | Clemessy | Optical pick=up for surveying linear discontinuities - and controlling welding heads, providing more sensitivity than mechanical followers |
FR2548796A1 (en) * | 1983-07-08 | 1985-01-11 | Comp Generale Electricite | OPTICAL DEVICE FOR DETERMINING THE POSITION AND SHAPE OF THE SURFACE OF AN OBJECT |
DE3428593A1 (en) * | 1983-08-02 | 1985-02-14 | Istituto Nazionale di Ottica, Arcetri, Florenz/Firenze | OPTICAL SURFACE MEASURING DEVICE |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0086540A1 (en) * | 1982-02-17 | 1983-08-24 | CENTRE DE RECHERCHES METALLURGIQUES CENTRUM VOOR RESEARCH IN DE METALLURGIE Association sans but lucratif | Control process for surface treatment by a laser beam |
US4748335A (en) * | 1985-04-19 | 1988-05-31 | Siscan Systems, Inc. | Method and aparatus for determining surface profiles |
US4707610A (en) * | 1985-07-03 | 1987-11-17 | Siscan Systems, Inc. | Method and apparatus for measuring surface profiles |
CH669663A5 (en) * | 1985-12-17 | 1989-03-31 | Schweiz Eidgenossenschaft Sin | |
US5206699A (en) * | 1988-05-06 | 1993-04-27 | Gersan Establishment | Sensing a narrow frequency band of radiation and gemstones |
GB8826224D0 (en) * | 1988-11-09 | 1988-12-14 | Gersan Anstalt | Sensing shape of object |
US20030227614A1 (en) * | 2002-06-05 | 2003-12-11 | Taminiau August A. | Laser machining apparatus with automatic focusing |
GB2405466B (en) | 2003-08-27 | 2006-01-25 | Teraview Ltd | Method and apparatus for investigating a non-planner sample |
CN101573204B (en) * | 2006-12-27 | 2014-01-15 | 罗伯特.博世有限公司 | Laser-beam working device and method for adjusting the focal position |
DE102007035715A1 (en) | 2006-12-27 | 2008-07-03 | Robert Bosch Gmbh | Laser beam processing device for hardening of workpieces, includes device for imaging reflected laser radiation from workpiece onto sensor |
US20220328283A1 (en) * | 2019-08-30 | 2022-10-13 | Asml Netherlands B.V. | Self-differential confocal tilt sensor for measuring level variation in charged particle beam system |
CN111854604B (en) * | 2020-07-28 | 2022-03-22 | 西安中科微精光子制造科技有限公司 | Method and system for measuring shape and position parameters of air film hole by focusing laser beam |
-
1967
- 1967-05-18 FR FR106895A patent/FR1534762A/en not_active Expired
-
1968
- 1968-05-16 GB GB2345068A patent/GB1206668A/en not_active Expired
- 1968-05-16 LU LU56099D patent/LU56099A1/xx unknown
- 1968-05-16 BE BE715248D patent/BE715248A/xx unknown
- 1968-05-17 DE DE19681761416 patent/DE1761416A1/en active Pending
- 1968-05-17 NL NL6806977A patent/NL6806977A/xx unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2096880A1 (en) * | 1970-06-11 | 1972-03-03 | Mitsubishi Electric Corp | Laser beam machining appts - automatically adjusted using control beam passing through semi-transparent mirrors |
FR2325018A1 (en) * | 1975-06-23 | 1977-04-15 | Ibm | INTERVAL MEASURING DEVICE FOR DEFINING THE DISTANCE BETWEEN TWO OR MORE FACES |
EP0015506A1 (en) * | 1979-03-06 | 1980-09-17 | Dieter Dr. Röss | Change of distance measuring apparatus comprising a laser light source |
FR2503860A1 (en) * | 1981-04-10 | 1982-10-15 | Clemessy | Optical pick=up for surveying linear discontinuities - and controlling welding heads, providing more sensitivity than mechanical followers |
FR2548796A1 (en) * | 1983-07-08 | 1985-01-11 | Comp Generale Electricite | OPTICAL DEVICE FOR DETERMINING THE POSITION AND SHAPE OF THE SURFACE OF AN OBJECT |
DE3428593A1 (en) * | 1983-08-02 | 1985-02-14 | Istituto Nazionale di Ottica, Arcetri, Florenz/Firenze | OPTICAL SURFACE MEASURING DEVICE |
Also Published As
Publication number | Publication date |
---|---|
NL6806977A (en) | 1968-11-19 |
BE715248A (en) | 1968-11-18 |
DE1761416A1 (en) | 1971-07-01 |
LU56099A1 (en) | 1970-01-14 |
GB1206668A (en) | 1970-09-30 |
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