FR1484134A - Beta tantalum thin film resistant elements - Google Patents

Beta tantalum thin film resistant elements

Info

Publication number
FR1484134A
FR1484134A FR66111A FR66111A FR1484134A FR 1484134 A FR1484134 A FR 1484134A FR 66111 A FR66111 A FR 66111A FR 66111 A FR66111 A FR 66111A FR 1484134 A FR1484134 A FR 1484134A
Authority
FR
France
Prior art keywords
thin film
resistant elements
tantalum thin
film resistant
beta tantalum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR66111A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of FR1484134A publication Critical patent/FR1484134A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Electronic Switches (AREA)
  • Electron Beam Exposure (AREA)
  • Liquid Crystal (AREA)
FR66111A 1965-07-12 1966-06-20 Beta tantalum thin film resistant elements Expired FR1484134A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US470981A US3391373A (en) 1965-07-12 1965-07-12 Beta tantalum resistors

Publications (1)

Publication Number Publication Date
FR1484134A true FR1484134A (en) 1967-06-09

Family

ID=23869822

Family Applications (1)

Application Number Title Priority Date Filing Date
FR66111A Expired FR1484134A (en) 1965-07-12 1966-06-20 Beta tantalum thin film resistant elements

Country Status (10)

Country Link
US (1) US3391373A (en)
AT (1) AT263942B (en)
BE (1) BE683045A (en)
CH (1) CH511501A (en)
DE (1) DE1615051A1 (en)
ES (1) ES328726A1 (en)
FR (1) FR1484134A (en)
GB (1) GB1153485A (en)
NL (1) NL6609533A (en)
SE (1) SE341422B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473146A (en) * 1967-10-10 1969-10-14 Trw Inc Electrical resistor having low resistance values
US3805210A (en) * 1969-12-04 1974-04-16 M Croset Integrated circuit resistor and a method for the manufacture thereof
JPS5535843B2 (en) * 1972-12-28 1980-09-17
US4713529A (en) * 1986-09-15 1987-12-15 Gte Products Corporation Electroceramic heating devices with welded leads
JP4207951B2 (en) * 2005-12-06 2009-01-14 Ｔｄｋ株式会社 β-phase Ta thin film resistor and thin film magnetic head provided with the thin film resistor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
NL286998A (en) * 1961-12-27

Also Published As

Publication number Publication date
NL6609533A (en) 1967-01-13
GB1153485A (en) 1969-05-29
US3391373A (en) 1968-07-02
SE341422B (en) 1971-12-27
DE1615051A1 (en) 1970-05-27
BE683045A (en) 1966-12-01
CH511501A (en) 1971-08-15
ES328726A1 (en) 1967-04-01
AT263942B (en) 1968-08-12

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